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Title: Cr/B 4C multilayer mirrors: Study of interfaces and X-ray reflectance

Abstract

Here, we present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

Authors:
 [1];  [2];  [3];  [3];  [3];  [4];  [1];  [3];  [1];  [1];  [1]
  1. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
  2. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE; EAG Lab., San Diego, CA (United States); French National Research Agency (ANR)
OSTI Identifier:
1260484
Alternate Identifier(s):
OSTI ID: 1243148; OSTI ID: 1440923
Report Number(s):
LLNL-JRNL-680905
Journal ID: ISSN 0021-8979; JAPIAU
Grant/Contract Number:  
AC52-07NA27344; ANR-11-EQPX-0029; ANR-10-LABX-0039; AC03-76F00098; AC02-05CH11231
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 12; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Multilayers; Photons; Transmission electron microscopy; Mirrors; Optical constants; Chemical interdiffusion; Ion beam assisted deposition; Sputter deposition; Computer modeling; Soft X-rays

Citation Formats

Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States: N. p., 2016. Web. doi:10.1063/1.4944723.
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., & Delmotte, F. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. United States. doi:10.1063/1.4944723.
Burcklen, C., Soufli, R., Dennetiere, D., Polack, F., Capitanio, B., Gullikson, E., Meltchakov, E., Thomasset, M., Jerome, A., de Rossi, S., and Delmotte, F. Thu . "Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance". United States. doi:10.1063/1.4944723. https://www.osti.gov/servlets/purl/1260484.
@article{osti_1260484,
title = {Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance},
author = {Burcklen, C. and Soufli, R. and Dennetiere, D. and Polack, F. and Capitanio, B. and Gullikson, E. and Meltchakov, E. and Thomasset, M. and Jerome, A. and de Rossi, S. and Delmotte, F.},
abstractNote = {Here, we present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.},
doi = {10.1063/1.4944723},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 12,
volume = 119,
place = {United States},
year = {2016},
month = {3}
}

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