Sandia Advanced MEMS Design Tools is a 5-level surface micromachine fabrication technology, which customers internal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c)Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at SNL e) Facilitate the process of having post-fabrication services performed While there exist some files on the CD that are used in conjunction with the software AutoCAD, these files are not intended for use independent of the CD. NOTE: THE CUSTOMER MUST PURCHASE HIS/HER OWN COPY OF AutoCAD TO USE WITH THESE FILES.
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@misc{osti_1230643,
title = {Sandia Advanced MEMS Design Tools, Version 2.0, Version 00},
author = {Allen, Jim and McBrayer, John and Miller, Sam and Rodgers, Steve and montague, Steve and Sniegowski, Jeff and Jakubczak, Jay and Yarberry, Vic and Barnes, Steve and Priddy, Brian and Reyes, David and Westling, Belinda},
abstractNote = {Sandia Advanced MEMS Design Tools is a 5-level surface micromachine fabrication technology, which customers internal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c)Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at SNL e) Facilitate the process of having post-fabrication services performed While there exist some files on the CD that are used in conjunction with the software AutoCAD, these files are not intended for use independent of the CD. NOTE: THE CUSTOMER MUST PURCHASE HIS/HER OWN COPY OF AutoCAD TO USE WITH THESE FILES.},
doi = {},
url = {https://www.osti.gov/biblio/1230643},
year = {Thu Jun 13 00:00:00 EDT 2002},
month = {Thu Jun 13 00:00:00 EDT 2002},
note =
}
