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Title: 4H–SiC homoepitaxy on nearly on-axis substrates using TFS-towards high quality epitaxial growth

Journal Article · · Journal of Crystal Growth

Sponsoring Organization:
USDOE
Grant/Contract Number:
12-3834
OSTI ID:
1324352
Journal Information:
Journal of Crystal Growth, Journal Name: Journal of Crystal Growth Vol. 448 Journal Issue: C; ISSN 0022-0248
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English
Citation Metrics:
Cited by: 10 works
Citation information provided by
Web of Science

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