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Title: Low-stress doped ultrananocrystalline diamond

Abstract

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Inventors:
; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1330330
Patent Number(s):
9,475,690
Application Number:
14/283,098
Assignee:
UChicago Argonne, LLC (Chicago, IL)
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 May 20
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States: N. p., 2016. Web.
Sumant, Anirudha V., Buja, Federico, & van Spengen, Willem Merlijn. Low-stress doped ultrananocrystalline diamond. United States.
Sumant, Anirudha V., Buja, Federico, and van Spengen, Willem Merlijn. Tue . "Low-stress doped ultrananocrystalline diamond". United States. https://www.osti.gov/servlets/purl/1330330.
@article{osti_1330330,
title = {Low-stress doped ultrananocrystalline diamond},
author = {Sumant, Anirudha V. and Buja, Federico and van Spengen, Willem Merlijn},
abstractNote = {Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {10}
}

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Works referenced in this record:

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