Self-assembly of block copolymers on topographically patterned polymeric substrates

Russell, Thomas P.; Park, Soojin; Lee, Dong Hyun; Xu, Ting

Self-assembly of block copolymers on topographically patterned polymeric substrates

Patent · 10 May 2016

OSTI ID:1252417

Russell, Thomas P.; Park, Soojin; Lee, Dong Hyun; Xu, Ting

Highly-ordered block copolymer films are prepared by a method that includes forming a polymeric replica of a topographically patterned crystalline surface, forming a block copolymer film on the topographically patterned surface of the polymeric replica, and annealing the block copolymer film. The resulting structures can be used in a variety of different applications, including the fabrication of high density data storage media. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films.

View Patent

Research Organization:: THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States) THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ER45612

Assignee:: THE UNIVERSITY OF MASSACHUSETTS (Boston, MA) THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (Oakland, CA)

Patent Number(s):: 9,335,629

Application Number:: 13/546,378

OSTI ID:: 1252417

Country of Publication:: United States

Language:: English

References (119)

A Combined Top–Down/Bottom–Up Approach to the Microscopic Localization of Metallic Nanodots Spatz, J. P.; Chan, V. Z.-H.; Mößmer, S. Advanced Materials, Vol. 14, Issue 24, p. 1827-1832 https://doi.org/10.1002/adma.200290011	journal	December 2002
A Highly Regular Two-Dimensional Array of Au Quantum Dots Deposited in a Periodically Nanoporous GaAs Epitaxial Layer Cheng, G.; Moskovits, M. Advanced Materials, Vol. 14, Issue 21, p. 1567-1570 https://doi.org/10.1002/1521-4095(20021104)14:21<1567::AID-ADMA1567>3.0.CO;2-K	journal	November 2002
Catalytic Activity of Supported Au Nanoparticles Deposited from Block Copolymer Micelles Jaramillo, Thomas F.; Baeck, Sung-Hyeon; Cuenya, Beatriz Roldan Journal of the American Chemical Society, Vol. 125, Issue 24, p. 7148-7149 https://doi.org/10.1021/ja029800v	journal	June 2003
A Rapid Route to Arrays of Nanostructures in Thin Films Lin, Z. Q.; Kim, D. H.; Wu, X. D. Advanced Materials, Vol. 14, Issue 19 https://doi.org/10.1002/1521-4095(20021002)14:19<1373::AID-ADMA1373>3.0.CO;2-F	journal	October 2002
Block copolymers as bilevel resists Hartney, M. A.; Novembre, A. E.; , F. S. Bates Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346 https://doi.org/10.1116/1.582991	journal	September 1985
Electron Transfer in Self-Assembled Inorganic Polyelectrolyte/Metal Nanoparticle Heterostructures Feldheim, Daniel L.; Grabar, Katherine C.; Natan, Michael J. Journal of the American Chemical Society, Vol. 118, Issue 32 https://doi.org/10.1021/ja9612007	journal	January 1996
One step fabrication and characterization of platinum nanopore electrode ensembles formed via amphiphilic block copolymer self-assembly Wang, Chengyin; Shao, Xiaoqiu; Liu, Qingxiu Electrochimica Acta, Vol. 52, Issue 2, p. 704-709 https://doi.org/10.1016/j.electacta.2006.06.003	journal	October 2006
Large area dense nanoscale patterning of arbitrary surfaces Park, Miri; Chaikin, P. M.; Register, Richard A. Applied Physics Letters, Vol. 79, Issue 2, p. 257-259 https://doi.org/10.1063/1.1378046	journal	July 2001
Morphological Development in Solvent-Cast Polystyrene−Polybutadiene−Polystyrene (SBS) Triblock Copolymer Thin Films Kim, G.; Libera, M. Macromolecules, Vol. 31, Issue 8 https://doi.org/10.1021/ma971349i	journal	April 1998
Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography Spatz, Joachim P.; Eibeck, Peter; Mößmer, Stefan Advanced Materials, Vol. 10, Issue 11, p. 849-852 https://doi.org/10.1002/(SICI)1521-4095(199808)10:11<849::AID-ADMA849>3.0.CO;2-5	journal	August 1998
Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates Thurn-Albrecht, T.; Schotter, J.; Kastle, G. A. Science, Vol. 290, Issue 5499, p. 2126-2129 https://doi.org/10.1126/science.290.5499.2126	journal	December 2000
Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces: Parallel, Perpendicular and Mixed Lamellar Morphologies Pereira, G. G.; Williams, D. R. M. Macromolecules, Vol. 32, Issue 3, p. 758-764 https://doi.org/10.1021/ma981003n	journal	February 1999
Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films Park, Soojin; Wang, Jia-Yu; Kim, Bokyung Macromolecules, Vol. 40, Issue 25, p. 9059-9063 https://doi.org/10.1021/ma071321z	journal	December 2007
Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film Morikawa, Y.; Nagano, S.; Watanabe, K. Advanced Materials, Vol. 18, Issue 7, p. 883-886 https://doi.org/10.1002/adma.200502573	journal	April 2006
Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films Park, S.; Kim, B.; Wang, J.-Y. Advanced Materials, Vol. 20, Issue 4, p. 681-685 https://doi.org/10.1002/adma.200701997	journal	February 2008
Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors Kim, Bokyung; Hong, Sung Woo; Park, Soojin Soft Matter, Vol. 7, Issue 2, p. 443-447 https://doi.org/10.1039/C0SM00422G	journal	January 2011
Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves Chuang, Vivian P.; Cheng, Joy Y.; Savas, Tim A. Nano Letters, Vol. 6, Issue 10, p. 2332-2337 https://doi.org/10.1021/nl061866r	journal	October 2006
Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds Lopes, Ward A.; Jaeger, Heinrich M. Nature, Vol. 414, Issue 6865, p. 735-738 https://doi.org/10.1038/414735a	journal	December 2001
Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films Rockford, L.; Mochrie, S. G. J.; Russell, T. P. Macromolecules, Vol. 34, Issue 5, p. 1487-1492 https://doi.org/10.1021/ma001747c	journal	February 2001
Etch rates for micromachining processing-part II Williams, K.R.; Gupta, K.; Wasilik, M. Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778 https://doi.org/10.1109/JMEMS.2003.820936	journal	December 2003
Solvent-induced microdomain orientation in polystyrene-b-poly(l-lactide) diblock copolymer thin films for nanopatterning Ho, Rong-Ming; Tseng, Wen-Hsien; Fan, Hui-Wen Polymer, Vol. 46, Issue 22, p. 9362-9377 https://doi.org/10.1016/j.polymer.2005.07.069	journal	October 2005
Nano-Patterning for Patterned Media using Block-Copolymer Asakawa, Koji; Hiraoka, Toshiro; Hieda, Hiroyuki Journal of Photopolymer Science and Technology, Vol. 15, Issue 3, p. 465-470 https://doi.org/10.2494/photopolymer.15.465	journal	January 2002
Semiconductor Nanowires: From Self-Organization to Patterned Growth Fan, Hong Jin; Werner, Peter; Zacharias, Margit Small, Vol. 2, Issue 6, p. 700-717 https://doi.org/10.1002/smll.200500495	journal	April 2006
Nanotechnology with Soft Materials Hamley, I. W. Angewandte Chemie International Edition, Vol. 42, Issue 15, p. 1692-1712 https://doi.org/10.1002/anie.200200546	journal	April 2003
Self-directed self-assembly of nanoparticle/copolymer mixtures Lin, Yao; Böker, Alexander; He, Jinbo Nature, Vol. 434, Issue 7029 https://doi.org/10.1038/nature03310	journal	March 2005
Nanostructured Thin Films of Organic-Organometallic Block Copolymers: One-Step Lithography with Poly(ferrocenylsilanes) by Reactive Ion Etching Lammertink, R. G. H.; Hempenius, M. A.; van den Enk, J. E. Advanced Materials, Vol. 12, Issue 2, p. 98-103 https://doi.org/10.1002/(SICI)1521-4095(200001)12:2<98::AID-ADMA98>3.0.CO;2-5	journal	January 2000
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates Ouk Kim, Sang; Solak, Harun H.; Stoykovich, Mark P. Nature, Vol. 424, Issue 6947, p. 411-414 https://doi.org/10.1038/nature01775	journal	July 2003
From Nanorings to Nanodots by Patterning with Block Copolymers Park, Soojin; Wang, Jia-Yu; Kim, Bokyung Nano Letters, Vol. 8, Issue 6, p. 1667-1672 https://doi.org/10.1021/nl0805110	journal	June 2008
Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography Li, R. R.; Dapkus, P. D.; Thompson, M. E. Applied Physics Letters, Vol. 76, Issue 13, p. 1689-1691 https://doi.org/10.1063/1.126137	journal	March 2000
Long-Range Ordering of Diblock Copolymers Induced by Droplet Pinning Kimura, Masahiro; Misner, Matthew J.; Xu, Ting Langmuir, Vol. 19, Issue 23, p. 9910-9913 https://doi.org/10.1021/la0351360	journal	November 2003
Block copolymers and conventional lithography Stoykovich, Mark P.; Nealey, Paul F. Materials Today, Vol. 9, Issue 9, p. 20-29 https://doi.org/10.1016/S1369-7021(06)71619-4	journal	September 2006
Block copolymers as nanoscopic templates Russell, Thomas P.; Thurn-Albrecht, Thomas; Tuominen, Mark Macromolecular Symposia, Vol. 159, Issue 1, p. 77-88 https://doi.org/10.1002/1521-3900(200010)159:1<77::AID-MASY77>3.0.CO;2-7	journal	October 2000
Reading and Writing with Electron Beams Murray Gibson, J. Physics Today, Vol. 50, Issue 10 https://doi.org/10.1063/1.881964	journal	October 1997
Controlling Polymer-Surface Interactions with Random Copolymer Brushes Mansky, P.; Liu, Y.; Huang, E. Science, Vol. 275, Issue 5305, p. 1458-1460 https://doi.org/10.1126/science.275.5305.1458	journal	March 1997
Faceting Kinetics of Stepped Si(113) Surfaces: A Time-Resolved X-Ray Scattering Study Song, S.; Mochrie, S. G. J.; Stephenson, G. B. Physical Review Letters, Vol. 74, Issue 26, p. 5240-5243 https://doi.org/10.1103/PhysRevLett.74.5240	journal	June 1995
Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films Kim, B. J.; Chiu, J. J.; Yi, G.-R. Advanced Materials, Vol. 17, Issue 21, p. 2618-2622 https://doi.org/10.1002/adma.200500502	journal	November 2005
The influence of molecular weight on nanoporous polymer films Xu, Ting; Kim, Ho-Cheol; DeRouchey, Jason Polymer, Vol. 42, Issue 21, p. 9091-9095 https://doi.org/10.1016/S0032-3861(01)00376-7	journal	October 2001
Process integration of self-assembled polymer templates into silicon nanofabrication Guarini, K. W.; Black, C. T.; Zhang, Y. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, Article No. 2788 https://doi.org/10.1116/1.1521730	journal	January 2002
Polymers on Nanoperiodic, Heterogeneous Surfaces Rockford, L.; Liu, Y.; Mansky, P. Physical Review Letters, Vol. 82, Issue 12, p. 2602-2605 https://doi.org/10.1103/PhysRevLett.82.2602	journal	March 1999
Lithography with a mask of block copolymer microstructures Harrison, Christopher Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544 https://doi.org/10.1116/1.589860	journal	March 1998
Block copolymer micelle nanolithography on non-conductive substrates Glass, Roman; Arnold, Marco; Cavalcanti-Adam, Elisabetta Ada New Journal of Physics, Vol. 6 https://doi.org/10.1088/1367-2630/6/1/101	journal	January 2004
Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane) Temple, K.; Kulbaba, K.; Power-Billard, K. N. Advanced Materials, Vol. 15, Issue 4, p. 297-300 https://doi.org/10.1002/adma.200390071	journal	February 2003
Patternable Block Copolymers Li, Mingqi; Coenjarts, Christopher A.; Ober, Christopher K. Block Copolymers II, p. 183-226 https://doi.org/10.1007/12_003	book	October 2005
Large-Area Domain Alignment in Block Copolymer Thin Films Using Electric Fields Mansky, P.; DeRouchey, J.; Russell, T. P. Macromolecules, Vol. 31, Issue 13 https://doi.org/10.1021/ma980299u	journal	June 1998
Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications Honda, K.; Rao, Tata N.; Tryk, D. A. Journal of The Electrochemical Society, Vol. 148, Issue 7, p. A668-A679 https://doi.org/10.1149/1.1373450	journal	May 2001
Fabrication of nanostructures with long-range order using block copolymer lithography Cheng, J. Y.; Ross, C. A.; Thomas, E. L. Applied Physics Letters, Vol. 81, Issue 19, p. 3657-3659 https://doi.org/10.1063/1.1519356	journal	November 2002
Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors Chan, Vanessa Z.-H.; Hoffman, James; Lee, Victor Y. Science, Vol. 286, Issue 5445, p. 1716-1719 https://doi.org/10.1126/science.286.5445.1716	journal	November 1999
Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate Park, Cheolmin; Cheng, Joy Y.; Fasolka, Michael J. Applied Physics Letters, Vol. 79, Issue 6, p. 848-850 https://doi.org/10.1063/1.1389766	journal	August 2001
Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer Zhu, Lei; Huang, Ping; Chen, William Y. Macromolecules, Vol. 35, Issue 9, p. 3553-3562 https://doi.org/10.1021/ma012184n	journal	April 2002
Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates Bal, M.; Ursache, A.; Tuominen, M. T. Applied Physics Letters, Vol. 81, Issue 18, p. 3479-3481 https://doi.org/10.1063/1.1517400	journal	October 2002
Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers Sohn, Byeong-Hyeok; Seo, Byung-Wook; Yoo, Seong Il Langmuir, Vol. 18, Issue 26, p. 10505-10508 https://doi.org/10.1021/la026538v	journal	December 2002
Aluminum nanowire polarizing grids: Fabrication and analysis Pelletier, Vincent; Asakawa, Koji; Wu, Mingshaw Applied Physics Letters, Vol. 88, Issue 21, Article No. 211114 https://doi.org/10.1063/1.2206100	journal	May 2006
Small Angle Neutron Scattering Studies on Ultrathin Films Russell, Thomas P.; Lambooy, Peter; Barker, John G. Macromolecules, Vol. 28, Issue 3 https://doi.org/10.1021/ma00107a018	journal	May 1995
Orientation-Controlled Self-Assembled Nanolithography Using a Polystyrene−Polydimethylsiloxane Block Copolymer Jung, Yeon Sik; Ross, C. A. Nano Letters, Vol. 7, Issue 7 https://doi.org/10.1021/nl070924l	journal	July 2007
Transfer of a chemical substrate pattern into an island-forming diblock copolymer film Heier, Jakob; Genzer, Jan; Kramer, Edward J. The Journal of Chemical Physics, Vol. 111, Issue 24, p. 11101-11110 https://doi.org/10.1063/1.480469	journal	December 1999
Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment Fukunaga, Kenji; Elbs, Hubert; Magerle, Robert Macromolecules, Vol. 33, Issue 3, p. 947-953 https://doi.org/10.1021/ma9910639	journal	February 2000
Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications Lammertink, Rob G. H.; Hempenius, Mark A.; Chan, Vanessa Z.-H. Chemistry of Materials, Vol. 13, Issue 2, p. 429-434 https://doi.org/10.1021/cm001052q	journal	February 2001
Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film Elhadj, S.; Woody, J. W.; Niu, V. S. Applied Physics Letters, Vol. 82, Issue 6, p. 871-873 https://doi.org/10.1063/1.1543253	journal	February 2003
Ordered Block-Copolymer Assembly Using Nanoimprint Lithography Li, Hong-Wei; Huck, Wilhelm T. S. Nano Letters, Vol. 4, Issue 9, p. 1633-1636 https://doi.org/10.1021/nl049209r	journal	September 2004
Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials Bockstaller, M. R.; Mickiewicz, R. A.; Thomas, E. L. Advanced Materials, Vol. 17, Issue 11, p. 1331-1349 https://doi.org/10.1002/adma.200500167	journal	June 2005
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques Gates, Byron D.; Xu, Qiaobing; Stewart, Michael Chemical Reviews, Vol. 105, Issue 4, p. 1171-1196 https://doi.org/10.1021/cr030076o	journal	April 2005
Local Control of Microdomain Orientation in Diblock Copolymer Thin Films with Electric Fields Morkved, T. L.; Lu, M.; Urbas, A. M. Science, Vol. 273, Issue 5277 https://doi.org/10.1126/science.273.5277.931	journal	August 1996
Observed Substrate Topography-Mediated Lateral Patterning of Diblock Copolymer Films Fasolka, M. J.; Harris, D. J.; Mayes, A. M. Physical Review Letters, Vol. 79, Issue 16, p. 3018-3021 https://doi.org/10.1103/PhysRevLett.79.3018	journal	October 1997
Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography Kubo, T.; Parker, J. S.; Hillmyer, M. A. Applied Physics Letters, Vol. 90, Issue 23, Article No. 233113 https://doi.org/10.1063/1.2743900	journal	June 2007
Cylinder Alignment in Annular Structures of Microphase-Separated Polystyrene-b-Poly(methyl methacrylate) Hahm, J.; Sibener, S. J. Langmuir, Vol. 16, Issue 11, p. 4766-4769 https://doi.org/10.1021/la9914108	journal	May 2000
Nanoscopic Templates from Oriented Block Copolymer Films Thurn-Albrecht, T.; Steiner, R.; DeRouchey, J. Advanced Materials, Vol. 12, Issue 11, p. 787-791 https://doi.org/10.1002/(SICI)1521-4095(200006)12:11<787::AID-ADMA787>3.0.CO;2-1	journal	June 2000
Enabling nanotechnology with self assembled block copolymer patterns Park, Cheolmin; Yoon, Jongseung; Thomas, Edwin L. Polymer, Vol. 44, Issue 22, p. 6725-6760 https://doi.org/10.1016/j.polymer.2003.08.011	journal	October 2003
Templating the patterning of gold nanoparticles using a stained triblock copolymer film surface Ansari, Imtiyaz A.; Hamley, Ian W. Journal of Materials Chemistry, Vol. 13, Issue 10, p. 2412-2413 https://doi.org/10.1039/B308479P	journal	January 2003
Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation Kim, S. H.; Misner, M. J.; Xu, T. Advanced Materials, Vol. 16, Issue 3, p. 226-231 https://doi.org/10.1002/adma.200304906	journal	February 2004
Mesoporous Polystyrene Monoliths Zalusky, Andrew S.; Olayo-Valles, Roberto; Taylor, Charles J. Journal of the American Chemical Society, Vol. 123, Issue 7, p. 1519-1520 https://doi.org/10.1021/ja003936g	journal	February 2001
Nanodomain control in copolymer thin films Huang, E.; Rockford, L.; Russell, T. P. Nature, Vol. 395, Issue 6704 https://doi.org/10.1038/27358	journal	October 1998
Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography Cheng, J.Y.; Ross, C.A.; Chan, V.Z.-H. Advanced Materials, Vol. 13, Issue 15, p. 1174-1178 https://doi.org/10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO;2-Q	journal	August 2001
Block copolymer patterns and templates Li, Mingqi; Ober, Christopher K. Materials Today, Vol. 9, Issue 9, p. 30-39 https://doi.org/10.1016/S1369-7021(06)71620-0	journal	September 2006
Sub-10 nm imprint lithography and applications Chou, Stephen Y. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6 https://doi.org/10.1116/1.589752	journal	November 1997
Covalent stabilization of nanostructures: Robust block copolymer templates from novel thermoreactive systems Drockenmuller, Eric; Li, Lucy Y. T.; Ryu, Du Yeol Journal of Polymer Science Part A: Polymer Chemistry, Vol. 43, Issue 5, p. 1028-1037 https://doi.org/10.1002/pola.20553	journal	January 2005
Salt Complexation in Block Copolymer Thin Films Kim, Seung Hyun; Misner, Matthew J.; Yang, Ling Macromolecules, Vol. 39, Issue 24, p. 8473-8479 https://doi.org/10.1021/ma061170k	journal	November 2006
Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces Heier, Jakob; Kramer, Edward J.; Walheim, Stefan Macromolecules, Vol. 30, Issue 21, p. 6610-6614 https://doi.org/10.1021/ma961686b	journal	October 1997
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication Black, C. T.; Guarini, K. W.; Milkove, K. R. Applied Physics Letters, Vol. 79, Issue 3, p. 409-411 https://doi.org/10.1063/1.1383805	journal	July 2001
Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography Spatz, Joachim P.; Herzog, Thomas; Mößmer, Stefan Advanced Materials, Vol. 11, Issue 2, p. 149-153 https://doi.org/10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W	journal	February 1999
Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles Sohn, Byeong-Hyeok; Choi, Jeong-Min; Yoo, Seong Il Journal of the American Chemical Society, Vol. 125, Issue 21, p. 6368-6369 https://doi.org/10.1021/ja035069w	journal	May 2003
Highly parallel fabrication of nanopatterned surfaces with nanoscale orthogonal biofunctionalization imprint lithography Gaubert, Harold E.; Frey, Wolfgang Nanotechnology, Vol. 18, Issue 13 https://doi.org/10.1088/0957-4484/18/13/135101	journal	February 2007
Long-Range Ordered Thin Films of Block Copolymers Prepared by Zone-Casting and Their Thermal Conversion into Ordered Nanostructured Carbon Tang, Chuanbing; Tracz, Adam; Kruk, Michal Journal of the American Chemical Society, Vol. 127, Issue 19, p. 6918-6919 https://doi.org/10.1021/ja0508929	journal	May 2005
Spatially Controlled Fabrication of Nanoporous Block Copolymers Li, Mingqi; Douki, Katsuji; Goto, Ken Chemistry of Materials, Vol. 16, Issue 20, p. 3800-3808 https://doi.org/10.1021/cm0493445	journal	October 2004
Nanoscale patterning using self-assembled polymers for semiconductor applications Guarini, K. W.; Black, C. T.; Milkove, K. R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784 https://doi.org/10.1116/1.1421551	journal	January 2001
Chemical Nanolithography with Electron Beams Gölzhäuser, A.; Eck, W.; Geyer, W. Advanced Materials, Vol. 13, Issue 11 https://doi.org/10.1002/1521-4095(200106)13:11<803::AID-ADMA806>3.0.CO;2-W	journal	June 2001
Patterning with block copolymer thin films Segalman, Rachel A. Materials Science and Engineering: R: Reports, Vol. 48, Issue 6, p. 191-226 https://doi.org/10.1016/j.mser.2004.12.003	journal	February 2005
Self-assembly of functional nanostructures from ABC triblock copolymers Ludwigs, Sabine; Böker, Alexander; Voronov, Andrej Nature Materials, Vol. 2, Issue 11 https://doi.org/10.1038/nmat997	journal	October 2003
Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order Park, Soojin; Lee, Dong Hyun; Xu, Ji Science, Vol. 323, Issue 5917, p. 1030-1033 https://doi.org/10.1126/science.1168108	journal	February 2009
Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices Black, C. T.; Murray, C. B.; Sandstorm, R. L. Science, Vol. 290, Issue 5494, p. 1131-1134 https://doi.org/10.1126/science.290.5494.1131	journal	November 2000
Control of Nanoparticle Location in Block Copolymers Chiu, Julia J.; Kim, Bumjoon J.; Kramer, Edward J. Journal of the American Chemical Society, Vol. 127, Issue 14 https://doi.org/10.1021/ja050376i	journal	April 2005
Controlled Arrangement of Nanoparticle Arrays in Block-Copolymer Domains Haryono, Agus; Binder, Wolfgang H. Small, Vol. 2, Issue 5 https://doi.org/10.1002/smll.200500474	journal	May 2006
Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent Park, Cheolmin; De Rosa, Claudio; Thomas, Edwin L. Macromolecules, Vol. 34, Issue 8, p. 2602-2606 https://doi.org/10.1021/ma0018603	journal	April 2001
Block Copolymer Lithography: Periodic Arrays of 10¹¹ Holes in 1 Square Centimeter Park, Miri; Harrison, Christopher; Chaikin, Paul M. Science, Vol. 276, Issue 5317, p. 1401-1404 https://doi.org/10.1126/science.276.5317.1401	journal	May 1997
Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates Yang, Xiao M.; Peters, Richard D.; Nealey, Paul F. Macromolecules, Vol. 33, Issue 26, p. 9575-9582 https://doi.org/10.1021/ma001326v	journal	December 2000
Nanometer-Scale Pattern Registration and Alignment by Directed Diblock Copolymer Self-Assembly Black, C. T.; Bezencenet, O. IEEE Transactions On Nanotechnology, Vol. 3, Issue 3, p. 412-415 https://doi.org/10.1109/TNANO.2004.834160	journal	September 2004
Overcoming Interfacial Interactions with Electric Fields Thurn-Albrecht, T.; DeRouchey, J.; Russell, T. P. Macromolecules, Vol. 33, Issue 9, p. 3250-3253 https://doi.org/10.1021/ma991896z	journal	May 2000
Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures Stoykovich, Mark P.; Müller, Marcus; Kim, Sang Ouk Science, Vol. 308, Issue 5727, p. 1442-1446 https://doi.org/10.1126/science.1111041	journal	June 2005
One-Dimensional Arrangements of Metal Nanoclusters Wyrwa, Daniel; Beyer, Norbert; Schmid, Günter Nano Letters, Vol. 2, Issue 4, p. 419-421 https://doi.org/10.1021/nl0157086	journal	April 2002
Modeling copolymer adsorption on laterally heterogeneous surfaces Huang, Kanglin; Balazs, Anna C. Physical Review Letters, Vol. 66, Issue 5, p. 620-623 https://doi.org/10.1103/PhysRevLett.66.620	journal	February 1991
Study of oriented block copolymers films obtained by roll-casting Villar, Marcelo A.; Rueda, Daniel R.; Ania, Fernando Polymer, Vol. 43, Issue 19, p. 5139-5145 https://doi.org/10.1016/S0032-3861(02)00388-9	journal	September 2002
Ultrahigh Pore Density Nanoporous Films Produced by the Phase Separation of Eutectic Al–Si for Template-Assisted Growth of Nanowire Array Fukutani, K.; Tanji, K.; Motoi, T. Advanced Materials, Vol. 16, Issue 16, p. 1456-1460 https://doi.org/10.1002/adma.200400268	journal	August 2004
A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates Park, Soojin; Wang, Jia-Yu; Kim, Bokyung ACS Nano, Vol. 2, Issue 4, p. 766-772 https://doi.org/10.1021/nn7004415	journal	April 2008
Ordering and Melting of Block Copolymer Spherical Domains in 2 and 3 Dimensions Segalman, Rachel A.; Hexemer, Alexander; Hayward, Ryan C. Macromolecules, Vol. 36, Issue 9, p. 3272-3288 https://doi.org/10.1021/ma021367m	journal	May 2003
Nano-structured micropatterns by combination of block copolymer self-assembly and UV photolithography Gorzolnik, B.; Mela, P.; Moeller, M. Nanotechnology, Vol. 17, Issue 19 https://doi.org/10.1088/0957-4484/17/19/042	journal	September 2006
Block Copolymer Thin Films: Physics and Applications Fasolka, Michael J.; Mayes, Anne M. Annual Review of Materials Research, Vol. 31, Issue 1, p. 323-355 https://doi.org/10.1146/annurev.matsci.31.1.323	journal	August 2001
Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers Xu, Ting; Hawker, Craig J.; Russell, Thomas P. Macromolecules, Vol. 36, Issue 16, p. 6178-6182 https://doi.org/10.1021/ma034511s	journal	August 2003
Nanoporous Gold Films Created Using Templates Formed from Self-Assembled Structures of Inorganic–Block Copolymer Micelles Haupt, M.; Miller, S.; Glass, R. Advanced Materials, Vol. 15, Issue 10, p. 829-831 https://doi.org/10.1002/adma.200304688	journal	May 2003
Graphoepitaxy of Spherical Domain Block Copolymer Films Segalman, R. A.; Yokoyama, H.; Kramer, E. J. Advanced Materials, Vol. 13, Issue 15, p. 1152-1155 https://doi.org/10.1002/1521-4095(200108)13:15<1152::AID-ADMA1152>3.0.CO;2-5	journal	August 2001
Predicting the Mesophases of Copolymer-Nanoparticle Composites Thompson, Russell B.; Ginzburg, Valeriy V.; Matsen, Mark W. Science, Vol. 292, Issue 5526, p. 2469-2472 https://doi.org/10.1126/science.1060585	journal	June 2001
Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces del Campo, Aránzazu; Arzt, Eduard Chemical Reviews, Vol. 108, Issue 3, p. 911-945 https://doi.org/10.1021/cr050018y	journal	March 2008
Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes Hawker, Craig J.; Russell, Thomas P. MRS Bulletin, Vol. 30, Issue 12, p. 952-966 https://doi.org/10.1557/mrs2005.249	journal	December 2005
Attractive step-step interactions, tricriticality, and faceting in the orientational phase diagram of silicon surfaces between [113] and [114] Song, S.; Mochrie, S. G. J. Physical Review B, Vol. 51, Issue 15, p. 10068-10084 https://doi.org/10.1103/PhysRevB.51.10068	journal	April 1995
Plasmonics-A Route to Nanoscale Optical Devices Maier, S. A.; Brongersma, M. L.; Kik, P. G. Advanced Materials, Vol. 13, Issue 19, p. 1501-1505 https://doi.org/10.1002/1521-4095(200110)13:19<1501::AID-ADMA1501>3.0.CO;2-Z	journal	September 2001
Microdomain patterns from directional eutectic solidification and epitaxy De Rosa, Claudio; Park, Cheolmin; Thomas, Edwin L. Nature, Vol. 405, Issue 6785, p. 433-437 https://doi.org/10.1038/35013018	journal	May 2000
Patterned Magnetic Recording Media Ross, C. A. Annual Review of Materials Research, Vol. 31, Issue 1, p. 203-235 https://doi.org/10.1146/annurev.matsci.31.1.203	journal	August 2001
Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces: Characterization by AFM and LFM Meli, Maria-Victoria; Badia, Antonella; Grütter, Peter Nano Letters, Vol. 2, Issue 2, p. 131-135 https://doi.org/10.1021/nl015639v	journal	February 2002
Simulations of the Morphology of Cylinder-Forming Asymmetric Diblock Copolymer Thin Films on Nanopatterned Substrates Wang, Qiang; Nealey, Paul F.; de Pablo, Juan J. Macromolecules, Vol. 36, Issue 5, p. 1731-1740 https://doi.org/10.1021/ma020996t	journal	March 2003
Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top–Down and Bottom–Up Approaches Du, P.; Li, M.; Douki, K. Advanced Materials, Vol. 16, Issue 12, p. 953-957 https://doi.org/10.1002/adma.200306189	journal	June 2004
Block Copolymer Surface Reconstuction: A Reversible Route to Nanoporous Films Xu, T.; Stevens, J.; Villa, J.A. Advanced Functional Materials, Vol. 13, Issue 9, p. 698-702 https://doi.org/10.1002/adfm.200304374	journal	September 2003

Similar Records

Self-assembly of block copolymers on topographically patterned polymeric substrates

Patent · 2012 · OSTI ID:1062723

Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles

Patent · 2015 · OSTI ID:1223115

Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles

Patent · 2017 · OSTI ID:1373919

Related Subjects

36 MATERIALS SCIENCE

Self-assembly of block copolymers on topographically patterned polymeric substrates

Citation Formats

References (119)

Similar Records

Related Subjects