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Title: Liquid flow cells having graphene on nitride for microscopy

Abstract

This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.

Inventors:
; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1325694
Patent Number(s):
9,449,787
Application Number:
14/817,551
Assignee:
The Regents of the University of California (Oakland, CA) LBNL
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Aug 04
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States: N. p., 2016. Web.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., & Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. Tue . "Liquid flow cells having graphene on nitride for microscopy". United States. doi:. https://www.osti.gov/servlets/purl/1325694.
@article{osti_1325694,
title = {Liquid flow cells having graphene on nitride for microscopy},
author = {Adiga, Vivekananda P. and Dunn, Gabriel and Zettl, Alexander K. and Alivisatos, A. Paul},
abstractNote = {This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 20 00:00:00 EDT 2016},
month = {Tue Sep 20 00:00:00 EDT 2016}
}

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Works referenced in this record:

Liquid scanning transmission electron microscopy: Nanoscale imaging in micrometers-thick liquids
journal, February 2014