Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Rao, Ashutosh; Patil, Aniket; Chiles, Jeff; Malinowski, Marcin; Novak, Spencer; Richardson, Kathleen; Rabiei, Payam; Fathpour, Sasan

doi:10.1364/OE.23.022746

Title: Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Journal Article · Thu Aug 20 00:00:00 EDT 2015 · Optics Express

DOI:https://doi.org/10.1364/OE.23.022746· OSTI ID:1224859

Rao, Ashutosh ^[1]; Patil, Aniket ^[2]; Chiles, Jeff ^[1]; Malinowski, Marcin ^[1]; Novak, Spencer ^[3]; Richardson, Kathleen ^[3]; Rabiei, Payam ^[2]; Fathpour, Sasan ^[1]

Univ. of Central Florida, Orlando, FL (United States)
Partow Technologies LLC, Orlando, FL (United States)
Univ. of Central Florida, Orlando, FL (United States); Clemson Univ., Clemson, SC (United States)

In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge₂₃Sb₇S₇₀, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10⁵ quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.

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Research Organization:: Partow Technologies LLC, Orlando, FL (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: SC0013245

OSTI ID:: 1224859

Journal Information:: Optics Express, Vol. 23, Issue 17; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 98 works

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