Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool
- Argonne National Lab. (ANL), Lemont, IL (United States)
- Argonne National Lab. (ANL), Lemont, IL (United States); Univ. of Illinois, Chicago, IL (United States)
- Arradiance Inc., Sudbury, MA (United States)
- Argonne National Lab. (ANL), Lemont, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
- Argonne National Lab. (ANL), Lemont, IL (United States); Northwestern Univ., Evanston, IL (United States)
An integrated atomic layer deposition-catalysis (I-ALD-CAT) tool was developed, combining an ALD manifold with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT system can deliver gaseous reagents comprised of 12 different metal ALD precursors, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10-3 to 1 bar and 300–1000 K, respectively. Furthermore, the instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the ALD of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences, and Biosciences Division
- Grant/Contract Number:
- AC02-06CH11357; AC-02-06CH11357
- OSTI ID:
- 1391821
- Alternate ID(s):
- OSTI ID: 1229634
- Journal Information:
- Review of Scientific Instruments, Vol. 86, Issue 8; ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth
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journal | December 2018 |
New development of atomic layer deposition: processes, methods and applications
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journal | May 2019 |
Atomic Layer Deposition of GdCoO3 and Gd0.9Ca0.1CoO3
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journal | December 2019 |
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