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Title: Fabrication method for small-scale structures with non-planar features

Abstract

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1325765
Patent Number(s):
9,448,336
Application Number:
14/548,070
Assignee:
Sandia Corporation (Albquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Nov 19
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING

Citation Formats

Burckel, David Bruce, and Ten Eyck, Gregory A. Fabrication method for small-scale structures with non-planar features. United States: N. p., 2016. Web.
Burckel, David Bruce, & Ten Eyck, Gregory A. Fabrication method for small-scale structures with non-planar features. United States.
Burckel, David Bruce, and Ten Eyck, Gregory A. Tue . "Fabrication method for small-scale structures with non-planar features". United States. doi:. https://www.osti.gov/servlets/purl/1325765.
@article{osti_1325765,
title = {Fabrication method for small-scale structures with non-planar features},
author = {Burckel, David Bruce and Ten Eyck, Gregory A.},
abstractNote = {The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 20 00:00:00 EDT 2016},
month = {Tue Sep 20 00:00:00 EDT 2016}
}

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Works referenced in this record:

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