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Optical control of multi-stage thin film solar cell production

Patent ·
OSTI ID:1253341

Embodiments include methods of depositing and controlling the deposition of a film in multiple stages. The disclosed deposition and deposition control methods include the optical monitoring of a deposition matrix to determine a time when at least one transition point occurs. In certain embodiments, the transition point or transition points are a stoichiometry point. Methods may also include controlling the length of time in which material is deposited during a deposition stage or controlling the amount of the first, second or subsequent materials deposited during any deposition stage in response to a determination of the time when a selected transition point occurs.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-08GO28308
Assignee:
ALLIANCE FOR SUSTAINABLE ENERGY, LLC (Golden, CO)
Patent Number(s):
9,343,378
Application Number:
14/204,795
OSTI ID:
1253341
Country of Publication:
United States
Language:
English

References (5)

Toward ultra thin CIGS solar cells conference June 2012
Real-time analysis of the microstructural evolution and optical properties of Cu(In,Ga)Se2 thin films as a function of Cu content journal October 2011
Real time spectroscopic ellipsometry of CuInSe2: Growth dynamics, dielectric function, and its dependence on temperature journal May 2011
Investigation of the growth process and optical transitions as a function of Ga content in CuIn1−xGaxSe2 thin films at 570 °C conference June 2011
Real time analysis of ultra-thin CIGS thin film deposition conference June 2012

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