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Low-stress doped ultrananocrystalline diamond

Patent ·
OSTI ID:1330330
; ;
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.
Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357;
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
9,475,690
Application Number:
14/283,098
OSTI ID:
1330330
Country of Publication:
United States
Language:
English

References (10)

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Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices journal May 2013
Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators journal August 2014
Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films journal September 2001
Thermal conductivity of nitrogenated ultrananocrystalline diamond films on silicon journal April 2008
A thermal actuator for nanoscale in situ microscopy testing: design and characterization journal January 2006
First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls
  • Buja, Federico; Kokorian, Jaap; Sumant, Anirudha V.
  • 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) https://doi.org/10.1109/NEMS.2014.6908763
conference April 2014
Routes to failure in rotating MEMS devices experiencing sliding friction conference September 1997

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