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Title: Liquid flow cells having graphene on nitride for microscopy

Abstract

This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.

Inventors:
; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1325694
Patent Number(s):
9,449,787
Application Number:
14/817,551
Assignee:
The Regents of the University of California (Oakland, CA) LBNL
DOE Contract Number:
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Aug 04
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States: N. p., 2016. Web.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., & Alivisatos, A. Paul. Liquid flow cells having graphene on nitride for microscopy. United States.
Adiga, Vivekananda P., Dunn, Gabriel, Zettl, Alexander K., and Alivisatos, A. Paul. 2016. "Liquid flow cells having graphene on nitride for microscopy". United States. doi:. https://www.osti.gov/servlets/purl/1325694.
@article{osti_1325694,
title = {Liquid flow cells having graphene on nitride for microscopy},
author = {Adiga, Vivekananda P. and Dunn, Gabriel and Zettl, Alexander K. and Alivisatos, A. Paul},
abstractNote = {This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 2016,
month = 9
}

Patent:

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