skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: wafer level packaging of aluminum nitride rf mems filters.

Abstract

Abstract not provided.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1240326
Report Number(s):
SAND2015-1368C
567217
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the IEEE ECTC held May 26-29, 2015 in San Diego, Ca.
Country of Publication:
United States
Language:
English

Citation Formats

Henry, Michael David, Young, Travis Ryan, Hollowell, Andrew E, Eichenfield, Matt, and Olsson, Roy H. wafer level packaging of aluminum nitride rf mems filters.. United States: N. p., 2015. Web.
Henry, Michael David, Young, Travis Ryan, Hollowell, Andrew E, Eichenfield, Matt, & Olsson, Roy H. wafer level packaging of aluminum nitride rf mems filters.. United States.
Henry, Michael David, Young, Travis Ryan, Hollowell, Andrew E, Eichenfield, Matt, and Olsson, Roy H. Sun . "wafer level packaging of aluminum nitride rf mems filters.". United States. doi:. https://www.osti.gov/servlets/purl/1240326.
@article{osti_1240326,
title = {wafer level packaging of aluminum nitride rf mems filters.},
author = {Henry, Michael David and Young, Travis Ryan and Hollowell, Andrew E and Eichenfield, Matt and Olsson, Roy H.},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Feb 01 00:00:00 EST 2015},
month = {Sun Feb 01 00:00:00 EST 2015}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: