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Title: Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Abstract

We have developed new, corrosion-resistant Mg/SiC multilayer coatings which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation is achieved through the use of partially amorphous Al-Mg thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Unprotected Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiplewavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

Authors:
 [1];  [1];  [1];  [2];  [2];  [2];  [3]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Consejo Superior de Investigaciones Cientificas (CSIC), Madrid (Spain), Instituto de Optica
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (USA); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1266671
Report Number(s):
LLNL-JRNL-574772
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:  
AC52-07NA27344; AC05-00OR22725
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 20; Journal Issue: 21; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis Rodríguez, Méndez, Jose A., Larruquert, Juan I., and Gullikson, Eric M. Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region. United States: N. p., 2012. Web. doi:10.1364/OE.20.024018.
Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis Rodríguez, Méndez, Jose A., Larruquert, Juan I., & Gullikson, Eric M. Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region. United States. https://doi.org/10.1364/OE.20.024018
Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis Rodríguez, Méndez, Jose A., Larruquert, Juan I., and Gullikson, Eric M. Sun . "Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region". United States. https://doi.org/10.1364/OE.20.024018. https://www.osti.gov/servlets/purl/1266671.
@article{osti_1266671,
title = {Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region},
author = {Fernández-Perea, Mónica and Soufli, Regina and Robinson, Jeff C. and De Marcos, Luis Rodríguez and Méndez, Jose A. and Larruquert, Juan I. and Gullikson, Eric M.},
abstractNote = {We have developed new, corrosion-resistant Mg/SiC multilayer coatings which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation is achieved through the use of partially amorphous Al-Mg thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Unprotected Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiplewavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.},
doi = {10.1364/OE.20.024018},
url = {https://www.osti.gov/biblio/1266671}, journal = {Optics Express},
issn = {1094-4087},
number = 21,
volume = 20,
place = {United States},
year = {2012},
month = {1}
}

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Cited by: 17 works
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