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Title: Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.

Abstract

Abstract not provided.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1255760
Report Number(s):
SAND2015-4170C
590295
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the ECTC held May 25-29, 2015 in San Diego, Ca.
Country of Publication:
United States
Language:
English

Citation Formats

Henry, Michael David, Olsson, Roy H., Eichenfield, Matt, Hollowell, Andrew E, and Young, Travis Ryan. Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.. United States: N. p., 2015. Web.
Henry, Michael David, Olsson, Roy H., Eichenfield, Matt, Hollowell, Andrew E, & Young, Travis Ryan. Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.. United States.
Henry, Michael David, Olsson, Roy H., Eichenfield, Matt, Hollowell, Andrew E, and Young, Travis Ryan. Fri . "Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.". United States. https://www.osti.gov/servlets/purl/1255760.
@article{osti_1255760,
title = {Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.},
author = {Henry, Michael David and Olsson, Roy H. and Eichenfield, Matt and Hollowell, Andrew E and Young, Travis Ryan},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {5}
}

Conference:
Other availability
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