Complex oxide growth using simultaneous in situ reflection high-energy electron diffraction and x-ray reflectivity: When is one layer complete?

Sullivan, M. C.; Ward, M. J.; Gutiérrez-Llorente, Araceli; Adler, Eli R.; Joress, H.; Woll, A.; Brock, J. D.

doi:10.1063/1.4906419

Title: Complex oxide growth using simultaneous in situ reflection high-energy electron diffraction and x-ray reflectivity: When is one layer complete?

Journal Article · Thu Jan 22 00:00:00 EST 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4906419· OSTI ID:1370412

Sullivan, M. C. ^[1]; Ward, M. J. ^[2]; Gutiérrez-Llorente, Araceli ^[3]; Adler, Eli R. ^[4];

^[5]; Woll, A. ^[2]; Brock, J. D. ^[6]

Ithaca College, Ithaca, NY (United States). Dept. of Physics and Astronomy; Cornell Univ., Ithaca, NY (United States). School of Applied and Engineering Physics
Cornell Univ., Ithaca, NY (United States). Cornell High Energy Synchrotron Source
Cornell Univ., Ithaca, NY (United States). School of Applied and Engineering Physics
Ithaca College, Ithaca, NY (United States). Dept. of Physics and Astronomy; Cornell Univ., Ithaca, NY (United States). Cornell High Energy Synchrotron Source
Cornell Univ., Ithaca, NY (United States). Cornell High Energy Synchrotron Source; Cornell Univ., Ithaca, NY (United States). Dept. of Materials Science and Engineering
Cornell Univ., Ithaca, NY (United States). School of Applied and Engineering Physics, and Cornell High Energy Synchrotron Source

During layer-by-layer homoepitaxial growth, both the Reflection High-Energy Electron Diffraction (RHEED) intensity and the x-ray reflection intensity will oscillate, and each complete oscillation indicates the addition of one monolayer of material. However, it is well documented, but not well understood, that the phase of the RHEED oscillations varies from growth to growth and thus the maxima in the RHEED intensity oscillations do not necessarily occur at the completion of a layer. Here, we demonstrate this by using simultaneous in situ x-ray reflectivity and RHEED to characterize layer-by-layer growth of SrTiO₃. We show that we can control the RHEED oscillation phase by changing the pre-growth substrate annealing conditions, changing the RHEED oscillation phase by as much as 137°. In addition, during growth via pulsed laser deposition, the relaxation times between each laser pulse can be used to determine when a layer is complete, independent of the phase of the RHEED oscillation.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Energy Materials Center at Cornell (EMC2)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001086

OSTI ID:: 1370412

Alternate ID(s):: OSTI ID: 1226700

Journal Information:: Applied Physics Letters, Vol. 106, Issue 3; Related Information: Emc2 partners with Cornell University (lead); Lawrence Berkeley National Laboratory; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 21 works

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Cited By (6)

In situ surface/interface x-ray diffractometer for oxide molecular beam epitaxy Lee, J. H.; Tung, I. C.; Chang, S. -H. Review of Scientific Instruments, Vol. 87, Issue 1 https://doi.org/10.1063/1.4939100	journal	January 2016
Chemically specific termination control of oxide interfaces via layer-by-layer mean inner potential engineering Sun, H. Y.; Mao, Z. W.; Zhang, T. W. Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-04903-4	journal	July 2018
Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies Andersen, Tassie K.; Cook, Seyoung; Benda, Erika Review of Scientific Instruments, Vol. 89, Issue 3 https://doi.org/10.1063/1.5008369	journal	March 2018
Quick X-ray reflectivity using monochromatic synchrotron radiation for time-resolved applications Joress, H.; Brock, J. D.; Woll, A. R. Journal of Synchrotron Radiation, Vol. 25, Issue 3 https://doi.org/10.1107/s1600577518003004	journal	April 2018
Thin film growth studies using time-resolved x-ray scattering Kowarik, Stefan Journal of Physics: Condensed Matter, Vol. 29, Issue 4 https://doi.org/10.1088/1361-648x/29/4/043003	journal	November 2016
Quick X-ray Reflectivity using Monochromatic Synchrotron Radiation for Time-Resolved Applications Joress, H.; Brock, J. D.; Woll, A. R. arXiv https://doi.org/10.48550/arxiv.1711.03183	text	January 2017

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