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Title: Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

Authors:
 [1];  [1];  [1];  [1]
  1. Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1322424
Grant/Contract Number:  
SC0004782
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 146; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-02-15 02:55:17; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Mackus, Adriaan J. M., MacIsaac, Callisto, Kim, Woo-Hee, and Bent, Stacey F. Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide. United States: N. p., 2017. Web. doi:10.1063/1.4961459.
Mackus, Adriaan J. M., MacIsaac, Callisto, Kim, Woo-Hee, & Bent, Stacey F. Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide. United States. doi:10.1063/1.4961459.
Mackus, Adriaan J. M., MacIsaac, Callisto, Kim, Woo-Hee, and Bent, Stacey F. Tue . "Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide". United States. doi:10.1063/1.4961459.
@article{osti_1322424,
title = {Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide},
author = {Mackus, Adriaan J. M. and MacIsaac, Callisto and Kim, Woo-Hee and Bent, Stacey F.},
abstractNote = {},
doi = {10.1063/1.4961459},
journal = {Journal of Chemical Physics},
number = 5,
volume = 146,
place = {United States},
year = {Tue Feb 07 00:00:00 EST 2017},
month = {Tue Feb 07 00:00:00 EST 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4961459

Citation Metrics:
Cited by: 3 works
Citation information provided by
Web of Science

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