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Title: Comparative analyses of plasma probe diagnostics techniques

Abstract

Here, the subject of this paper is a comparative analysis of the plasma parameters inferred from the classical Langmuir probe procedure, from different theories of the ion current to the probe, and from measured electron energy distribution function (EEDF) obtained by double differentiation of the probe characteristic. We concluded that the plasma parameters inferred from the classical Langmuir procedure can be subjected to significant inaccuracy due to the non-Maxwellian EEDF, uncertainty of locating the plasma potential, and the arbitrariness of the ion current approximation. The plasma densities derived from the ion part of the probe characteristics diverge by as much as an order of magnitude from the density calculated according to Langmuir procedure or calculated as corresponding integral of the measured EEDF. The electron temperature extracted from the ion part is always subjected to uncertainty. Such inaccuracy is attributed to modification of the EEDF for fast electrons due to inelastic electron collisions, and to deficiencies in the existing ion current theories; i.e., unrealistic assumptions about Maxwellian EEDFs, underestimation of the ion collisions and the ion ambipolar drift, and discounting deformation of the one-dimensional structure of the region perturbed by the probe. We concluded that EEDF measurement is the single reliablemore » probe diagnostics for the basic research and industrial applications of highly non-equilibrium gas discharge plasmas. Examples of EEDF measurements point up importance of examining the probe current derivatives in real time and reiterate significance of the equipment technical characteristics, such as high energy resolution and wide dynamic range.« less

Authors:
ORCiD logo [1];  [2]
  1. Univ. of Michigan, Ann Arbor, MI (United States); RF Plasma Consulting, Brookline, MA (United States)
  2. Plasma Sensors, Brookline, MA (United States)
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
OSTI Identifier:
1468473
Alternate Identifier(s):
OSTI ID: 1229790
Grant/Contract Number:  
SC0001939
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 118; Journal Issue: 23; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Godyak, V. A., and Alexandrovich, B. M. Comparative analyses of plasma probe diagnostics techniques. United States: N. p., 2015. Web. doi:10.1063/1.4937446.
Godyak, V. A., & Alexandrovich, B. M. Comparative analyses of plasma probe diagnostics techniques. United States. https://doi.org/10.1063/1.4937446
Godyak, V. A., and Alexandrovich, B. M. 2015. "Comparative analyses of plasma probe diagnostics techniques". United States. https://doi.org/10.1063/1.4937446. https://www.osti.gov/servlets/purl/1468473.
@article{osti_1468473,
title = {Comparative analyses of plasma probe diagnostics techniques},
author = {Godyak, V. A. and Alexandrovich, B. M.},
abstractNote = {Here, the subject of this paper is a comparative analysis of the plasma parameters inferred from the classical Langmuir probe procedure, from different theories of the ion current to the probe, and from measured electron energy distribution function (EEDF) obtained by double differentiation of the probe characteristic. We concluded that the plasma parameters inferred from the classical Langmuir procedure can be subjected to significant inaccuracy due to the non-Maxwellian EEDF, uncertainty of locating the plasma potential, and the arbitrariness of the ion current approximation. The plasma densities derived from the ion part of the probe characteristics diverge by as much as an order of magnitude from the density calculated according to Langmuir procedure or calculated as corresponding integral of the measured EEDF. The electron temperature extracted from the ion part is always subjected to uncertainty. Such inaccuracy is attributed to modification of the EEDF for fast electrons due to inelastic electron collisions, and to deficiencies in the existing ion current theories; i.e., unrealistic assumptions about Maxwellian EEDFs, underestimation of the ion collisions and the ion ambipolar drift, and discounting deformation of the one-dimensional structure of the region perturbed by the probe. We concluded that EEDF measurement is the single reliable probe diagnostics for the basic research and industrial applications of highly non-equilibrium gas discharge plasmas. Examples of EEDF measurements point up importance of examining the probe current derivatives in real time and reiterate significance of the equipment technical characteristics, such as high energy resolution and wide dynamic range.},
doi = {10.1063/1.4937446},
url = {https://www.osti.gov/biblio/1468473}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 23,
volume = 118,
place = {United States},
year = {Tue Dec 15 00:00:00 EST 2015},
month = {Tue Dec 15 00:00:00 EST 2015}
}

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Cited by: 85 works
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Works referenced in this record:

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  • Fox-Lyon, Nick; Oehrlein, Gottlieb S.; Godyak, Valery
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 3
  • https://doi.org/10.1116/1.4867158

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journal, May 2010


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Works referencing / citing this record:

Demonstration of fast-electron populations in a low-pressure, low-power, magnetized RF plasma source
journal, March 2018


Note: Measurement of the cathode layer thickness in glow discharges with a Langmuir probe
journal, June 2018


Floating potential of emitting surfaces in plasmas with respect to the space potential
journal, March 2018


Determining the spectrum of penning electrons by current to a wall probe in nonlocal negative glow plasma
journal, October 2018


Plasma characterization of a microwave discharge ion source with mirror magnetic field configuration
journal, December 2018


Fast sweeping probe system for characterization of spokes in E × B discharges
journal, December 2018


Comparative measurement of plasma potential with tube probe and Langmuir probe
journal, November 2018


Measurement of the electron energy distribution in moving striations at low gas pressures
journal, March 2019


Enhanced method for analyzing Langmuir probe data and characterizing the Electron Energy Distribution Function (EEDF)
journal, June 2019


Plasma-enhanced metamaterials using microwave radiative power transfer
journal, September 2018


Diagnostics of large volume coaxial gridded hollow cathode DC discharge
journal, June 2019


Measurement of Temperature and Density Profiles of the Plasma at PR-2 Facility
journal, December 2017


Comments on the Langmuir probe measurements of radio-frequency capacitive argon–hydrogen mixture discharge at low pressure
journal, May 2018