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Title: Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

Abstract

The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.

Inventors:
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1330348
Patent Number(s):
9,477,040
Application Number:
14/801,257
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jul 16
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Skogen, Erik J. Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof. United States: N. p., 2016. Web.
Skogen, Erik J. Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof. United States.
Skogen, Erik J. Tue . "Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof". United States. https://www.osti.gov/servlets/purl/1330348.
@article{osti_1330348,
title = {Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof},
author = {Skogen, Erik J.},
abstractNote = {The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {10}
}

Patent:

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Works referenced in this record:

A widely tunable high-speed transmitter using an integrated SGDBR laser-semiconductor optical amplifier and mach-zehnder modulator
journal, September 2003

  • Barton, J. S.; Skogen, E. J.; Masanovic, M. L.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 9, Issue 5
  • DOI: 10.1109/JSTQE.2003.819477

Efficient vertical coupling of photodiodes to InGaAsP rib waveguides
journal, June 1991

  • Deri, R. J.; Doldissen, W.; Hawkins, R. J.
  • Applied Physics Letters, Vol. 58, Issue 24
  • DOI: 10.1063/1.104774

Hybrid Silicon Photonics for Optical Interconnects
journal, March 2011

  • Heck, Martijn J. R.; Chen, Hui-Wen; Fang, Alexander W.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 17, Issue 2
  • DOI: 10.1109/JSTQE.2010.2051798

Quantum-well-intermixed monolithically integrated widely tunable all-optical wavelength converter operating at 10 Gb/s
journal, August 2005

  • Lal, V.; Masanovic, M. L.; Skogen, E. J.
  • IEEE Photonics Technology Letters, Vol. 17, Issue 8
  • DOI: 10.1109/LPT.2005.851891

High-Saturation-Current Charge-Compensated InGaAs–InP Uni-Traveling-Carrier Photodiode
journal, March 2004


Enhanced photoluminescence emission from bandgap shifted InGaAs/InGaAsP/InP microstructures processed with UV laser quantum well intermixing
journal, October 2013


Quantum well intermixing
journal, June 1993


Cross-phase modulation efficiency in offset quantum-well and centered quantum-well semiconductor optical amplifiers
journal, November 2005

  • Masanovic, M. L.; Lal, V.; Skogen, E. J.
  • IEEE Photonics Technology Letters, Vol. 17, Issue 11
  • DOI: 10.1109/LPT.2005.858162

Electroabsorption modulator performance predicted from band-edge absorption spectra of bulk, quantum-well, and quantum-well-intermixed InGaAsP structures
journal, January 2007

  • Morrison, Gordon B.; Raring, James W.; Wang, Chad S.
  • Solid-State Electronics, Vol. 51, Issue 1, p. 38-47
  • DOI: 10.1016/j.sse.2006.10.013

Photocurrent spectroscopy analysis of widely tunable negative-chirp quantum-well intermixed laser-modulator transmitters
journal, January 2005

  • Morrison, G. B.; Raring, J. W.; Skogen, E. J.
  • Applied Physics Letters, Vol. 86, Issue 7
  • DOI: 10.1063/1.1865330

Photocurrent spectroscopy for quantum-well intermixed photonic integrated circuit design
journal, July 2005

  • Morrison, G. B.; Skogen, E. J.; Wang, C. S.
  • IEEE Photonics Technology Letters, Vol. 17, Issue 7
  • DOI: 10.1109/LPT.2005.848543

40 Gbit/s photonic receivers integrating UTC photodiodes with high- and low-confinement SOAs using quantum well intermixing and MOCVD regrowth
journal, January 2006

  • Raring, J. W.; Johansson, L. A.; Skogen, E. J.
  • Electronics Letters, Vol. 42, Issue 16
  • DOI: 10.1049/el:20061368

A study of regrowth interface and material quality for a novel InP-based architecture
journal, December 2004


Demonstration of high saturation power∕high gain SOAs using quantum well intermixing based integration platform
journal, January 2005

  • Raring, J. W.; Skogen, E. J.; Mašanović, M. L.
  • Electronics Letters, Vol. 41, Issue 24
  • DOI: 10.1049/el:20053248

Demonstration of negative chirp characteristics over wide wavelength range using monolithically integrated SG-DBR laser∕electroabsorption modulator
journal, January 2004

  • Raring, J. W.; Skogen, E. J.; DenBaars, S. P.
  • Electronics Letters, Vol. 40, Issue 25
  • DOI: 10.1049/el:20047306

Demonstration of Widely Tunable Single-Chip 10-Gb/s Laser–Modulators Using Multiple-Bandgap InGaAsP Quantum-Well Intermixing
journal, July 2004

  • Raring, J. W.; Skogen, E. J.; Johansson, L. A.
  • IEEE Photonics Technology Letters, Vol. 16, Issue 7
  • DOI: 10.1109/LPT.2004.828853

Design and Demonstration of Novel QW Intermixing Scheme for the Integration of UTC-Type Photodiodes With QW-Based Components
journal, February 2006

  • Raring, J. W.; Skogen, E. J.; Wang, C. S.
  • IEEE Journal of Quantum Electronics, Vol. 42, Issue 2
  • DOI: 10.1109/JQE.2005.862030

Quantum well intermixing and MOCVD regrowth for monolithic integration of 40 Gbit∕s UTC type photodiodes with QW based components
journal, January 2005

  • Raring, J. W.; Skogen, E. J.; Barton, J. S.
  • Electronics Letters, Vol. 41, Issue 18
  • DOI: 10.1049/el:20051879

Integration of high-gain and high-saturation-power active regions using quantum-well intermixing and offset-quantum-well regrowth
journal, January 2004

  • Skogen, E.; Raring, J.; DenBaars, S.
  • Electronics Letters, Vol. 40, Issue 16
  • DOI: 10.1049/el:20045232

A quantum-well-intermixing process for wavelength-agile photonic integrated circuits
journal, July 2002

  • Skogen, E.J.; Barton, J.S.; Denbaars, S.P.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 8, Issue 4, p. 863-869
  • DOI: 10.1109/JSTQE.2002.800849

High contrast InP/InGaAsP grating MOCVD regrowth using TBA and TBP
journal, December 2004

  • Skogen, Erik J.; Barton, Jonathon S.; Raring, James W.
  • Journal of Crystal Growth, Vol. 272, Issue 1-4, p. 564-569
  • DOI: 10.1016/j.jcrysgro.2004.09.008

Integrated Guided-Wave Photodiode Using Through-Absorber Quantum-Well-Intermixing
journal, September 2013

  • Skogen, Erik J.; Vawter, G. Allen; Tauke-Pedretti, Anna
  • IEEE Photonics Technology Letters, Vol. 25, Issue 17
  • DOI: 10.1109/LPT.2013.2273754

Monolithically integrated active components: a quantum-well intermixing approach
journal, March 2005

  • Skogen, E. J.; Raring, J. W.; Morrison, G. B.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 11, Issue 2, p. 343-355
  • DOI: 10.1109/JSTQE.2005.846525

Multiple-band-edge quantum-well intermixing in the InGaAs∕InGaAsP∕InGaP material system
journal, June 2005

  • Skogen, Erik J.; Coldren, Larry A.; Raring, James W.
  • Applied Physics Letters, Vol. 86, Issue 24
  • DOI: 10.1063/1.1946903

Optical AND and NOT gates at 40 Gbps using electro-absorption modulator/photodiode Pairs
conference, November 2010


Postgrowth control of the quantum-well band edge for the monolithic integration of widely tunable lasers and electroabsorption modulators
journal, September 2003

  • Skogen, E. J.; Raring, J. W.; Barton, J. S.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 9, Issue 5
  • DOI: 10.1109/JSTQE.2003.819491

Tunable buried ridge stripe sampled grating distributed Bragg reflector lasers utilizing quantum well intermixing
conference, January 2001

  • Skogen, E. J.; Barton, J.; DenBaars, S. P.
  • LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)
  • DOI: 10.1109/leos.2001.969226

Tunable sampled-grating DBR lasers using quantum-well intermixing
journal, September 2002

  • Skogen, E. J.; Barton, J. S.; DenBaars, S. P.
  • IEEE Photonics Technology Letters, Vol. 14, Issue 9
  • DOI: 10.1109/LPT.2002.801594

Quantum well intermixed waveguide grating
journal, July 2011


Integration of hybrid silicon lasers and electroabsorption modulators
journal, January 2008

  • Sysak, Matthew N.; Anthes, Joel O.; Bowers, John E.
  • Optics Express, Vol. 16, Issue 17
  • DOI: 10.1364/OE.16.012478

Mutual Injection Locking of Monolithically Integrated Coupled-Cavity DBR Lasers
journal, July 2011

  • Tauke-Pedretti, Anna; Vawter, G. Allen; Skogen, Erik J.
  • IEEE Photonics Technology Letters, Vol. 23, Issue 13
  • DOI: 10.1109/LPT.2011.2140099

Fabrication and molecular beam epitaxy regrowth of first-order, high contrast AlGaAs∕GaAs gratings
journal, January 2006

  • Wang, C. S.; Morrison, G. B.; Skogen, E. J.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 3
  • DOI: 10.1116/1.2190679

Towards Monolithic Integration of Nonlinear Optical Frequency Conversion
journal, September 2010

  • Younis, Usman; Holmes, Barry M.; Hutchings, David C.
  • IEEE Photonics Technology Letters, Vol. 22, Issue 18
  • DOI: 10.1109/LPT.2010.2055843