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Title: Laser damage mechanisms in conductive widegap semiconductor films

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.24.017616· OSTI ID:1313552
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  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Cornell Univ., Ithaca, NY (United States)
  3. Univ. of Rochester, Rochester, NY (United States)
+ Show Author Affiliations

Here, laser damage mechanisms of two conductive wide-bandgap semiconductor films - indium tin oxide (ITO) and silicon doped GaN (Si:GaN) were studied via microscopy, spectroscopy, photoluminescence (PL), and elemental analysis. Nanosecond laser pulse exposures with a laser photon energy (1.03 eV, 1064 nm) smaller than the conductive films bandgaps were applied and radically different film damage morphologies were produced. The laser damaged ITO film exhibited deterministic features of thermal degradation. In contrast, laser damage in the Si:GaN film resulted in highly localized eruptions originating at interfaces. For ITO, thermally driven damage was related to free carrier absorption and, for GaN, carbon complexes were proposed as potential damage precursors or markers.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC52-07NA27344
OSTI ID:
1313552
Report Number(s):
LLNL-JRNL-694293; OPEXFF
Journal Information:
Optics Express, Vol. 24, Issue 16; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 25 works
Citation information provided by
Web of Science

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Cited By (5)

A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications journal September 2019
Mid-infrared femtosecond laser-induced damages in As2S3 and As2Se3 chalcogenide glasses journal July 2017
Lifetime laser damage performance of β-Ga 2 O 3 for high power applications journal March 2018
Thermally ruggedized ITO transparent electrode films for high power optoelectronics journal January 2017
A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications journal September 2019

Figures / Tables (17)

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Related Subjects

36 MATERIALS SCIENCE
lasers and laser optics
laser materials
laser damage
optics at surfaces