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Title: Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Org.:
DOE - BASIC ENERGY SCIENCES
OSTI Identifier:
1240180
Resource Type:
Journal Article
Journal Name:
ECS Transactions
Additional Journal Information:
Journal Volume: 69; Journal Issue: (7) ; 2015; Journal ID: ISSN 1938-5862
Country of Publication:
United States
Language:
ENGLISH

Citation Formats

Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., and Diebold, Alain C. Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects. United States: N. p., 2016. Web. doi:10.1149/06907.0181ecst.
Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., & Diebold, Alain C. Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects. United States. doi:10.1149/06907.0181ecst.
Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., and Diebold, Alain C. Fri . "Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects". United States. doi:10.1149/06907.0181ecst.
@article{osti_1240180,
title = {Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects},
author = {Consiglio, Steven and Yu, Kyle and Dey, Sonal and Tapily, Kandabara and Clark, Robert D. and Hasegawa, Toshio and Wajda, Cory S. and Leusink, Gert J. and Diebold, Alain C.},
abstractNote = {},
doi = {10.1149/06907.0181ecst},
journal = {ECS Transactions},
issn = {1938-5862},
number = (7) ; 2015,
volume = 69,
place = {United States},
year = {2016},
month = {7}
}