Tunable cavity resonator including a plurality of MEMS beams

Peroulis, Dimitrios; Fruehling, Adam; Small, Joshua Azariah; Liu, Xiaoguang; Irshad, Wasim; Arif, Muhammad Shoaib

Title: Tunable cavity resonator including a plurality of MEMS beams

Patent · Tue Oct 20 00:00:00 EDT 2015

OSTI ID:1223688

Peroulis, Dimitrios; Fruehling, Adam; Small, Joshua Azariah; Liu, Xiaoguang; Irshad, Wasim; Arif, Muhammad Shoaib

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

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Research Organization:: Purdue Univ., West Lafayette, IN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC52-08NA28617

Assignee:: Purdue Research Foundation (West Lafayette, IN)

Patent Number(s):: 9,166,271

Application Number:: 13/908,201

OSTI ID:: 1223688

Resource Relation:: Patent File Date: 2013 Jun 03

Country of Publication:: United States

Language:: English

References (22)

A novel external electrode configuration for the electrostatic actuation of MEMS based devices Rosa, Michel A.; Bruyker, Dirk De; Völkel, Armin R. Journal of Micromechanics and Microengineering, Vol. 14, Issue 4 https://doi.org/10.1088/0960-1317/14/4/003	journal	January 2004
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology Rottenberg, X.; Brebels, S.; Ekkels, P. Journal of Micromechanics and Microengineering, Vol. 17, Issue 7 https://doi.org/10.1088/0960-1317/17/7/S19	journal	July 2007
Electrostatically tunable analog single crystal silicon fringing-field MEMS varactors Small, Joshua; Liu, Xiaoguang; Garg, Anurag 2009 Asia Pacific Microwave Conference - (APMC 2009) https://doi.org/10.1109/APMC.2009.5384164	conference	December 2009
A capacitively-loaded MEMS Slot element for wireless temperature sensing of up to 300°C Scott, Sean; Peroulis, Dimitrios 2009 IEEE MTT-S International Microwave Symposium Digest (MTT) https://doi.org/10.1109/MWSYM.2009.5165908	conference	June 2009
An inherently-robust 300°C MEMS temperature sensor for wireless health monitoring of ball and rolling element bearings Scott, Sean; Sadeghi, Farshid; Peroulis, Dimitrios 2009 IEEE Sensors https://doi.org/10.1109/ICSENS.2009.5398204	conference	October 2009
Non-contact electrostatic microactuator using slit structures: theory and a preliminary test Lee, Ki Bang Journal of Micromechanics and Microengineering, Vol. 17, Issue 11 https://doi.org/10.1088/0960-1317/17/11/004	journal	September 2007
A surface micromachined offset-drive method to extend the electrostatic travel range Su, J.; Yang, H.; Fay, P. Journal of Micromechanics and Microengineering, Vol. 20, Issue 1 https://doi.org/10.1088/0960-1317/20/1/015004	journal	November 2009
Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures Baek, Chang-Wook; Kim, Yong-Kweon; Ahn, Yoomin Sensors and Actuators A: Physical, Vol. 117, Issue 1, p. 17-27 https://doi.org/10.1016/j.sna.2003.11.041	journal	January 2005
Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions Pamidighantam, Sayanu; Puers, Robert; Baert, Kris Journal of Micromechanics and Microengineering, Vol. 12, Issue 4 https://doi.org/10.1088/0960-1317/12/4/319	journal	June 2002
VLSI circuit reconstruction from mask topology van der Meijs, N. P.; Fokkema, J. T. Integration, the VLSI Journal, Vol. 2, Issue 2, p. 85-119 https://doi.org/10.1016/0167-9260(84)90016-6	journal	June 1984
A fast high-Q X-band RF-MEMS reconfigurable evanescent-mode cavity resonator Small, Joshua; Irshad, Wasim; Peroulis, Dimitrios 2012 IEEE/MTT-S International Microwave Symposium - MTT 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest https://doi.org/10.1109/MWSYM.2012.6259649	conference	June 2012
Highly Loaded Evanescent Cavities for Widely Tunable High-Q Filters Joshi, Himanshu; Sigmarsson, Hjalti H.; Peroulis, Dimitrios 2007 IEEE/MTT-S International Microwave Symposium https://doi.org/10.1109/MWSYM.2007.380346	conference	June 2007
High-$Q$ Fully Reconfigurable Tunable Bandpass Filters Joshi, H.; Sigmarsson, H. H. IEEE Transactions on Microwave Theory and Techniques, Vol. 57, Issue 12 https://doi.org/10.1109/TMTT.2009.2034309	journal	December 2009
High Q narrow-band tunable filters with controllable bandwidth Joshi, Himanshu; Sigmarsson, Hjalti H. 2009 IEEE MTT-S International Microwave Symposium Digest (MTT) https://doi.org/10.1109/MWSYM.2009.5165775	conference	June 2009
Substrate Integrated Evanescent-Mode Cavity Filter With a 3.5 to 1 Tuning Ratio Moon, Sungwook; Sigmarsson, Hjalti H.; Joshi, Himanshu IEEE Microwave and Wireless Components Letters, Vol. 20, Issue 8 https://doi.org/10.1109/LMWC.2010.2050680	journal	August 2010
Tuning in to RF MEMS Rebeiz, Gabriel; Entesari, Kamran; Reines, Isak IEEE Microwave Magazine, Vol. 10, Issue 6 https://doi.org/10.1109/MMM.2009.933592	journal	October 2009
High-$Q$ RF-MEMS 4–6-GHz Tunable Evanescent-Mode Cavity Filter IEEE Transactions on Microwave Theory and Techniques, Vol. 58, Issue 2 https://doi.org/10.1109/TMTT.2009.2038448	journal	February 2010
High-$Q$ Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners Liu, Xiaoguang; Katehi, Linda P. B.; Chappell, William J. Journal of Microelectromechanical Systems, Vol. 19, Issue 4 https://doi.org/10.1109/JMEMS.2010.2055544	journal	August 2010
A 3.4 – 6.2 GHz Continuously tunable electrostatic MEMS resonator with quality factor of 460–530 2009 IEEE MTT-S International Microwave Symposium Digest (MTT) https://doi.org/10.1109/MWSYM.2009.5165905	conference	June 2009
Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors Stefanini, R.; Martinez, J. D.; Chatras, M. IEEE Microwave and Wireless Components Letters, Vol. 21, Issue 5 https://doi.org/10.1109/lmwc.2011.2126565	journal	May 2011
A high power (>5 W) temperature stable RF MEMS metal-contact switch with orthogonal anchors and force-enhancing stoppers Patel, Chirag D.; Rebeiz, Gabriel M. 2011 IEEE/MTT-S International Microwave Symposium - MTT 2011, 2011 IEEE MTT-S International Microwave Symposium https://doi.org/10.1109/MWSYM.2011.5972717	conference	June 2011
Low-Loss 4–6-GHz Tunable Filter With 3-Bit High-$Q$ Orthogonal Bias RF-MEMS Capacitance Network Park, S. -J.; El-Tanani, M. A.; Reines, I. IEEE Transactions on Microwave Theory and Techniques, Vol. 56, Issue 10 https://doi.org/10.1109/TMTT.2008.2003521	journal	October 2008

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