Release strategies for making transferable semiconductor structures, devices and device components

Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew; Ko, Heung Cho; Yoon, Jongseung; Menard, Etienne; Baca, Alfred J.

Title: Release strategies for making transferable semiconductor structures, devices and device components

Patent · Tue May 24 00:00:00 EDT 2016

OSTI ID:1254133

Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew; Ko, Heung Cho; Yoon, Jongseung; Menard, Etienne; Baca, Alfred J.

Provided are methods for making a device or device component by providing a multi layer structure having a plurality of functional layers and a plurality of release layers and releasing the functional layers from the multilayer structure by separating one or more of the release layers to generate a plurality of transferable structures. The transferable structures are printed onto a device substrate or device component supported by a device substrate. The methods and systems provide means for making high-quality and low-cost photovoltaic devices, transferable semiconductor structures, (opto-)electronic devices and device components.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-91ER45439

Assignee:: The Board of Trustees of the University of Illinois (Urbana, IL)

Patent Number(s):: 9,349,900

Application Number:: 14/246,962

OSTI ID:: 1254133

Resource Relation:: Patent File Date: 2014 Apr 07

Country of Publication:: United States

Language:: English

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Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof Kang, Sung-gyu; Lee, Ki Bang; Choi, Jae-Joon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6277712 US Patent Document 6,277,712	patent	August 2001
Lattice matched solar cell and method for manufacturing the same Takamoto, Tatsuya; Kurita, Hiroshi; Agui, Takaaki https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6300558 US Patent Document 6,300,558	patent	October 2001
Batch manufacturing method for photovoltaic cells Saurer, Eric https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6316283 US Patent Document 6,316,283	patent	November 2001
Method for fabricating an isolated microelectromechanical system device Knieser, Michael J.; Kretschmann, Robert J.; Lucak, Mark A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6569701 US Patent Document 6,569,701	patent	May 2003
Low emitter resistance contacts to GaAs high speed HBT Pan, Noren; Han, Byung-Kwon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6661037 US Patent Document 6,661,037	patent	December 2003
Graded base GaAsSb for high speed GaAs HBT Pan, Noren; Han, Byung-Kwon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6784450 US Patent Document 6,784,450	patent	August 2004
Method for fabricating microstructures with deep anisotropic etching of thick silicon wafers Vaganov, Vladimir https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6787052 US Patent Document 6,787,052	patent	September 2004
Method and apparatus for robust optical tracking with beacon markers Sauer, Frank https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6787750 US Patent Document 6,787,750	patent	September 2004
Method for manufacturing semiconductor integrated circuit Kondo, Takayuki https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6858518 US Patent Document 6,858,518	patent	February 2005
Apparatus and method for integral bypass diode in solar cells Sharps, Paul R.; Aiken, Daniel; Collins, Doug https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6864414 US Patent Document 6,864,414	patent	March 2005
Method of selective removal of SiGe alloys Hammond, Richard; Currie, Matthew T. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6900094 US Patent Document 6,900,094	patent	May 2005
AlGaAs or InGaP low turn-on voltage GaAs-based heterojunction bipolar transistor Pan, Noren; Han, Byung-Kwon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6917061 US Patent Document 6,917,061	patent	July 2005
Epitaxy/substrate release layer Smart, Joseph A.; Hosse, Brook; Gibb, Shawn R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7033961 US Patent Document 7,033,961	patent	April 2006
Thermally transferable image protective sheet, method for protective layer formation, and record produced by said method Suzuki, Taro; Fukui, Daisuke; Fujita, Masahiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7169546 US Patent Document 7,169,546	patent	January 2007
Bipolar transistor with lattice matched base layer Welser, Roger E.; Deluca, Paul M.; Pan, Noren https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7186624 US Patent Document 7,186,624	patent	March 2007
Composite patterning devices for soft lithography Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7195733 US Patent Document 7,195,733	patent	March 2007
Mold release layer transferring film and laminate film Sakata, Ken; Hayashi, Katsuhiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7255919 US Patent Document 7,255,919	patent	August 2007
Thermal transfer recording material and thermal transfer recording method Ikemizu, Dai; Kataoka, Emiko; Suzuki, Takatugu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7425523 US Patent Document 7,425,523	patent	September 2008
Semiconductor device having an interconnect with sloped walls and method of forming the same Brar, Berinder P. S.; Ha, Wonill; Vorhaus, James L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7462891 US Patent Document 7,462,891	patent	December 2008
Stretchable form of single crystal silicon for high performance electronics on rubber substrates Rogers, John A.; Khang, Dahl-Young; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7521292 US Patent Document 7,521,292	patent	April 2009
Stretchable semiconductor elements and stretchable electrical circuits Rogers, John A.; Khang, Dahl-Young; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7557367 US Patent Document 7,557,367	patent	July 2009
Methods and devices for fabricating and assembling printable semiconductor elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7622367 US Patent Document 7,622,367	patent	November 2009
Via structures in solar cells with bypass diode Meck, Robert; Sharps, Paul R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7687707 US Patent Document 7,687,707	patent	March 2010
Method for production of a film Wild, Heinrich; Brehm, Ludwig; Hansen, Achim https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7700402 US Patent Document 7,700,402	patent	April 2010
Methods and devices for fabricating three-dimensional nanoscale structures Rogers, John A.; Jeon, Seokwoo; Park, Jangung https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7704684 US Patent Document 7,704,684	patent	April 2010
Multispectral plasmonic crystal sensors Nuzzo, Ralph G.; Rogers, John A.; Mack, Nathan H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7705280 US Patent Document 7,705,280	patent	April 2010
Printable semiconductor structures and related methods of making and assembling Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7799699 US Patent Document 7,799,699	patent	September 2010
Release strategies for making transferable semiconductor structures, devices and device components Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7932123 US Patent Document 7,932,123	patent	April 2011
Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7943491 US Patent Document 7,943,491	patent	May 2011
Optical systems fabricated by printing-based assembly Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7972875 US Patent Document 7,972,875	patent	July 2011
Methods and devices for fabricating and assembling printable semiconductor elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7982296 US Patent Document 7,982,296	patent	July 2011
Printable semiconductor structures and related methods of making and assembling Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8039847 US Patent Document 8,039,847	patent	October 2011
Stretchable form of single crystal silicon for high performance electronics on rubber substrates Rogers, John A.; Khang, Dahl-Young; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8198621 US Patent Document 8,198,621	patent	June 2012
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics Rogers, John A.; Meitl, Matthew; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8217381 US Patent Document 8,217,381	patent	July 2012
Method for producing semiconductor chip, and field effect transistor and method for manufacturing same Kawashima, Takahiro; Saitoh, Tohru; Nakagawa, Tohru https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8242025 US Patent Document 8,242,025	patent	August 2012
Methods of making spatially aligned nanotubes and nanotube arrays Rogers, John A.; Kocabas, Coskun; Shim, Moonsub https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8367035 US Patent Document 8,367,035	patent	February 2013
Printable semiconductor structures and related methods of making and assembling Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8394706 US Patent Document 8,394,706	patent	March 2013
Methods and devices for fabricating and assembling printable semiconductor elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8440546 US Patent Document 8,440,546	patent	May 2013
Printable, flexible and stretchable diamond for thermal management Rogers, John A.; Kim, Tae Ho; Choi, Won-mook https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8470701 US Patent Document 8,470,701	patent	June 2013
Stretchable and foldable electronic devices Rogers, John A.; Huang, Yonggang; Ko, Heung Cho https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8552299 US Patent Document 8,552,299	patent	October 2013
High resolution sensing and control of electrohydrodynamic jet printing Alleyne, Andrew; Barton, Kira; Mishra, Sandipan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8562095 US Patent Document 8,562,095	patent	October 2013
Methods and devices for fabricating and assembling printable semiconductor elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8664699 US Patent Document 8,664,699	patent	March 2014
Implantable biomedical devices on bioresorbable substrates Rogers, John A.; Kim, Dae-Hyeong; Omenetto, Fiorenzo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8666471 US Patent Document 8,666,471	patent	March 2014
Arrays of ultrathin silicon solar microcells Rogers, John A.; Rockett, Angus; Nuzzo, Ralph G. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8679888 US Patent Document 8,679,888	patent	March 2014
Optical systems fabricated by printing-based assembly Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8722458 US Patent Document 8,722,458	patent	May 2014
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics Rogers, John A.; Meitl, Matthew; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8729524 US Patent Document 8,729,524	patent	May 2014
Stretchable form of single crystal silicon for high performance electronics on rubber substrates Rogers, John A.; Khang, Dahl-Young; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8754396 US Patent Document 8,754,396	patent	June 2014
Deposited thin films and their use in separation and sacrificial layer applications Fonash, Stephen J.; Nam, Wook Jun; Lee, Youngchul https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020020053 US Patent Application 09/836449; 20020020053	patent-application	February 2002
Method of transferring a device, a method of producing a device holding substrate, and a device holding substrate Iwafuchi, Toshiaki; Yanagisawa, Yoshiyuki; Oohata, Toyoharu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020115265 US Patent Application 10/024690; 20020115265	patent-application	August 2002
Methods for patterning using liquid embossing Bulthaup, Colin; Spindt, Chris https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030082485 US Patent Application 10/251103; 20030082485	patent-application	May 2003
Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system Oohata, Toyoharu; Iwafuchi, Toshiaki; Ohba, Hisashi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030087476 US Patent Application 10/236153; 20030087476	patent-application	May 2003
Semiconductor integrated circuit and method for manufacturing semiconductor integrated circuit Kondo, Takayuki https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030170946 US Patent Application 10/324039; 20030170946	patent-application	September 2003
Monolithic integration of a MOSFET with a MEMS device Bennett, Reid; Draper, Bruce https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040012057 US Patent Application 10/317641; 20040012057	patent-application	January 2004
Three dimensional thin film devices and methods of fabrication Gupta, Vikas; Johnson, A. David; Menchaca, Laticia https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040014253 US Patent Application 10/198654; 20040014253	patent-application	January 2004
Composite Dielectric with Improved Etch Selectivity for High Voltage Mems Structures Nunan, Thomas K.; Grosjean, David E.; O'Kane, Denis M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040099928 US Patent Application 10/306639; 20040099928	patent-application	May 2004
Transplanted magnetic random access memory (MRAM) devices on thermally-sensitive substrates using laser transfer and method for making the same Gupta, Arunava https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040252559 US Patent Application 10/459517; 20040252559	patent-application	December 2004
Techniques for layer transfer processing Bedell, Stephen W.; Fogel, Keith Edward; Furman, Bruce Kenneth https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050082526 US Patent Application 10/685636; 20050082526	patent-application	April 2005
Method of fabricating multiple nanowires of uniform length from a single catalytic nanoparticle Metz, Matthew V.; Hareland, Scott a.; Chau, Robert S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050145596 US Patent Application 10/748617; 20050145596	patent-application	July 2005
Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system Oohata, Toyoharu; Iwafuchi, Toshiaki; Ohba, Hisashi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050233546 US Patent Application 11/133573; 20050233546	patent-application	October 2005
Composite patterning devices for soft lithography Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050238967 US Patent Application 11/115954; 20050238967	patent-application	October 2005
Stretchable semiconductor elements and stretchable electrical circuits Rogers, John A.; Khang, Dahl-Young https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060038182 US Patent Application 11/145542; 20060038182	patent-application	February 2006
High on-state breakdown heterojunction bipolar transistor Pan, Noren; Wibowo, Andree https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060049485 US Patent Application 11/153078; 20060049485	patent-application	March 2006
Electroform spring built on mandrel transferable to other surface Eldridge, Benjamin N.; Mathieu, Gaeten L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060085976 US Patent Application 10/971489; 20060085976	patent-application	April 2006
Solar cell, solar cell string and method of manufacturing solar cell string Takamoto, Tatsuya; Agui, Takaaki; Washio, Hidetoshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060180198 US Patent Application 11/351253; 20060180198	patent-application	August 2006
Methods and devices for fabricating three-dimensional nanoscale structures Rogers, John A.; Jeon, Seokwoo; Park, Jangung https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060286488 US Patent Application 11/001689; 20060286488	patent-application	December 2006
A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates Rogers, John A.; Khang, Dahl-Young; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060286785 US Patent Application 11/423287; 20060286785	patent-application	December 2006
Printable Semiconductor Structures and Related Methods of Making and Assembling Nuzzo, Ralph G.; Rogers, John A.; Menard, Etiene https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070032089 US Patent Application 11/421654; 20070032089	patent-application	February 2007
Devices and methods for pattern generation by ink lithography Rogers, John; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080055581 US Patent Application 11/675659; 20080055581	patent-application	March 2008
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080108171 US Patent Application 11/858788; 20080108171	patent-application	May 2008
Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics Rogers, John A.; Meitl, Matthew; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080157235 US Patent Application 11/851182; 20080157235	patent-application	July 2008
Multispectral Plasmonic Crystal Sensors Nuzzo, Ralph G.; Rogers, John A.; Mack, Nathan H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080212102 US Patent Application 11/782799; 20080212102	patent-application	September 2008
Photovoltaics on silicon Li, Jizhong; Lochtefeld, Anthony J.; Sheen, Calvin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080257409 US Patent Application 12/100131; 20080257409	patent-application	October 2008
Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090199960 US Patent Application 11/423192; 20090199960	patent-application	August 2009
Method for Producing at Least One Multilayer Body, and Multilayer Body Schneider, Gernot; Stuab, Rene; Tompkin, Wayne Robert https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090289246 US Patent Application 12/309908; 20090289246	patent-application	November 2009
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements Nuzzo, Ralph G.; Roger, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090294803 US Patent Application 11/145574; 20090294803	patent-application	December 2009
Stretchable and Foldable Electronic Devices Rogers, John A.; Huang, Yonggang; Ko, Heung Cho https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100002402 US Patent Application 12/398811; 20100002402	patent-application	July 2010
Printable, Flexible and Stretchable Diamond for Thermal Management Rogers, John A.; Kim, Tae Ho; Choi, Won Mook https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100052112 US Patent Application 12/418071; 20100052112	patent-application	March 2010
Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates Rogers, John A.; Khang, Dahl-Young; Sun, Yugang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100059863 US Patent Application 12/405475; 20100059863	patent-application	March 2010
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100072577 US Patent Application 12/564566; 20100072577	patent-application	March 2010
Multiple Stack Deposition for Epitaxial Lift Off He, Gang; Hegedus, Andreas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100147370 US Patent Application 12/632565; 20100147370	patent-application	June 2010
Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays Rogers, John A.; Nuzzo, Ralph; Kim, Hoon-sik https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100317132 US Patent Application 12/778588; 20100317132	patent-application	December 2010
Method for Manufacturing Integrated Circuit Tsurume, Takuya; Maruyama, Junya; Dozen, Yoshitaka https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100317156 US Patent Application 12/859878; 20100317156	patent-application	December 2010
Medium Scale Carbon Nanotube Thin Film Integrated Circuits on Flexible Plastic Substrates Rogers, John; Cao, Qing; Alam, Muhammad https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110147715 US Patent Application 12/996924; 20110147715	patent-application	June 2011
High Resolution Printing of Charge Rogers, John; Park, Jang-Ung https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110170225 US Patent Application 12/947120; 20110170225	patent-application	July 2011
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components Rogers, John A.; Nuzzo, Ralph G.; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110171813 US Patent Application 13/071027; 20110171813	patent-application	July 2011
High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems Rogers, John A.; Park, Jang-Ung; Ferreira, Placid M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110187798 US Patent Application 12/669287; 20110187798	patent-application	August 2011
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110220890 US Patent Application 13/113504; 20110220890	patent-application	September 2011
Implantable Biomedical Devices On Bioresorbable Substrates Rogers, John A.; Kim, Dae-Hyeong; Omenetto, Fiorenzo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110230747 US Patent Application 12/892001; 20110230747	patent-application	September 2011
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components Rogers, John; Nuzzo, Ralph; Meitl, Matthew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110316120 US Patent Application 13/228041; 20110316120	patent-application	December 2011
High-Speed, High-Resolution Electrophysiology In-Vivo Using Conformal Electronics Rogers, John; Kim, Dae Hyeong; Moss, Joshua https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120157804 US Patent Application 12/968637; 20120157804	patent-application	June 2012
Waterproof stretchable optoelectronics Rogers, John; Kim, Rak-Hwan; Kim, Dae-Hyeong https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120165759 US Patent Application 13/046191; 20120165759	patent-application	June 2012
Optical Component Array Having Adjustable Curvature Rogers, John A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120261551 US Patent Document 13/349336; 20120261551	patent-application	October 2012
Thermally Managed LED Arrays Assembled by Printing Rogers, John; Kim, Hoon-Sik; Huang, Yonggang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120320581 US Patent Application 13/472165; 20120320581	patent-application	December 2012
Non-Contact Transfer Printing Rogers, John; Ferreira, Placid; Saeidpourazar, Reza https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130036928 US Patent Application 13/549291; 20130036928	patent-application	February 2013
Flexible and Stretchable Electronic Systems for Epidermal Electronics Rogers, John A.; Kim, Dae-Hyeong https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130041235 US Patent Document 13/492636; 20130041235	patent-application	February 2013
Conformable Actively Multiplexed High-Density Surface Electrode Array for Brain Interfacing Rogers, John; Kim, Dae-Hyeong; Litt, Brian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130072775 US Patent Application 13/486726; 20130072775	patent-application	March 2013
Transient devices designed to undergo programmable transformations Rogers, John; Omenetto, Fiorenzo; Hwang, Suk-Won https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130140649 US Patent Application 13/624096; 20130140649	patent-application	June 2013
Appendage Mountable Electronic Devices COnformable to Surfaces Rogers, John A.; Ying, Ming; Bonifas, Andrew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130333094 US Patent Application 13/853770; 20130333094	patent-application	December 2013
Implantable Biomedical Devices on Bioresorbable Substrates Rogers, John; Kim, Dae-Hyeong; Omenetto, Fiorenzo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140163390 US Patent Application 14/140299; 20140163390	patent-application	June 2014
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements Nuzzo, Ralph; Rogers, John; Menard, Etienne https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140191236 US Patent Application 14/155010; 20140191236	patent-application	July 2014
Arrays of Ultrathin Silicon Solar Microcells Rogers, John A.; Rockett, Angus A.; Nuzzo, Ralph https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140216524 US Patent Application 14/173525; 20140216524	patent-application	August 2014
Stretchable Electronic Systems With Fluid Containment Rogers, John; Xu, Sheng; Fan, Jonathan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140220422 US Patent Application 13/835284; 20140220422	patent-application	August 2014

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