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Title: In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing

Abstract

A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

Inventors:
; ; ;
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1214585
Patent Number(s):
9,136,184
Application Number:
14/112,033
Assignee:
Alliance For Sustainable Energy, LLC (Golden, CO) NREL
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Feb 17
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY

Citation Formats

Li, Jian, Levi, Dean, Contreras, Miguel, and Glynn, Stephen. In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing. United States: N. p., 2015. Web.
Li, Jian, Levi, Dean, Contreras, Miguel, & Glynn, Stephen. In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing. United States.
Li, Jian, Levi, Dean, Contreras, Miguel, and Glynn, Stephen. Tue . "In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing". United States. doi:. https://www.osti.gov/servlets/purl/1214585.
@article{osti_1214585,
title = {In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing},
author = {Li, Jian and Levi, Dean and Contreras, Miguel and Glynn, Stephen},
abstractNote = {A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 15 00:00:00 EDT 2015},
month = {Tue Sep 15 00:00:00 EDT 2015}
}

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