Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
Patent
·
OSTI ID:1239661
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-06CH11357
- Assignee:
- UChicago Argonne, LLC (Argonne, IL)
- Patent Number(s):
- 9,269,519
- Application Number:
- 14/731,830
- OSTI ID:
- 1239661
- Country of Publication:
- United States
- Language:
- English
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