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Title: Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

Journal Article · · Thin Solid Films

Sponsoring Organization:
USDOE
Grant/Contract Number:
W-7405-ENG-48
OSTI ID:
1249633
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 592 Journal Issue: PB; ISSN 0040-6090
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English
Citation Metrics:
Cited by: 16 works
Citation information provided by
Web of Science