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Title: Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects

Authors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Materials Sciences Division
OSTI Identifier:
1240628
Report Number(s):
LBNL-176705
Journal ID: ISSN 2166-2746; ir:176705
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics; Journal Volume: 33; Journal Issue: 2
Country of Publication:
United States
Language:
English

Citation Formats

Upadhyaya, Mihir, Basavalingappa, Adarsh, Herbol, Henry, Denbeaux, Gregory, Jindal, Vibhu, Harris-Jones, Jenah, Jang, Il-Yong, Goldberg, Kenneth A., Mochi, Iacopo, Marokkey, Sajan, Demmerle, Wolfgang, and Pistor, Thomas V.. Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects. United States: N. p., 2015. Web. doi:10.1116/1.4913315.
Upadhyaya, Mihir, Basavalingappa, Adarsh, Herbol, Henry, Denbeaux, Gregory, Jindal, Vibhu, Harris-Jones, Jenah, Jang, Il-Yong, Goldberg, Kenneth A., Mochi, Iacopo, Marokkey, Sajan, Demmerle, Wolfgang, & Pistor, Thomas V.. Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects. United States. doi:10.1116/1.4913315.
Upadhyaya, Mihir, Basavalingappa, Adarsh, Herbol, Henry, Denbeaux, Gregory, Jindal, Vibhu, Harris-Jones, Jenah, Jang, Il-Yong, Goldberg, Kenneth A., Mochi, Iacopo, Marokkey, Sajan, Demmerle, Wolfgang, and Pistor, Thomas V.. Sun . "Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects". United States. doi:10.1116/1.4913315. https://www.osti.gov/servlets/purl/1240628.
@article{osti_1240628,
title = {Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects},
author = {Upadhyaya, Mihir and Basavalingappa, Adarsh and Herbol, Henry and Denbeaux, Gregory and Jindal, Vibhu and Harris-Jones, Jenah and Jang, Il-Yong and Goldberg, Kenneth A. and Mochi, Iacopo and Marokkey, Sajan and Demmerle, Wolfgang and Pistor, Thomas V.},
abstractNote = {},
doi = {10.1116/1.4913315},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 2,
volume = 33,
place = {United States},
year = {Sun Mar 01 00:00:00 EST 2015},
month = {Sun Mar 01 00:00:00 EST 2015}
}