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Title: Linking Strain Anisotropy and Plasticity in Copper Metallization

Authors:
; ; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1229188
Report Number(s):
BNL-111263-2015-JA
Journal ID: ISSN 0003-6951
DOE Contract Number:  
SC00112704
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 106; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

Citation Formats

Murray, C, Jordan-Sweet, J, Priyadarshini, D, and Nguyen, S. Linking Strain Anisotropy and Plasticity in Copper Metallization. United States: N. p., 2015. Web. doi:10.1063/1.4919788.
Murray, C, Jordan-Sweet, J, Priyadarshini, D, & Nguyen, S. Linking Strain Anisotropy and Plasticity in Copper Metallization. United States. doi:10.1063/1.4919788.
Murray, C, Jordan-Sweet, J, Priyadarshini, D, and Nguyen, S. Tue . "Linking Strain Anisotropy and Plasticity in Copper Metallization". United States. doi:10.1063/1.4919788.
@article{osti_1229188,
title = {Linking Strain Anisotropy and Plasticity in Copper Metallization},
author = {Murray, C and Jordan-Sweet, J and Priyadarshini, D and Nguyen, S},
abstractNote = {},
doi = {10.1063/1.4919788},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = ,
volume = 106,
place = {United States},
year = {2015},
month = {5}
}