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Title: H-treatment impact on conductive-filament formation and stability in Ta2O5-based resistive-switching memory cells

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4915946· OSTI ID:1228568
 [1];  [2];  [2];  [2];  [1];  [1]
  1. Imec, Kapeldreef 75, B-3001 Leuven, Belgium
  2. Department of Electrical Engineering, Stanford University, Stanford, California 94305, USA

Sponsoring Organization:
USDOE
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1228568
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Vol. 117 Journal Issue: 12; ISSN 0021-8979
Publisher:
American Institute of PhysicsCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 17 works
Citation information provided by
Web of Science

References (26)

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Asymmetry and Switching Phenomenology in TiN\(Al2O3)\HfO2\Hf Systems journal January 2012
Role of the anode material in the unipolar switching of TiN\NiO\Ni cells journal February 2013
Study of the atomic models of three donorlike defects in silicon metal‐oxide‐semiconductor structures from their gate material and process dependencies journal March 1984
Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set journal October 1996
From ultrasoft pseudopotentials to the projector augmented-wave method journal January 1999
On the Gradual Unipolar and Bipolar Resistive Switching of TiN\HfO[sub 2]\Pt Memory Systems journal January 2010
Three-dimensional 4F2 ReRAM cell with CMOS logic compatible process conference December 2010
An inelastic neutron scattering study of the proton dynamics in γ-MnO2 journal January 1991
10×10nm2 Hf/HfOx crossbar resistive RAM with excellent performance, reliability and low-energy operation conference December 2011
Hydrogen as a Cause of Doping in Zinc Oxide journal July 2000
Defects and transport properties of metal oxides journal August 1995
Impact of hydrogen on the electroforming of Pr0.7Ca0.3MnO3 resistance-change memory devices
  • Tendulkara, M. P.; Jameson, J. R.; Griffin, P. B.
  • 2009 10th Annual Non-Volatile Memory Technology Symposium (NVMTS 2009), 2009 10th Annual Non-Volatile Memory Technology Symposium (NVMTS) https://doi.org/10.1109/NVMT.2009.5429776
conference October 2009
Evidences of Electrode-Controlled Retention Properties in Ta2O5-Based Resistive-Switching Memory Cells journal January 2014
Oxide-based protonic conductors: point defects and transport properties journal December 2001
Reliability degradation of thin HfO2/SiO2 gate stacks by remote RF hydrogen and deuterium plasma treatment journal November 2008
Hydrogen-Induced Resistive Switching in TiN/ALD $ \hbox{HfO}_{2}$/PEALD TiN RRAM Device journal April 2012
Distribution of hydrogen in the NPL standard ta2O5 films journal July 1986
Conductive filament scaling of TaOx bipolar ReRAM for long retention with low current operation conference June 2012
A fast, high-endurance and scalable non-volatile memory device made from asymmetric Ta2O5−x/TaO2−x bilayer structures journal July 2011
Proton Conductivity:  Materials and Applications journal January 1996
Electronic correlation effects in reduced rutile TiO 2 within the LDA + U method journal September 2010
Electronic structure and stability of low symmetry Ta 2 O 5 polymorphs : Electronic structure and stability of low symmetry Ta journal May 2014
Concentration and transport of protons in oxides journal October 1997

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