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Title: Methods and apparatus for use with extreme ultraviolet light having contamination protection

Abstract

An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.

Inventors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1261608
Patent Number(s):
9,389,180
Application Number:
14/176,587
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Feb 10
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Chilese, Francis C., Torczynski, John R., Garcia, Rudy, Klebanoff, Leonard E., Delgado, Gildardo R., Rader, Daniel J., Geller, Anthony S., and Gallis, Michail A. Methods and apparatus for use with extreme ultraviolet light having contamination protection. United States: N. p., 2016. Web.
Chilese, Francis C., Torczynski, John R., Garcia, Rudy, Klebanoff, Leonard E., Delgado, Gildardo R., Rader, Daniel J., Geller, Anthony S., & Gallis, Michail A. Methods and apparatus for use with extreme ultraviolet light having contamination protection. United States.
Chilese, Francis C., Torczynski, John R., Garcia, Rudy, Klebanoff, Leonard E., Delgado, Gildardo R., Rader, Daniel J., Geller, Anthony S., and Gallis, Michail A. Tue . "Methods and apparatus for use with extreme ultraviolet light having contamination protection". United States. https://www.osti.gov/servlets/purl/1261608.
@article{osti_1261608,
title = {Methods and apparatus for use with extreme ultraviolet light having contamination protection},
author = {Chilese, Francis C. and Torczynski, John R. and Garcia, Rudy and Klebanoff, Leonard E. and Delgado, Gildardo R. and Rader, Daniel J. and Geller, Anthony S. and Gallis, Michail A.},
abstractNote = {An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {7}
}

Patent:

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