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Title: Ion energies in high power impulse magnetron sputtering with and without localized ionization zones

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [3]; ORCiD logo [4]
  1. School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka-shi, Ibaraki 311-0102, Japan
  3. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Physics, University of California Berkeley, Berkeley, California 94720, USA
  4. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1226723
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 106 Journal Issue: 12; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Yang, Yuchen, Tanaka, Koichi, Liu, Jason, and Anders, André. Ion energies in high power impulse magnetron sputtering with and without localized ionization zones. United States: N. p., 2015. Web. doi:10.1063/1.4916233.
Yang, Yuchen, Tanaka, Koichi, Liu, Jason, & Anders, André. Ion energies in high power impulse magnetron sputtering with and without localized ionization zones. United States. doi:10.1063/1.4916233.
Yang, Yuchen, Tanaka, Koichi, Liu, Jason, and Anders, André. Mon . "Ion energies in high power impulse magnetron sputtering with and without localized ionization zones". United States. doi:10.1063/1.4916233.
@article{osti_1226723,
title = {Ion energies in high power impulse magnetron sputtering with and without localized ionization zones},
author = {Yang, Yuchen and Tanaka, Koichi and Liu, Jason and Anders, André},
abstractNote = {},
doi = {10.1063/1.4916233},
journal = {Applied Physics Letters},
number = 12,
volume = 106,
place = {United States},
year = {Mon Mar 23 00:00:00 EDT 2015},
month = {Mon Mar 23 00:00:00 EDT 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4916233

Citation Metrics:
Cited by: 7 works
Citation information provided by
Web of Science

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