Ultrathin gas permeable oxide membranes for chemical sensing: Nanoporous Ta2O5 test study

Imbault, Alexander; Wang, Yue; Kruse, Peter; Comini, Elisabetta; Sberveglieri, Giorgio; Kolmakov, Andrei; Strelcov, Evgheni

doi:10.3390/ma8105333

Title: Ultrathin gas permeable oxide membranes for chemical sensing: Nanoporous Ta₂O₅ test study

Journal Article · Fri Sep 25 00:00:00 EDT 2015 · Materials

DOI:https://doi.org/10.3390/ma8105333· OSTI ID:1263868

Imbault, Alexander ^[1]; Wang, Yue ^[1]; Kruse, Peter ^[1]; Comini, Elisabetta ^[2]; Sberveglieri, Giorgio ^[2]; Kolmakov, Andrei ^[3]; Strelcov, Evgheni ^[4]

McMaster Univ., Hamilton, ON (Canada)
Univ. of Brescia and CNR-INO, Brescia (Italy)
Southern Illinois Univ. at Carbondale, Carbondale, IL (United States)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Conductometric gas sensors made of gas permeable metal oxide ultrathin membranes can combine the functions of a selective filter, preconcentrator, and sensing element and thus can be particularly promising for the active sampling of diluted analytes. Here we report a case study of the electron transport and gas sensing properties of such a membrane made of nanoporous Ta₂O₅. These membranes demonstrated a noticeable chemical sensitivity toward ammonia, ethanol, and acetone at high temperatures above 400 °C. Furthermore, different from traditional thin films, such gas permeable, ultrathin gas sensing elements can be made suspended enabling advanced architectures of ultrasensitive analytical systems operating at high temperatures and in harsh environments.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1263868

Journal Information:: Materials, Vol. 8, Issue 10; ISSN 1996-1944

Publisher:: MDPICopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 6 works

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37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
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metal oxide
ultrathin membrane
gas sensor
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Title: Ultrathin gas permeable oxide membranes for chemical sensing: Nanoporous Ta2O5 test study

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