skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.

Abstract

Abstract not provided.

Authors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1294181
Report Number(s):
SAND2012-3948C
534097
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the International conference on electron, ion and photon beam technology and nanofabrication held May 29 - June 1, 2012 in Waikoloa, HI.
Country of Publication:
United States
Language:
English

Citation Formats

Douglas, Erica Ann, Stevens, Jeffrey, Shul, Randy John, and Pearton, Stephen J. Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.. United States: N. p., 2012. Web.
Douglas, Erica Ann, Stevens, Jeffrey, Shul, Randy John, & Pearton, Stephen J. Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.. United States.
Douglas, Erica Ann, Stevens, Jeffrey, Shul, Randy John, and Pearton, Stephen J. Tue . "Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.". United States. doi:. https://www.osti.gov/servlets/purl/1294181.
@article{osti_1294181,
title = {Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.},
author = {Douglas, Erica Ann and Stevens, Jeffrey and Shul, Randy John and Pearton, Stephen J.},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 01 00:00:00 EDT 2012},
month = {Tue May 01 00:00:00 EDT 2012}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: