skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens

Abstract

Here, we report on the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using a sputtering deposition technique, in which a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization shows an efficiency of 27% and a focus size of 26 nm at 14.6 keV, in a good agreement with theoretical calculations. Our results indicate that the desired wedging is achieved in the fabricated structure. Furthermore, we anticipate that continuous development on wedged MLLs will advance x-ray nanofocusing optics to new frontiers and enrich capabilities and opportunities for hard X-ray microscopy.

Authors:
 [1];  [2];  [1];  [1];  [3];  [3];  [1];  [1];  [1];  [3];  [4];  [1];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
  3. Argonne National Lab. (ANL), Argonne, IL (United States)
  4. Univ. College London, Bloomsbury (United Kingdom); Research Complex at Harwell, Oxfordshire (United Kingdom)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1228901
Report Number(s):
BNL-110976-2015-JA
Journal ID: ISSN 1094-4087
DOE Contract Number:  
SC00112704
Resource Type:
Journal Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 23; Journal Issue: 10; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Huang, Xiaojing, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Macrander, Albert, Maser, Jorg, Yan, Hanfei, Nazaretski, Evgeny, Lauer, Kenneth, Harder, Ross, Robinson, Ian K., Kalbfleisch, Sebastian, and Chu, Yong S. Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens. United States: N. p., 2015. Web. doi:10.1364/OE.23.012496.
Huang, Xiaojing, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Macrander, Albert, Maser, Jorg, Yan, Hanfei, Nazaretski, Evgeny, Lauer, Kenneth, Harder, Ross, Robinson, Ian K., Kalbfleisch, Sebastian, & Chu, Yong S. Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens. United States. https://doi.org/10.1364/OE.23.012496
Huang, Xiaojing, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Macrander, Albert, Maser, Jorg, Yan, Hanfei, Nazaretski, Evgeny, Lauer, Kenneth, Harder, Ross, Robinson, Ian K., Kalbfleisch, Sebastian, and Chu, Yong S. 2015. "Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens". United States. https://doi.org/10.1364/OE.23.012496.
@article{osti_1228901,
title = {Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens},
author = {Huang, Xiaojing and Conley, Raymond and Bouet, Nathalie and Zhou, Juan and Macrander, Albert and Maser, Jorg and Yan, Hanfei and Nazaretski, Evgeny and Lauer, Kenneth and Harder, Ross and Robinson, Ian K. and Kalbfleisch, Sebastian and Chu, Yong S.},
abstractNote = {Here, we report on the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using a sputtering deposition technique, in which a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization shows an efficiency of 27% and a focus size of 26 nm at 14.6 keV, in a good agreement with theoretical calculations. Our results indicate that the desired wedging is achieved in the fabricated structure. Furthermore, we anticipate that continuous development on wedged MLLs will advance x-ray nanofocusing optics to new frontiers and enrich capabilities and opportunities for hard X-ray microscopy.},
doi = {10.1364/OE.23.012496},
url = {https://www.osti.gov/biblio/1228901}, journal = {Optics Express},
issn = {1094-4087},
number = 10,
volume = 23,
place = {United States},
year = {Mon May 04 00:00:00 EDT 2015},
month = {Mon May 04 00:00:00 EDT 2015}
}

Works referenced in this record:

Hard x-ray nanofocusing by multilayer Laue lenses
journal, June 2014


Phase zone plates for x rays and the extreme uv
journal, January 1974


Hard-X-ray Zone Plates: Recent Progress
journal, September 2012


Multilayer Laue lenses as high-resolution x-ray optics
conference, November 2004

  • Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
  • https://doi.org/10.1117/12.560046

Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens
journal, March 2006


Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens
journal, June 2008


Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses
journal, January 2011


11 nm hard X-ray focus from a large-aperture multilayer Laue lens
journal, December 2013


Depth-graded multilayers for application in transmission geometry as linear zone plates
journal, December 2005


Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device
journal, October 2008


Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam
journal, July 2010


Circular multilayer zone plate for high-energy x-ray nano-imaging
journal, January 2012


Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
journal, January 2013


Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling
journal, April 2013


Full-field X-ray microscopy with crossed partial multilayer Laue lenses
journal, January 2014


Quantitative x-ray phase imaging at the nanoscale by multilayer Laue lenses
journal, February 2013


Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture
journal, September 2007


Wedged multilayer Laue lens
journal, May 2008


Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope
journal, March 2013


Pushing the limits: an instrument for hard X-ray imaging below 20 nm
journal, January 2015


The NSLS-II multilayer Laue lens deposition system
conference, August 2009


Characterization of a multilayer Laue lens with imperfections
journal, November 2007

  • Yan, H.; Kang, H. C.; Maser, J.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 582, Issue 1
  • https://doi.org/10.1016/j.nima.2007.08.080

Design and performance of a scanning ptychography microscope
journal, March 2014


Timepix, a 65k programmable pixel readout chip for arrival time, energy and/or photon counting measurements
journal, October 2007

  • Llopart, X.; Ballabriga, R.; Campbell, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 581, Issue 1-2
  • https://doi.org/10.1016/j.nima.2007.08.079

Optimization of overlap uniformness for ptychography
journal, January 2014


High-Resolution Scanning X-ray Diffraction Microscopy
journal, July 2008


Works referencing / citing this record:

3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates
journal, June 2018


Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors
journal, November 2018


Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science
journal, March 2018


Point focusing with flat and wedged crossed multilayer Laue lenses
journal, February 2017


A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science
journal, August 2019


Zone Plates for X-Ray Focusing (Review)
journal, November 2017


Multi-slice ptychography with large numerical aperture multilayer Laue lenses
journal, January 2018


Multilayer Laue lenses at high x-ray energies: Performance and applications
text, January 2019


High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography
journal, January 2018


Multilayer Laue lenses at high X-ray energies: performance and applications
journal, January 2019


A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science
text, January 2019