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Title: X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching

Authors:
 [1];  [2];  [1];  [1];  [1];  [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. University of California, Berkeley, California 94720, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1275973
Grant/Contract Number:
AC02-05CH11231
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 109; Journal Issue: 4; Related Information: CHORUS Timestamp: 2018-03-09 12:07:22; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Voronov, Dmitriy L., Lum, Paul, Naulleau, Patrick, Gullikson, Eric M., Fedorov, Alexei V., and Padmore, Howard A. X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching. United States: N. p., 2016. Web. doi:10.1063/1.4960203.
Voronov, Dmitriy L., Lum, Paul, Naulleau, Patrick, Gullikson, Eric M., Fedorov, Alexei V., & Padmore, Howard A. X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching. United States. doi:10.1063/1.4960203.
Voronov, Dmitriy L., Lum, Paul, Naulleau, Patrick, Gullikson, Eric M., Fedorov, Alexei V., and Padmore, Howard A. Fri . "X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching". United States. doi:10.1063/1.4960203.
@article{osti_1275973,
title = {X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching},
author = {Voronov, Dmitriy L. and Lum, Paul and Naulleau, Patrick and Gullikson, Eric M. and Fedorov, Alexei V. and Padmore, Howard A.},
abstractNote = {},
doi = {10.1063/1.4960203},
journal = {Applied Physics Letters},
number = 4,
volume = 109,
place = {United States},
year = {Fri Jul 29 00:00:00 EDT 2016},
month = {Fri Jul 29 00:00:00 EDT 2016}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4960203

Citation Metrics:
Cited by: 3works
Citation information provided by
Web of Science

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