Nanofabrication on unconventional substrates using transferred hard masks
Abstract
Here, a major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based on re-usable silicon membrane hard masks, patterned using standard lithography and mature silicon processing technology. These masks, transferred precisely onto targeted regions, can be in the millimetre scale. They allow for fabrication on a wide range of substrates, including rough, soft, and non-conductive materials, enabling feature linewidths down to 10 nm. Plasma etching, lift-off, and ion implantation are realized without the need for scanning electron/ion beam processing, UV exposure, or wet etching on target substrates.
- Authors:
-
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Dept. of Electrical Engineering and Computer Science
- Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
- Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1258778
- Grant/Contract Number:
- AC02-98CH10886
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 5; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; optical properties of diamond; nanophotonics and plasmonics; nanoscience and technology; surface patterning
Citation Formats
Li, Luozhou, Bayn, Igal, Lu, Ming, Nam, Chang -Yong, Schroder, Tim, Stein, Aaron, Harris, Nicholas C., and Englund, Dirk. Nanofabrication on unconventional substrates using transferred hard masks. United States: N. p., 2015.
Web. doi:10.1038/srep07802.
Li, Luozhou, Bayn, Igal, Lu, Ming, Nam, Chang -Yong, Schroder, Tim, Stein, Aaron, Harris, Nicholas C., & Englund, Dirk. Nanofabrication on unconventional substrates using transferred hard masks. United States. https://doi.org/10.1038/srep07802
Li, Luozhou, Bayn, Igal, Lu, Ming, Nam, Chang -Yong, Schroder, Tim, Stein, Aaron, Harris, Nicholas C., and Englund, Dirk. 2015.
"Nanofabrication on unconventional substrates using transferred hard masks". United States. https://doi.org/10.1038/srep07802. https://www.osti.gov/servlets/purl/1258778.
@article{osti_1258778,
title = {Nanofabrication on unconventional substrates using transferred hard masks},
author = {Li, Luozhou and Bayn, Igal and Lu, Ming and Nam, Chang -Yong and Schroder, Tim and Stein, Aaron and Harris, Nicholas C. and Englund, Dirk},
abstractNote = {Here, a major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based on re-usable silicon membrane hard masks, patterned using standard lithography and mature silicon processing technology. These masks, transferred precisely onto targeted regions, can be in the millimetre scale. They allow for fabrication on a wide range of substrates, including rough, soft, and non-conductive materials, enabling feature linewidths down to 10 nm. Plasma etching, lift-off, and ion implantation are realized without the need for scanning electron/ion beam processing, UV exposure, or wet etching on target substrates.},
doi = {10.1038/srep07802},
url = {https://www.osti.gov/biblio/1258778},
journal = {Scientific Reports},
issn = {2045-2322},
number = ,
volume = 5,
place = {United States},
year = {Thu Jan 15 00:00:00 EST 2015},
month = {Thu Jan 15 00:00:00 EST 2015}
}
Web of Science
Works referenced in this record:
Soft Lithography
journal, March 1998
- Xia, Younan; Whitesides, George M.
- Angewandte Chemie International Edition, Vol. 37, Issue 5
Imprint Lithography with 25-Nanometer Resolution
journal, April 1996
- Chou, S. Y.; Krauss, P. R.; Renstrom, P. J.
- Science, Vol. 272, Issue 5258, p. 85-87
Scattering with angular limitation projection electron beam lithography for suboptical lithography
journal, November 1997
- Harriott, Lloyd R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
One- and two-dimensional photonic crystal micro-cavities in single crystal diamond
text, January 2011
- Riedrich-Möller, Janine; Kipfstuhl, Laura; Hepp, Christian
- arXiv
Metallic Nanowires by Full Wafer Stencil Lithography
journal, November 2008
- Vazquez-Mena, O.; Villanueva, G.; Savu, V.
- Nano Letters, Vol. 8, Issue 11, p. 3675-3682
High resolution ion beam lithography at large gaps using stencil masks
journal, March 1983
- Randall, J. N.; Flanders, D. C.; Economou, N. P.
- Applied Physics Letters, Vol. 42, Issue 5
Nanophotonic Filters and Integrated Networks in Flexible 2D Polymer Photonic Crystals
text, January 2013
- Gan, Xuetao; Clevenson, Hannah; Tsai, Cheng-Chia
- arXiv
Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography
journal, August 2011
- Linden, J.; Thanner, Ch.; Schaaf, B.
- Microelectronic Engineering, Vol. 88, Issue 8
Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999
- Xia, Younan; Rogers, John A.; Paul, Kateri E.
- Chemical Reviews, Vol. 99, Issue 7, p. 1823-1848
Fiber-Integrated Diamond-Based Single Photon Source
journal, January 2011
- Schröder, Tim; Schell, Andreas W.; Kewes, Günter
- Nano Letters, Vol. 11, Issue 1
Simple Fabrication of Molecular Circuits by Shadow Mask Evaporation
journal, October 2003
- Zhou, Y. X.; Johnson, Alan T.; Hone, James
- Nano Letters, Vol. 3, Issue 10, p. 1371-1374
Diameter-Dependent Electromechanical Properties of GaN Nanowires
journal, February 2006
- Nam, Chang-Yong; Jaroenapibal, Papot; Tham, Douglas
- Nano Letters, Vol. 6, Issue 2
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
journal, April 2000
- Unger, M. A.
- Science, Vol. 288, Issue 5463
Flexible and tunable silicon photonic circuits on plastic substrates
journal, September 2012
- Chen, Yu; Li, Huan; Li, Mo
- Scientific Reports, Vol. 2, Issue 1
Patterning the Tips of Optical Fibers with Metallic Nanostructures Using Nanoskiving
journal, February 2011
- Lipomi, Darren J.; Martinez, Ramses V.; Kats, Mikhail A.
- Nano Letters, Vol. 11, Issue 2
Electron Beam Lithography
book, March 2013
- Constancias, Christophe; Landis, Stefan; Manakli, Serdar
- Lithography
Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy
journal, November 2013
- Li, Luozhou; Trusheim, Matthew; Gaathon, Ophir
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6
Micro-Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron-Beam Lithography
journal, July 2003
- Glass, R.; Arnold, M.; Blümmel, J.
- Advanced Functional Materials, Vol. 13, Issue 7
Microstructure and Composition of Focused-Ion-Beam-Deposited Pt Contacts to GaN Nanowires
journal, February 2006
- Tham, D.; Nam, C. -Y.; Fischer, J. E.
- Advanced Materials, Vol. 18, Issue 3
A three-dimensional optical photonic crystal with designed point defects
journal, June 2004
- Qi, Minghao; Lidorikis, Elefterios; Rakich, Peter T.
- Nature, Vol. 429, Issue 6991
Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million
text, January 2012
- Tao, Y.; Boss, J. M.; Moores, B. A.
- arXiv
Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million
text, January 2012
- Tao, Y.; Boss, J. M.; Moores, B. A.
- arXiv
Optimized surface-enhanced Raman scattering on gold nanoparticle arrays
journal, May 2003
- Félidj, N.; Aubard, J.; Lévi, G.
- Applied Physics Letters, Vol. 82, Issue 18
Nano patterning on optical fiber and laser diode facet with dry resist
journal, January 2004
- Kelkar, P. S.; Beauvais, J.; Lavallée, E.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 3
Electron Beam Lithography
book, October 2018
- Nonogaki, Saburo; Takumi, Ueno; Ito, Toshio
- Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
One- and two-dimensional photonic crystal microcavities in single crystal diamond
journal, November 2011
- Riedrich-Möller, Janine; Kipfstuhl, Laura; Hepp, Christian
- Nature Nanotechnology, Vol. 7, Issue 1
Coupling of NV Centers to Photonic Crystal Nanobeams in Diamond
journal, November 2013
- Hausmann, B. J. M.; Shields, B. J.; Quan, Q.
- Nano Letters, Vol. 13, Issue 12
A Technique to Transfer Metallic Nanoscale Patterns to Small and Non-Planar Surfaces
journal, December 2008
- Smythe, Elizabeth J.; Dickey, Michael D.; Whitesides, George M.
- ACS Nano, Vol. 3, Issue 1
Electron Beam Lithography on Irregular Surfaces Using an Evaporated Resist
journal, March 2014
- Zhang, Jian; Con, Celal; Cui, Bo
- ACS Nano, Vol. 8, Issue 4
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
journal, April 2000
- Unger, M. A.
- Science, Vol. 288, Issue 5463
Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers
journal, January 2007
- Ahn, Minseung; Heilmann, Ralf K.; Schattenburg, Mark L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
High resolution ion beam lithography at large gaps using stencil masks
journal, March 1983
- Randall, J. N.; Flanders, D. C.; Economou, N. P.
- Applied Physics Letters, Vol. 42, Issue 5
Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers
journal, January 2007
- Ahn, Minseung; Heilmann, Ralf K.; Schattenburg, Mark L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides
journal, May 2010
- Liu, Xiaoping; Osgood, Richard M.; Vlasov, Yurii A.
- Nature Photonics, Vol. 4, Issue 8
One- and two-dimensional photonic crystal micro-cavities in single crystal diamond
text, January 2011
- Riedrich-Möller, Janine; Kipfstuhl, Laura; Hepp, Christian
- arXiv
Diamond nonlinear photonics
journal, April 2014
- Hausmann, B. J. M.; Bulu, I.; Venkataraman, V.
- Nature Photonics, Vol. 8, Issue 5
Fabrication of micro-optical devices at the end of a multimode optical fiber with negative tone lift-off EBL
journal, November 2012
- Sundaram, Vijay M.; Wen, Sy-Bor
- Journal of Micromechanics and Microengineering, Vol. 22, Issue 12
Atomic Layer Deposition: An Overview
journal, January 2010
- George, Steven M.
- Chemical Reviews, Vol. 110, Issue 1, p. 111-131
Electron Beam Lithography on Irregular Surfaces Using an Evaporated Resist
journal, March 2014
- Zhang, Jian; Con, Celal; Cui, Bo
- ACS Nano, Vol. 8, Issue 4
Surface damage formation during ion-beam thinning of samples for transmission electron microscopy
journal, April 2001
- McCaffrey, J. P.; Phaneuf, M. W.; Madsen, L. D.
- Ultramicroscopy, Vol. 87, Issue 3
Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope
journal, January 1988
- McCord, M. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 1
Flexible and tunable silicon photonic circuits on plastic substrates
journal, September 2012
- Chen, Yu; Li, Huan; Li, Mo
- Scientific Reports, Vol. 2, Issue 1
Fiber-Integrated Diamond-Based Single Photon Source
journal, January 2011
- Schröder, Tim; Schell, Andreas W.; Kewes, Günter
- Nano Letters, Vol. 11, Issue 1
Optical Fiber Tips Functionalized with Semiconductor Photonic Crystal Cavities
conference, January 2012
- Shambat, Gary; Provine, J.; Rivoire, Kelley
- CLEO: Science and Innovations, Conference on Lasers and Electro-Optics 2012
Single digit nanofabrication by step-and-repeat nanoimprint lithography
journal, December 2011
- Peroz, C.; Dhuey, S.; Cornet, M.
- Nanotechnology, Vol. 23, Issue 1
Metallic Nanowires by Full Wafer Stencil Lithography
journal, November 2008
- Vazquez-Mena, O.; Villanueva, G.; Savu, V.
- Nano Letters, Vol. 8, Issue 11, p. 3675-3682
Single-crystal diamond nanomechanical resonators with quality factors exceeding one million
journal, April 2014
- Tao, Y.; Boss, J. M.; Moores, B. A.
- Nature Communications, Vol. 5, Issue 1
Flexible metal grating based optical fiber probe for photonic integrated circuits
journal, January 2008
- Scheerlinck, Stijn; Taillaert, Dirk; Van Thourhout, Dries
- Applied Physics Letters, Vol. 92, Issue 3
A three-dimensional optical photonic crystal with designed point defects
journal, June 2004
- Qi, Minghao; Lidorikis, Elefterios; Rakich, Peter T.
- Nature, Vol. 429, Issue 6991
Coupling of quantum-dot light emission with a three-dimensional photonic-crystal nanocavity
journal, October 2008
- Aoki, Kanna; Guimard, Denis; Nishioka, Masao
- Nature Photonics, Vol. 2, Issue 11
Lithography and Other Patterning Techniques for Future Electronics
journal, February 2008
- Pease, R. F.; Chou, S. Y.
- Proceedings of the IEEE, Vol. 96, Issue 2
Transfer printing by kinetic control of adhesion to an elastomeric stamp
journal, December 2005
- Meitl, Matthew A.; Zhu, Zheng-Tao; Kumar, Vipan
- Nature Materials, Vol. 5, Issue 1, p. 33-38
Mask fabrication for projection electron-beam lithography incorporating the SCALPEL technique
journal, November 1991
- Liddle, J. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6
Projection electron-beam lithography: A new approach
journal, November 1991
- Berger, S. D.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6
Single digit nanofabrication by step-and-repeat nanoimprint lithography
journal, December 2011
- Peroz, C.; Dhuey, S.; Cornet, M.
- Nanotechnology, Vol. 23, Issue 1
4D imaging reveals mechanisms of clay-carbon protection and release
journal, January 2021
- Yang, Judy Q.; Zhang, Xinning; Bourg, Ian C.
- Nature Communications, Vol. 12, Issue 1
Coupling of NV Centers to Photonic Crystal Nanobeams in Diamond
journal, November 2013
- Hausmann, B. J. M.; Shields, B. J.; Quan, Q.
- Nano Letters, Vol. 13, Issue 12
Step and Flash Nano Imprint Lithography of 80 nm Dense Line Pattern Using Trehalose Derivative Resist Material
journal, February 2010
- Takei, Satoshi
- Applied Physics Express, Vol. 3, Issue 2
A Technique to Transfer Metallic Nanoscale Patterns to Small and Non-Planar Surfaces
journal, December 2008
- Smythe, Elizabeth J.; Dickey, Michael D.; Whitesides, George M.
- ACS Nano, Vol. 3, Issue 1
Nanophotonic Filters and Integrated Networks in Flexible 2D Polymer Photonic Crystals
journal, July 2013
- Gan, Xuetao; Clevenson, Hannah; Tsai, Cheng-Chia
- Scientific Reports, Vol. 3, Issue 1
Soft Lithography
journal, August 1998
- Xia, Younan; Whitesides, George M.
- Annual Review of Materials Science, Vol. 28, Issue 1, p. 153-184
Effect of cold development on improvement in electron-beam nanopatterning resolution and line roughness
journal, January 2006
- Ocola, L. E.; Stein, A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6
Atomic Layer Deposition: An Overview
journal, January 2010
- George, Steven M.
- Chemical Reviews, Vol. 110, Issue 1, p. 111-131
Diameter-Dependent Electromechanical Properties of GaN Nanowires
journal, February 2006
- Nam, Chang-Yong; Jaroenapibal, Papot; Tham, Douglas
- Nano Letters, Vol. 6, Issue 2
Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope
journal, January 1988
- McCord, M. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 1
Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap
journal, December 2010
- Tandaechanurat, Aniwat; Ishida, Satomi; Guimard, Denis
- Nature Photonics, Vol. 5, Issue 2
Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides
text, January 2010
- Liu, Xiaoping; Osgood, Richard M.; Vlasov, Yurii A.
- arXiv
Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography
journal, January 2007
- Viheriälä, J.; Niemi, T.; Kontio, J.
- Electronics Letters, Vol. 43, Issue 3
Nanofabrication using a stencil mask
journal, September 1999
- Deshmukh, Mandar M.; Ralph, D. C.; Thomas, M.
- Applied Physics Letters, Vol. 75, Issue 11
Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap
text, January 2010
- Tandaechanurat, Aniwat; Ishida, Satomi; Guimard, Denis
- arXiv
Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999
- Xia, Younan; Rogers, John A.; Paul, Kateri E.
- Chemical Reviews, Vol. 99, Issue 7, p. 1823-1848
Optical fiber tips functionalized with semiconductor photonic crystal cavities
journal, November 2011
- Shambat, Gary; Provine, J.; Rivoire, Kelley
- Applied Physics Letters, Vol. 99, Issue 19
Works referencing / citing this record:
Broadband asymmetric light transmission based on all-dielectric metasurfaces in the visible spectrum
journal, April 2019
- Ozer, Ahmet; Yilmaz, Nazmi; Kocer, Hasan
- Journal of Optics, Vol. 21, Issue 5
Illusion and cloaking using dielectric conformal metasurfaces
journal, January 2018
- Han, Na; Huang, Lingling; Wang, Yongtian
- Optics Express, Vol. 26, Issue 24
Patterning of diamond with 10 nm resolution by electron-beam-induced etching
journal, June 2019
- Dergianlis, Vasilis; Geller, Martin; Oing, Dennis
- Nanotechnology, Vol. 30, Issue 36
Scalable Focused Ion Beam Creation of Nearly Lifetime-Limited Single Quantum Emitters in Diamond Nanostructures
text, January 2016
- Schröder, Tim; Trusheim, Matthew E.; Walsh, Michael
- arXiv
Review Article: Quantum Nanophotonics in Diamond
preprint, January 2016
- Schröder, Tim; Mouradian, Sara; Zheng, Jiabao
- arXiv
Diamond as a Platform for Integrated Quantum Photonics
journal, October 2018
- Lenzini, Francesco; Gruhler, Nico; Walter, Nicolai
- Advanced Quantum Technologies, Vol. 1, Issue 3
Spin Measurements of NV Centers Coupled to a Photonic Crystal Cavity
text, January 2019
- Jung, Thomas; Görlitz, Johannes; Kambs, Benjamin
- arXiv
Spin measurements of NV centers coupled to a photonic crystal cavity
journal, December 2019
- Jung, T.; Görlitz, J.; Kambs, B.
- APL Photonics, Vol. 4, Issue 12
Broadband achromatic dielectric metalenses
journal, November 2018
- Shrestha, Sajan; Overvig, Adam C.; Lu, Ming
- Light: Science & Applications, Vol. 7, Issue 1
Scalable Focused Ion Beam Creation of Nearly Lifetime-Limited Single Quantum Emitters in Diamond Nanostructures
text, January 2016
- Schröder, Tim; Trusheim, Matthew E.; Walsh, Michael
- arXiv
Patterning of diamond with 10 nm resolution by electron-beam-induced etching
text, January 2019
- Dergianlis, Vasilis; Geller, Martin; Oing, Dennis
- arXiv
Hybrid silicon on silicon carbide integrated photonics platform
journal, September 2019
- Wang, Chuting; Miyazono, Evan; Craiciu, Ioana
- Applied Physics Letters, Vol. 115, Issue 14
Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures
journal, May 2017
- Schröder, Tim; Trusheim, Matthew E.; Walsh, Michael
- Nature Communications, Vol. 8, Issue 1
Propagation Loss-Immune Biocompatible Nanodiamond Refractive Index Sensors
journal, January 2018
- Shugayev, Roman; Bermel, Peter
- Advanced Optical Materials, Vol. 6, Issue 5