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Title: Integrated field emission array for ion desorption

Abstract

An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.

Inventors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1303256
Patent Number(s):
9,425,019
Application Number:
14/640,655
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Mar 06
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, and Chichester, David. Integrated field emission array for ion desorption. United States: N. p., 2016. Web.
Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, & Chichester, David. Integrated field emission array for ion desorption. United States.
Resnick, Paul J, Hertz, Kristin L., Holland, Christopher, and Chichester, David. Tue . "Integrated field emission array for ion desorption". United States. doi:. https://www.osti.gov/servlets/purl/1303256.
@article{osti_1303256,
title = {Integrated field emission array for ion desorption},
author = {Resnick, Paul J and Hertz, Kristin L. and Holland, Christopher and Chichester, David},
abstractNote = {An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 23 00:00:00 EDT 2016},
month = {Tue Aug 23 00:00:00 EDT 2016}
}

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Works referenced in this record:

All-metallic three-dimensional photonic crystals with a large infrared bandgap
journal, May 2002

  • Fleming, J. G.; Lin, S. Y.; El-Kady, I.
  • Nature, Vol. 417, Issue 6884, p. 52-55
  • DOI: 10.1038/417052a

An integrated field emission array for ion desorption
journal, May 2010

  • Resnick, P. J.; Holland, C. E.; Schwoebel, P. R.
  • Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265
  • DOI: 10.1016/j.mee.2009.11.036