skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Dynamic Pull-in and Switching for Sub-Pull-In Voltage Electrostatic Actuation.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1267014
Report Number(s):
SAND2007-1431C
526816
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the The 14th International Conference on Solid-State Sensors, Actuators, and Microsystems held June 10-14, 2007 in Lyon, FRANCE.
Country of Publication:
United States
Language:
English

Citation Formats

Nielson, Gregory N., Olsson, Roy H.,, Bogart, Gregory Robert, Resnick, Paul J., Spahn, Olga B., Tigges, Christopher P., GROSSETETE, GRANT, and Barbastathis, George. Dynamic Pull-in and Switching for Sub-Pull-In Voltage Electrostatic Actuation.. United States: N. p., 2007. Web.
Nielson, Gregory N., Olsson, Roy H.,, Bogart, Gregory Robert, Resnick, Paul J., Spahn, Olga B., Tigges, Christopher P., GROSSETETE, GRANT, & Barbastathis, George. Dynamic Pull-in and Switching for Sub-Pull-In Voltage Electrostatic Actuation.. United States.
Nielson, Gregory N., Olsson, Roy H.,, Bogart, Gregory Robert, Resnick, Paul J., Spahn, Olga B., Tigges, Christopher P., GROSSETETE, GRANT, and Barbastathis, George. Thu . "Dynamic Pull-in and Switching for Sub-Pull-In Voltage Electrostatic Actuation.". United States. doi:. https://www.osti.gov/servlets/purl/1267014.
@article{osti_1267014,
title = {Dynamic Pull-in and Switching for Sub-Pull-In Voltage Electrostatic Actuation.},
author = {Nielson, Gregory N. and Olsson, Roy H., and Bogart, Gregory Robert and Resnick, Paul J. and Spahn, Olga B. and Tigges, Christopher P. and GROSSETETE, GRANT and Barbastathis, George},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Mar 01 00:00:00 EST 2007},
month = {Thu Mar 01 00:00:00 EST 2007}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share:
  • Abstract not provided.
  • The electrostatic comb finger drive has become an integral design for microsensor and microactuator applications. This paper reports on utilizing the levitation effect of comb fingers to design vertical-to-the-substrate actuation for interferometric applications. For typical polysilicon comb drives with 2 {micro}m gaps between the stationary and moving fingers, as well as between the microstructures and the substrate, the equilibrium position is nominally 1-2 {micro}m above the stationary comb fingers. This distance is ideal for many phase shifting interferometric applications. Theoretical calculations of the vertical actuation characteristics are compared with the experimental results, and a general design guideline is derived frommore » these results. The suspension flexure stiffnesses, gravity forces, squeeze film damping, and comb finger thicknesses are parameters investigated which affect the displacement curve of the vertical microactuator. By designing a parallel plate capacitor between the suspended mass and the substrate, in situ position sensing can be used to control the vertical movement, providing a total feedback-controlled system. Fundamentals of various capacitive position sensing techniques are discussed. Experimental verification is carried out by a Zygo distance measurement interferometer.« less
  • No abstract prepared.
  • We report on experimental work that characterizes the frequency response of resonators of Microfabricated Acoustic Spectrum Analyzer (MASA) devices which were fabricated using Sandia's SUMMiT processing technology. A 1.1 micron silicon nitride layer was used in the fabrication to isolate the sense mechanism from the actuation mechanism. The devices are actuated using electrostatic vertical comb-drive actuation in a 30-50 mTorr vacuum and the frequency response is measured using a piezo-resistive readout mechanism. Two MASA devices are tested using comb-drive ac signals (e.g., 200mV) superimposed on a dc bias (e.g., 15V). In addition, dc bias voltages placed on the comb-drive aremore » shown to tune the resonant frequency of the resonator. The frequency response of the piezo-resistive readout mechanism is measured using a 10V dc supply voltage supplied across its Wheatstone bridge. The results show that the piezo-resistive readout mechanism can detect resonant behavior and determine resonant frequency. A laser doppler vibrometer is used as an independent means to characterize the frequency response and verify the results.« less
  • An analysis of the dynamic characteristics of pull-in for parallel-plate and torsional electrostatic actuators is presented. Traditionally, the analysis for pull-in has been done using quasi-static assumptions. However, it was recently shown experimentally that a step input can cause a decrease in the voltage required for pull-in to occur. We propose an energy-based solution for the step voltage required for pull-in that predicts the experimentally observed decrease in the pull-in voltage. We then use similar energy techniques to explore pull-in due to an actuation signal that is modulated depending on the sign of the velocity of the plate (i.e., modulatedmore » at the instantaneous mechanical resonant frequency). For this type of actuation signal, significant reductions in the pull-in voltage can theoretically be achieved without changing the stiffness of the structure. This analysis is significant to both parallel-plate and torsional electrostatic microelectromechanical systems (MEMS) switching structures where a reduced operating voltage without sacrificing stiffness is desired, as well as electrostatic MEMS oscillators where pull-in due to dynamic effects needs to be avoided.« less