skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Understanding and control of bipolar self-doping in copper nitride

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4948244· OSTI ID:1254118
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [3];  [2];  [4];  [1];  [1];  [5];  [5];  [6];  [1];  [6];  [6]
  1. National Renewable Energy Lab. (NREL), Golden, CO (United States); Colorado School of Mines, Golden, CO (United States)
  2. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  3. National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  5. Aalto Univ., Espoo (Finland)
  6. National Renewable Energy Lab. (NREL), Golden, CO (United States)

Semiconductor materials that can be doped both n-type and p-type are desirable for diode-based applications and transistor technology. Copper nitride (Cu3N) is a metastable semiconductor with a solar-relevant bandgap that has been reported to exhibit bipolar doping behavior. However, deeper understanding and better control of the mechanism behind this behavior in Cu3N is currently lacking in the literature. In this work, we use combinatorial growth with a temperature gradient to demonstrate both conduction types of phase-pure, sputter-deposited Cu3N thin films. Room temperature Hall effect and Seebeck effect measurements show n-type Cu3N with 1017 electrons/cm3 for low growth temperature (approximately 35 °C) and p-type with 1015 holes/cm3-1016 holes/cm3 for elevated growth temperatures (50 °C-120 °C). Mobility for both types of Cu3N was approximately 0.1 cm2/Vs-1 cm2/Vs. Additionally, temperature-dependent Hall effect measurements indicate that ionized defects are an important scattering mechanism in p-type films. By combining X-ray absorption spectroscopy and first-principles defect theory, we determined that VCu defects form preferentially in p-type Cu3N, while Cui defects form preferentially in n-type Cu3N, suggesting that Cu3N is a compensated semiconductor with conductivity type resulting from a balance between donor and acceptor defects. Based on these theoretical and experimental results, we propose a kinetic defectformation mechanism for bipolar doping in Cu3N that is also supported by positron annihilation experiments. Altogether, the results of this work highlight the importance of kinetic processes in the defect physics of metastable materials and provide a framework that can be applied when considering the properties of such materials in general.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office; USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC36-08GO28308; DMR-0820518; AC02-76SF00515
OSTI ID:
1254118
Alternate ID(s):
OSTI ID: 1251241
Report Number(s):
NREL/JA-5K00-65585; JAPIAU
Journal Information:
Journal of Applied Physics, Vol. 119, Issue 18; Related Information: Journal of Applied Physics; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 24 works
Citation information provided by
Web of Science

References (34)

The Blue Laser Diode book January 2000
A modern perspective on the history of semiconductor nitride blue light sources journal September 2015
Smooth surface morphology and low dislocation density of p-GaN using indium-assisted growth journal March 2014
Defect Tolerant Semiconductors for Solar Energy Conversion journal March 2014
Controlled bipolar doping in Cu 3 N (100) thin films journal December 2014
Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering journal May 1993
Thermal stability of copper nitride films prepared by rf magnetron sputtering journal July 1998
Thermal decomposition of copper nitride thin films and dots formation by electron beam writing journal January 2001
Cu 3 N Thin Film for a New Light Recording Media journal October 1990
Copper nitride thin films prepared by radio‐frequency reactive sputtering journal September 1995
Deposition and Characterization of Metastable Cu 3 N Layers for Applications in Optical Data Storage journal June 2000
Intrinsic surface band bending in Cu 3 N ( 100 ) ultrathin films journal August 2007
Effect of substrate temperature on the properties of copper nitride thin films deposited by reactive magnetron sputtering journal December 2012
Reactive DC magnetron sputter deposited copper nitride nano-crystalline thin films: Growth and characterization journal February 2012
Non-equilibrium deposition of phase pure Cu 2 O thin films at reduced growth temperature journal February 2014
Cation off-stoichiometry leads to high p -type conductivity and enhanced transparency in Co 2 ZnO 4 and Co 2 NiO 4 thin films journal February 2012
Combinatorial insights into doping control and transport properties of zinc tin nitride journal January 2015
X-Ray Spectroscopic Investigation of Chlorinated Graphene: Surface Structure and Electronic Effects journal May 2015
A general purpose sub-keV X-ray facility at the Stanford Synchrotron Radiation Laboratory
  • Tirsell, K. Glenn; Karpenko, Victor P.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 291, Issue 1-2 https://doi.org/10.1016/0168-9002(90)90113-K
journal May 1990
Defect identification in semiconductors with positron annihilation: Experiment and theory journal November 2013
Convergence of density and hybrid functional defect calculations for compound semiconductors journal September 2013
From ultrasoft pseudopotentials to the projector augmented-wave method journal January 1999
Ab initiomolecular dynamics for liquid metals journal January 1993
Bethe-Salpeter equation calculations of core excitation spectra journal March 2011
On the hydration and hydrolysis of carbon dioxide journal October 2011
Origins of extreme broadening mechanisms in near-edge x-ray spectra of nitrogen compounds journal November 2014
QUANTUM ESPRESSO: a modular and open-source software project for quantum simulations of materials journal September 2009
Non-equilibrium origin of high electrical conductivity in gallium zinc oxide thin films journal December 2013
Density functional calculations of shallow acceptor levels in Si journal June 2009
Dual nature of acceptors in GaN and ZnO: The curious case of the shallow MgGa deep state journal April 2010
Efficient implementation of core-excitation Bethe–Salpeter equation calculations journal December 2015
Finite temperature effects on the X-ray absorption spectra of lithium compounds: First-principles interpretation of X-ray Raman measurements journal January 2014
Effects of vibrational motion on core-level spectra of prototype organic molecules journal December 2008
Dopability, Intrinsic Conductivity, and Nonstoichiometry of Transparent Conducting Oxides journal January 2007

Cited By (4)

Interplay between Composition, Electronic Structure, Disorder, and Doping due to Dual Sublattice Mixing in Nonequilibrium Synthesis of ZnSnN 2 :O journal January 2019
On the Dopability of Semiconductors and Governing Material Properties journal May 2020
Harnessing Defect-Tolerance at the Nanoscale: Highly Luminescent Lead Halide Perovskite Nanocrystals in Mesoporous Silica Matrixes journal August 2016
COMBIgor: data analysis package for combinatorial materials science preprint January 2019