Comparative analyses of plasma probe diagnostics techniques
Abstract
Here, the subject of this paper is a comparative analysis of the plasma parameters inferred from the classical Langmuir probe procedure, from different theories of the ion current to the probe, and from measured electron energy distribution function (EEDF) obtained by double differentiation of the probe characteristic. We concluded that the plasma parameters inferred from the classical Langmuir procedure can be subjected to significant inaccuracy due to the non-Maxwellian EEDF, uncertainty of locating the plasma potential, and the arbitrariness of the ion current approximation. The plasma densities derived from the ion part of the probe characteristics diverge by as much as an order of magnitude from the density calculated according to Langmuir procedure or calculated as corresponding integral of the measured EEDF. The electron temperature extracted from the ion part is always subjected to uncertainty. Such inaccuracy is attributed to modification of the EEDF for fast electrons due to inelastic electron collisions, and to deficiencies in the existing ion current theories; i.e., unrealistic assumptions about Maxwellian EEDFs, underestimation of the ion collisions and the ion ambipolar drift, and discounting deformation of the one-dimensional structure of the region perturbed by the probe. We concluded that EEDF measurement is the single reliablemore »
- Authors:
-
- Univ. of Michigan, Ann Arbor, MI (United States); RF Plasma Consulting, Brookline, MA (United States)
- Plasma Sensors, Brookline, MA (United States)
- Publication Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Fusion Energy Sciences (FES)
- OSTI Identifier:
- 1468473
- Alternate Identifier(s):
- OSTI ID: 1229790
- Grant/Contract Number:
- SC0001939
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 118; Journal Issue: 23; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Godyak, V. A., and Alexandrovich, B. M. Comparative analyses of plasma probe diagnostics techniques. United States: N. p., 2015.
Web. doi:10.1063/1.4937446.
Godyak, V. A., & Alexandrovich, B. M. Comparative analyses of plasma probe diagnostics techniques. United States. https://doi.org/10.1063/1.4937446
Godyak, V. A., and Alexandrovich, B. M. 2015.
"Comparative analyses of plasma probe diagnostics techniques". United States. https://doi.org/10.1063/1.4937446. https://www.osti.gov/servlets/purl/1468473.
@article{osti_1468473,
title = {Comparative analyses of plasma probe diagnostics techniques},
author = {Godyak, V. A. and Alexandrovich, B. M.},
abstractNote = {Here, the subject of this paper is a comparative analysis of the plasma parameters inferred from the classical Langmuir probe procedure, from different theories of the ion current to the probe, and from measured electron energy distribution function (EEDF) obtained by double differentiation of the probe characteristic. We concluded that the plasma parameters inferred from the classical Langmuir procedure can be subjected to significant inaccuracy due to the non-Maxwellian EEDF, uncertainty of locating the plasma potential, and the arbitrariness of the ion current approximation. The plasma densities derived from the ion part of the probe characteristics diverge by as much as an order of magnitude from the density calculated according to Langmuir procedure or calculated as corresponding integral of the measured EEDF. The electron temperature extracted from the ion part is always subjected to uncertainty. Such inaccuracy is attributed to modification of the EEDF for fast electrons due to inelastic electron collisions, and to deficiencies in the existing ion current theories; i.e., unrealistic assumptions about Maxwellian EEDFs, underestimation of the ion collisions and the ion ambipolar drift, and discounting deformation of the one-dimensional structure of the region perturbed by the probe. We concluded that EEDF measurement is the single reliable probe diagnostics for the basic research and industrial applications of highly non-equilibrium gas discharge plasmas. Examples of EEDF measurements point up importance of examining the probe current derivatives in real time and reiterate significance of the equipment technical characteristics, such as high energy resolution and wide dynamic range.},
doi = {10.1063/1.4937446},
url = {https://www.osti.gov/biblio/1468473},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 23,
volume = 118,
place = {United States},
year = {Tue Dec 15 00:00:00 EST 2015},
month = {Tue Dec 15 00:00:00 EST 2015}
}
Web of Science
Works referenced in this record:
Probe diagnostics of non‐Maxwellian plasmas
journal, April 1993
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Journal of Applied Physics, Vol. 73, Issue 8
Langmuir probes in RF plasma: surprising validity of OML theory
journal, May 2009
- Chen, Francis F.
- Plasma Sources Science and Technology, Vol. 18, Issue 3
Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma
journal, July 1998
- Godyak, Valery A.; Kolobov, Vladimir I.
- Physical Review Letters, Vol. 81, Issue 2
The use of electrostatic probes for plasma diagnostics?A review
journal, June 1982
- Cherrington, B. E.
- Plasma Chemistry and Plasma Processing, Vol. 2, Issue 2
Measurement of electron energy distribution in low-pressure RF discharges
journal, March 1992
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Plasma Sources Science and Technology, Vol. 1, Issue 1
Plasma parameters deduced from cylindrical probe measurements: determination of the electron density at the ion saturation current
journal, February 2008
- Jauberteau, J. L.; Jauberteau, I.
- Plasma Sources Science and Technology, Vol. 17, Issue 1
Electron kinetics in non-uniform glow discharge plasmas
journal, May 1995
- Tsendin, L. D.
- Plasma Sources Science and Technology, Vol. 4, Issue 2
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
journal, May 2011
- Godyak, V. A.; Demidov, V. I.
- Journal of Physics D: Applied Physics, Vol. 44, Issue 23
Comparison of plasma parameters determined with a Langmuir probe and with a retarding field energy analyzer
journal, July 2008
- Gahan, D.; Dolinaj, B.; Hopkins, M. B.
- Plasma Sources Science and Technology, Vol. 17, Issue 3
Der Niedervoltbogen
journal, September 1930
- Druyvesteyn, M. J.
- Zeitschrift für Physik, Vol. 64, Issue 11-12
The Collection of Positive Ions by a Probe Immersed in a Plasma
journal, March 1957
- Allen, J. E.; Boyd, R. L. F.; Reynolds, P.
- Proceedings of the Physical Society. Section B, Vol. 70, Issue 3
Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
journal, January 1992
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Physical Review Letters, Vol. 68, Issue 1
Effect of Collisions on Cold Ion Collection by Means of Langmuir Probes
journal, September 1971
- Shih, C. H.; Levi, E.
- AIAA Journal, Vol. 9, Issue 9
Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
journal, August 1990
- Godyak, V. A.; Piejak, R. B.
- Physical Review Letters, Vol. 65, Issue 8
Electric probes for plasmas: The link between theory and instrument
journal, October 2002
- Demidov, V. I.; Ratynskaia, S. V.; Rypdal, K.
- Review of Scientific Instruments, Vol. 73, Issue 10
Theory of Electrostatic Probes in a Low-Density Plasma
journal, January 1959
- Bernstein, Ira B.; Rabinowitz, Irving N.
- Physics of Fluids, Vol. 2, Issue 2
Determination of Ar metastable atom densities in Ar and Ar/H 2 inductively coupled low-temperature plasmas
journal, November 2013
- Fox-Lyon, N.; Knoll, A. J.; Franek, J.
- Journal of Physics D: Applied Physics, Vol. 46, Issue 48
Nonequilibrium EEDF in gas discharge plasmas
journal, June 2006
- Godyak, V. A.
- IEEE Transactions on Plasma Science, Vol. 34, Issue 3
On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas
journal, February 1996
- Kortshagen, U.; Busch, C.; Tsendin, L. D.
- Plasma Sources Science and Technology, Vol. 5, Issue 1
A Collisional Model of the Positive Ion Collection by a Cylindrical Langmuir Probe
journal, January 1994
- Tichý, M.; Šícha, M.; David, P.
- Contributions to Plasma Physics, Vol. 34, Issue 1
Nonlocal electron kinetics in collisional gas discharge plasmas
journal, January 1995
- Kolobov, V. I.; Godyak, V. A.
- IEEE Transactions on Plasma Science, Vol. 23, Issue 4
Particle-in-cell simulations of planar and cylindrical Langmuir probes: Floating potential and ion saturation current
journal, July 2006
- Iza, Felipe; Lee, Jae Koo
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 24, Issue 4
Effect of surface derived hydrocarbon impurities on Ar plasma properties
journal, May 2014
- Fox-Lyon, Nick; Oehrlein, Gottlieb S.; Godyak, Valery
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 3
Nonlocal electron kinetics in gas-discharge plasma
journal, May 2010
- Tsendin, Lev D.
- Physics-Uspekhi, Vol. 53, Issue 2
A study of the accuracy of various Langmuir probe theories
journal, October 1994
- Sudit, Isaac D.; Woods, R. Claude
- Journal of Applied Physics, Vol. 76, Issue 8
Hot plasma effects in gas discharge plasma
journal, May 2005
- Godyak, Valery
- Physics of Plasmas, Vol. 12, Issue 5
Ion collection by cylindrical probes in weakly collisional plasmas: Theory and experiment
journal, August 2003
- Sternovsky, Z.; Robertson, S.; Lampe, M.
- Journal of Applied Physics, Vol. 94, Issue 3
Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma
journal, November 2002
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Plasma Sources Science and Technology, Vol. 11, Issue 4
Lorentz force effects on the electron energy distribution in inductively coupled plasmas
journal, July 2001
- Godyak, V. A.; Alexandrovich, B. M.; Kolobov, V. I.
- Physical Review E, Vol. 64, Issue 2
From Fermi acceleration to collisionless discharge heating
journal, June 1998
- Lieberman, M. A.; Godyak, V. A.
- IEEE Transactions on Plasma Science, Vol. 26, Issue 3
New books - Electrical probes for plasma diagnostics
journal, December 1970
- Swift, J. D.; Schwar, M. J. R.
- Analytical Chemistry, Vol. 42, Issue 14
Nonlocal electron kinetics in gas discharge plasma [Nelokal'naya kinetika elektronov v gazorazryadnoi plazme]
journal, January 2010
- Tsendin, L. D.
- Uspekhi Fizicheskih Nauk, Vol. 180, Issue 2
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
journal, June 2011
- Godyak, V. A.; Demidov, V. I.
- Journal of Physics D: Applied Physics, Vol. 44, Issue 26
Works referencing / citing this record:
Demonstration of fast-electron populations in a low-pressure, low-power, magnetized RF plasma source
journal, March 2018
- Jandovitz, P.; Swanson, C.; Matteucci, J.
- Physics of Plasmas, Vol. 25, Issue 3
Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
journal, January 2018
- Gao, Fei; Li, Hong; Yang, Wei
- Physics of Plasmas, Vol. 25, Issue 1
Note: Measurement of the cathode layer thickness in glow discharges with a Langmuir probe
journal, June 2018
- Wang, Hao; Hou, Xinyu; Zou, Xiaobing
- Review of Scientific Instruments, Vol. 89, Issue 6
Floating potential of emitting surfaces in plasmas with respect to the space potential
journal, March 2018
- Kraus, B. F.; Raitses, Y.
- Physics of Plasmas, Vol. 25, Issue 3
Determining the spectrum of penning electrons by current to a wall probe in nonlocal negative glow plasma
journal, October 2018
- Yuan, Chengxun; Kudryavtsev, A. A.; Saifutdinov, A. I.
- Physics of Plasmas, Vol. 25, Issue 10
Plasma characterization of a microwave discharge ion source with mirror magnetic field configuration
journal, December 2018
- Mallick, C.; Bandyopadhyay, M.; Kumar, R.
- Review of Scientific Instruments, Vol. 89, Issue 12
Fast sweeping probe system for characterization of spokes in E × B discharges
journal, December 2018
- Skoutnev, V.; Dourbal, P.; Rodríguez, E.
- Review of Scientific Instruments, Vol. 89, Issue 12
Comparative measurement of plasma potential with tube probe and Langmuir probe
journal, November 2018
- Li, Jian-quan; Lu, Wen-qi; Xu, Jun
- AIP Advances, Vol. 8, Issue 11
Measurement of the electron energy distribution in moving striations at low gas pressures
journal, March 2019
- Godyak, V. A.; Alexandrovich, B. M.; Kolobov, V. I.
- Physics of Plasmas, Vol. 26, Issue 3
Enhanced method for analyzing Langmuir probe data and characterizing the Electron Energy Distribution Function (EEDF)
journal, June 2019
- Trent, Kimberly R.; Gallimore, Alec D.; Foster, John E.
- Physics of Plasmas, Vol. 26, Issue 6
Plasma-enhanced metamaterials using microwave radiative power transfer
journal, September 2018
- Kim, Hyunjun; Hopwood, Jeffrey
- Plasma Sources Science and Technology, Vol. 27, Issue 9
Diagnostics of large volume coaxial gridded hollow cathode DC discharge
journal, June 2019
- Yuan, Chengxun; Kudryavtsev, A. A.; Saifutdinov, A. I.
- Plasma Sources Science and Technology, Vol. 28, Issue 6
Modulation of electron energy distribution functions and plasma parameters in a dual-frequency cylindrical ICP source
journal, November 2018
- Hua, Yue; Song, Jian; Hao, Zeyu
- Plasma Research Express, Vol. 1, Issue 1
Measurement of Temperature and Density Profiles of the Plasma at PR-2 Facility
journal, December 2017
- Sorokin, I. A.; Gutorov, K. M.; Bolotov, M. D.
- Physics of Atomic Nuclei, Vol. 80, Issue 11
Comments on the Langmuir probe measurements of radio-frequency capacitive argon–hydrogen mixture discharge at low pressure
journal, May 2018
- Tanışlı, Murat; Şahi̇n, Nesli̇han; Demi̇r, Süleyman
- Canadian Journal of Physics, Vol. 96, Issue 5
Floating potential of emitting surfaces in plasmas with respect to the space potential
text, January 2018
- Kraus, Brian F.; Raitses, Yevgeny
- arXiv