Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography
Abstract
Magnetic nanoparticles produced via nanoimprint lithography can change the current paradigm of fabrication processes from chemical “bottom-up” synthesis to “top-down” fabrication. The combination of controlled nondirectional magnetron sputtering, ETFE mold, bilayer lift-off, and dry etching release can control the shape, size, and structure of the fabricated nanoparticles. The resulting magnetic nanoparticles have a novel “sombrero” shape with complex and unique physical/magnetic properties.
- Authors:
-
- Department of Materials Science and Engineering, University of Washington, Seattle WA 98195 USA
- Argonne National Laboratory, Lemont IL 60439 USA
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences and Engineering Division
- OSTI Identifier:
- 1287491
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Journal Article
- Journal Name:
- Advanced Materials Interfaces
- Additional Journal Information:
- Journal Volume: 2; Journal Issue: 3; Journal ID: ISSN 2196-7350
- Publisher:
- Wiley-VCH
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Kwon, Byung Seok, Zhang, Wei, Li, Zheng, and Krishnan, Kannan M. Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography. United States: N. p., 2015.
Web. doi:10.1002/admi.201400511.
Kwon, Byung Seok, Zhang, Wei, Li, Zheng, & Krishnan, Kannan M. Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography. United States. https://doi.org/10.1002/admi.201400511
Kwon, Byung Seok, Zhang, Wei, Li, Zheng, and Krishnan, Kannan M. 2015.
"Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography". United States. https://doi.org/10.1002/admi.201400511.
@article{osti_1287491,
title = {Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography},
author = {Kwon, Byung Seok and Zhang, Wei and Li, Zheng and Krishnan, Kannan M.},
abstractNote = {Magnetic nanoparticles produced via nanoimprint lithography can change the current paradigm of fabrication processes from chemical “bottom-up” synthesis to “top-down” fabrication. The combination of controlled nondirectional magnetron sputtering, ETFE mold, bilayer lift-off, and dry etching release can control the shape, size, and structure of the fabricated nanoparticles. The resulting magnetic nanoparticles have a novel “sombrero” shape with complex and unique physical/magnetic properties.},
doi = {10.1002/admi.201400511},
url = {https://www.osti.gov/biblio/1287491},
journal = {Advanced Materials Interfaces},
issn = {2196-7350},
number = 3,
volume = 2,
place = {United States},
year = {Sat Jan 10 00:00:00 EST 2015},
month = {Sat Jan 10 00:00:00 EST 2015}
}
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