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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Patent ·
OSTI ID:1209339
; ; ;

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-91ER45439
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
9,105,555
Application Number:
14/220,923
OSTI ID:
1209339
Resource Relation:
Patent File Date: 2014 Mar 20
Country of Publication:
United States
Language:
English

References (728)

Apparatus for fabricating self-assembling microstructures patent May 1999
GaN: Processing, defects, and devices journal July 1999
Compliant substrate technology: Integration of mismatched materials for opto-electronic applications journal January 2000
High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors journal March 2004
High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions journal May 2000
Nanopore Technology for Biomedical Applications journal February 1999
Template Synthesis of Electronically Conductive Polymer Nanostructures journal February 1995
High-Speed, High-Resolution Electrophysiology In-Vivo Using Conformal Electronics patent-application June 2012
Conformal contact and pattern stability of stamps used for soft lithography journal June 2000
Free standing single-crystal silicon microstructures journal March 1995
Carbon Nanotube Inter- and Intramolecular Logic Gates journal September 2001
Fabrication of periodic nanostructures by phase-controlled multiple-beam interference journal December 2003
Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes journal June 2000
Macroelectronics journal June 2006
Organic single-crystal field-effect transistors journal May 2004
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps journal February 2003
Organic TFT Array on a Paper Substrate journal October 2004
Method of making thin silicon sheets for solar cells patent January 2007
Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases journal December 1996
Porous silica via colloidal crystallization journal October 1997
Protective diamond-like carbon coatings for future optical storage disks journal March 2005
Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning journal April 2005
Single-crystalline gallium nitride nanobelts journal July 2002
On the aging of oxygen plasma-treated polydimethylsiloxane surfaces journal June 1990
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Luminescence Photophysics in Semiconductor Nanocrystals journal November 1998
Extreme bendability of single-walled carbon nanotube networks transferred from high-temperature growth substrates to plastic and their use in thin-film transistors journal June 2005
Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions journal March 1994
Apparatuses and methods for forming electronic assemblies patent December 2003
Semiconductor nanotube formation by a two-step template process journal October 1996
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856 https://doi.org/10.1116/1.1523405
journal September 2002
Temperature coefficient of the surface resistivity of two-dimensional island gold films journal September 2000
Composite patterning devices for soft lithography patent March 2007
Multispectral Plasmonic Crystal Sensors patent-application September 2008
Mechanical properties of silicones for MEMS journal April 2008
Arrays of ultrathin silicon solar microcells patent March 2014
Semiconductor wafer having a thin die and tethers and methods of making the same patent August 2003
A Rubberlike Stretchable Active Matrix Using Elastic Conductors journal September 2008
Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer journal May 1998
Nanoimprint lithography patent June 1998
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy journal September 2003
Pixel integrated circuit patent August 2003
Fabrication of submicrometer features on curved substrates by microcontact printing journal August 1995
Functionally symmetric integrated circuit die patent September 2001
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent June 2012
Optical systems fabricated by printing-based assembly patent May 2014
Optimal strategy for controlling linewidth on spherical focal surface arrays
  • Ruchhoeft, P.; Wolfe, J. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6, p. 3185-3189 https://doi.org/10.1116/1.1319842
journal January 2000
Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements journal October 2009
Synthesis of branched 'nanotrees' by controlled seeding of multiple branching events journal May 2004
Nanotube Molecular Wires as Chemical Sensors journal January 2000
Architectonic Quantum Dot Solids journal January 1999
Fabrication of photonic crystals for the visible spectrum by holographic lithography journal March 2000
Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon journal October 2004
Method for fabricating self-assembling microstructures patent August 1996
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
Mesoporous silica with micrometer-scale designs journal January 1997
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication journal December 2005
Printable semiconductor structures and related methods of making and assembling patent September 2010
Medium Scale Carbon Nanotube Thin Film Integrated Circuits on Flexible Plastic Substrates patent-application June 2011
Printable organic and polymeric semiconducting materials and devices journal January 1999
Stretchable semiconductor elements and stretchable electrical circuits patent July 2009
Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning patent-application January 2003
The formation of controlled-porosity membranes from anodically oxidized aluminium journal January 1989
High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction journal August 1993
High-power laser diodes based on InGaAsP alloys journal June 1994
Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration journal May 2005
A hemispherical electronic eye camera based on compressible silicon optoelectronics journal August 2008
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks journal April 2001
Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher journal January 1999
Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems journal March 2007
SEMICONDUCTOR NANOWIRES AND NANOTUBES journal August 2004
Heat-transfer-stamp process for thermal imprint lithography patent September 2005
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent June 2014
Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws journal October 2004
Soft lithographic fabrication of an image sensor array on a curved substrate
  • Jin, Hyun-Chul; Abelson, John R.; Erhardt, Martin K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 5, p. 2548-2551 https://doi.org/10.1116/1.1795249
journal October 2004
Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric journal June 2001
Low-Temperature Solution-Phase Synthesis of Quantum Well Structured CdSe Nanoribbons journal May 2006
System and method of transferring dies using an adhesive surface patent February 2005
Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures journal November 2004
Shape control of CdSe nanocrystals journal March 2000
Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
Soft Lithography journal August 1998
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics patent July 2012
Active matrix type display device and method of manufacturing the same patent-application April 2006
From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach journal November 2004
Etching of DLC films using a low intensity oxygen plasma jet journal April 2000
Alpha-particle protection of semiconductor devices patent August 1988
Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates journal July 2008
Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells journal October 2003
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate journal January 2004
Organic electronics on paper journal April 2004
Methods for transferring elements from a template to a substrate patent April 2003
High-Conductivity Elastomeric Electronics journal March 2004
Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns journal August 2005
Magnetic self-assembly of three-dimensional surfaces from planar sheets journal March 2005
Finite deformation mechanics in buckled thin films on compliant supports journal September 2007
Mechanisms of reversible stretchability of thin metal films on elastomeric substrates journal May 2006
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689 https://doi.org/10.1116/1.591259
journal April 2000
The Chemistry and Physics of Semiconductor Nanowires journal February 2005
Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method journal November 2002
Process for fabricating organic semiconductor device involving selective patterning patent June 2002
Thermal management of electronic components using synthetic diamond patent July 1997
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005
Microporous materials: Electrochemically grown photonic crystals journal December 1999
Gallium Oxide Nanoribbons and Nanosheets journal February 2002
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon journal December 1999
Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors journal August 2005
Multispectral plasmonic crystal sensors patent April 2010
Structures, systems and methods for joining articles and materials and uses therefor patent-application October 2004
Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics patent-application July 2008
Chemical Etching Characteristics of (001)GaAs journal January 1983
Ordering of microwrinkle patterns by compressive strain journal April 2004
Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer journal February 1986
Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication journal September 2005
Organic species that facilitate charge transfer to or from nanostructures patent-application September 2004
Diamond heat spreading and cooling technique for integrated circuits patent December 2003
Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors journal October 2004
Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics journal July 2002
Farewell to Flatland journal July 2010
Control of Thickness and Orientation of Solution-Grown Silicon Nanowires journal February 2000
High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film journal July 2001
Printable semiconductor structures and related methods of making and assembling patent March 2013
Planar nanowire based sensor elements, devices, systems and methods for using and making same patent-application July 2004
Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application March 2010
Stamp Collapse in Soft Lithography journal August 2005
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes journal February 1999
Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique journal May 2003
Low-Temperature Materials and Thin Film Transistors for Flexible Electronics journal August 2005
High-performance thin-film transistors using semiconductor nanowires and nanoribbons journal September 2003
Creating micro- and nanostructures on tubular and spherical surfaces
  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418 https://doi.org/10.1116/1.2804428
journal December 2007
Electronic devices with small functional elements supported on a carrier patent November 2004
Mixed Mode Cracking in Layered Materials book January 1991
Growth and properties of nanocrystalline diamond films journal October 2006
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components patent-application May 2008
High-performance organic thin-film transistors with metal oxide/metal bilayer electrode journal November 2005
Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites patent-application June 2004
Microstructural defect characterisation of a-Si:H deposited by low temperature HW-CVD on paper substrates journal April 2006
Thermal dissipation of integrated circuits using diamond paths patent May 1994
Electronics using hybrid-molecular and mono-molecular devices journal November 2000
High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes journal March 2007
Thermal interface with silver-filled carbon nanotubes patent December 2006
ZnO nanobelts grown on Si substrate journal July 2002
Advances in organic field-effect transistors journal November 2004
Method and apparatus for fabricating self-assembling microstructures patent March 2005
A printable form of silicon for high performance thin film transistors on plastic substrates journal June 2004
Wafer-level in-registry microstamping journal March 1999
Thin film transistors for displays on plastic substrates journal August 2000
Looking at Rubber Adhesion journal March 1979
Curved focal plane wide-field-of-view telescope design conference December 2002
Micromachined silicon suspended wires with submicrometric dimensions journal September 2001
Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787 https://doi.org/10.1021/ja0523791
journal August 2005
Aluminum metallization—Advantages and limitations for integrated circuit applications journal January 1969
Electrical contacts for flexible displays patent March 2005
Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices patent-application January 2004
Direct synthesis and characterization of CdS nanobelts journal July 2006
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components patent-application December 2011
Fabrication of strained heterojunction structures patent-application June 2006
Optimized Structural Designs for Stretchable Silicon Integrated Circuits journal December 2009
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer journal November 1999
Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras conference September 2004
Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits journal December 1971
High-speed mechanically flexible single-crystal silicon thin-film transistors on plastic substrates journal June 2006
Molecular control over Au/GaAs diodes journal March 2000
Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond journal April 2006
Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films journal June 2006
Nanowires for Integrated Multicolor Nanophotonics journal October 2004
Device Physics of Solution-Processed Organic Field-Effect Transistors journal October 2005
Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions journal August 2004
Apparatuses and methods for forming electronic assemblies patent March 2005
High Weight Fraction Surfactant Solubilization of Single-Wall Carbon Nanotubes in Water journal February 2003
Electronic paper: Flexible active-matrix electronic ink display journal May 2003
Methods and devices for fabricating and assembling printable semiconductor elements patent March 2014
High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper journal September 2008
Diamond-structured photonic crystals journal September 2004
Ambipolar Pentacene Field-Effect Transistors and Inverters journal February 2000
Web fabrication of devices patent January 2004
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates journal June 1998
Printable semiconductor structures and related methods of making and assembling patent October 2011
Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers journal December 1995
Flexible membrane pressure sensor journal April 2005
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks journal October 2004
Electrical Contacts to Molecular Layers by Nanotransfer Printing journal July 2003
Inorganic Semiconductors for Flexible Electronics journal August 2007
Diamond growth in a direct-current low-pressure supersonic plasmajet journal March 1997
High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities journal September 2005
RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology journal December 2007
Magnetoplasmadynamic apparatus for the separation and deposition of materials patent December 1984
4 W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader journal January 2006
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus journal October 2003
Release strategies for making transferable semiconductor structures, devices and device components patent April 2011
Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs patent August 2004
Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process journal March 2006
Lateral polysilicon p+–p–n+ and p+–n–n+ diodes journal April 2003
A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application December 2006
Fabrication of Ordered Diamond/metal Nanocomposite Structures journal October 2000
Multi-feature-size electronic structures patent August 2003
Methods and devices for fabricating and assembling printable semiconductor elements patent July 2011
Electrical Characterization of Polymer-Based FETs Fabricated by Spin-Coating Poly(3-alkylthiophene)s journal November 2004
Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics journal January 2007
Ultrahigh-Density Nanowire Lattices and Circuits journal March 2003
Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics journal April 1995
Organic light-emitting diodes formed by soft contact lamination journal January 2004
Over 30% efficient InGaP/GaAs tandem solar cells journal January 1997
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Conductor geometry for electronic circuits fabricated on flexible substrates patent December 2009
Rubber Stamping for Plastic Electronics and Fiber Optics journal July 2001
Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics journal July 2005
Metal–insulator–semiconductor electrostatics of carbon nanotubes journal August 2002
Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator journal March 1994
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics journal January 1978
Appendage Mountable Electronic Devices COnformable to Surfaces patent-application December 2013
A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications journal June 2004
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
From Micro- to Nanofabrication with Soft Materials journal November 2000
Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics journal July 2008
The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing journal October 2004
Polymer-Polymer Phase Behavior journal February 1991
Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI.sub.2 chalcopyrite compounds patent July 1983
Methods and devices for fabricating and assembling printable semiconductor elements patent May 2013
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Adherence, friction and wear of rubber-like materials journal October 1992
Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp patent May 2011
Structures, systems and methods for joining articles and materials and uses therefor patent-application December 2004
Transient devices designed to undergo programmable transformations patent-application June 2013
High Resolution Printing of Charge patent-application July 2011
Interconnect structure for electronic devices patent February 2004
Double-metal background driven displays patent July 2003
Stretchable and foldable electronic devices patent October 2013
Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants journal October 2003
Method for fabricating self-assembling microstructures patent July 1998
Stretchable semiconductor elements and stretchable electrical circuits patent-application February 2006
Controlled growth of tetrapod-branched inorganic nanocrystals journal May 2003
Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond journal April 2005
Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes journal May 2002
Method for forming thermal oxide film of silicon carbide semiconductor device patent July 2001
High resolution sensing and control of electrohydrodynamic jet printing patent October 2013
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics journal December 2004
Oriented nanostructures and methods of preparing patent-application July 2004
Block copolymers as photonic bandgap materials journal November 1999
An Integrated Logic Circuit Assembled on a Single Carbon Nanotube journal March 2006
A family of herringbone patterns in thin films journal March 2004
Stiff subcircuit islands of diamondlike carbon for stretchable electronics journal July 2006
Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP) journal January 2005
Trench etch process for a single-wafer RIE dry etch reactor patent November 1988
Silicon nanowire devices journal April 2000
Direct observation of electron emission site on boron-doped polycrystalline diamond thin films using an ultra-high-vacuum scanning tunneling microscope journal November 1999
Bending experiment on pentacene field-effect transistors on plastic films journal February 2005
Quantifying distortions in soft lithography
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97 https://doi.org/10.1116/1.589841
journal June 1998
High efficiency GaAs thin film solar cells by peeled film technology journal December 1978
Emerging Methods for Micro- and Nanofabrication journal July 2001
Coating system transparent to light and reflecting thermal radiation patent November 1999
Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems journal March 2003
Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327 https://doi.org/10.1116/1.1520554
journal September 2002
Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication journal September 1996
Methods of positioning and/or orienting nanostructures patent March 2005
Electronic Textiles Charge Ahead journal August 2003
Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing journal February 1998
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Plastic transistors in active-matrix displays journal December 2001
Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays journal November 2002
Biaxially Stretchable “Wavy” Silicon Nanomembranes journal June 2007
Nanolithography based on patterned metal transfer and its application to organic electronic devices journal May 2002
High-Resolution Inkjet Printing of All-Polymer Transistor Circuits journal December 2000
Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique journal August 2004
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68 https://doi.org/10.1116/1.589836
journal June 1998
Composite patterning devices for soft lithography patent-application October 2005
High-Field Electrical Transport in Single-Wall Carbon Nanotubes journal March 2000
Nanotechnology: Thin solid films roll up into nanotubes journal March 2001
Stretchable wavy metal interconnects
  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725 https://doi.org/10.1116/1.1756879
journal July 2004
Radio frequency analog electronics based on carbon nanotube transistors journal January 2008
Methods of making spatially aligned nanotubes and nanotube arrays patent February 2013
Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals journal April 2004
Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography journal August 2004
Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts journal July 2006
Microassembly of semiconductor three-dimensional photonic crystals journal January 2003
Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks journal August 2004
Single-Crystal CdSe Nanosaws journal December 2003
Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment journal October 2002
Simple Detachment Patterning of Organic Layers and Its Application to Organic Light-Emitting Diodes journal January 2005
Deformable organic devices patent-application August 2006
Optics: Electronic eyeballs journal August 2008
Disposing method for semiconductor elements patent April 2004
Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition journal April 2004
Nanomaterial transfer using hot embossing for flexible electronic devices journal February 2006
Embedded thermal conductors for semiconductor chips patent September 1999
Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates journal February 1999
Formation and characterization of silicon films on flexible polymer substrates journal April 2005
High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond journal September 2002
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates journal February 2002
Materials, Electronic Systems And Modes For Active And Passive Transience patent-application October 2014
Conformal diamond coating for thermal improvement of electronic packages patent May 1999
Synthesis and Optical Properties of CdS Nanoribbons journal October 2005
Fabrication of Metal Nanowires Using Microcontact Printing journal July 2003
Nanowire heterostructures for encoding information patent-application February 2004
Low emitter resistance contacts to GaAs high speed HBT patent December 2003
Nonlinear analyses of wrinkles in a film bonded to a compliant substrate journal September 2005
Flexible active-matrix displays and shift registers based on solution-processed organic transistors journal January 2004
Self-aligned self-assembly process for fabricating organic thin-film transistors journal September 2004
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing journal September 2003
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching journal October 1993
Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching journal February 1999
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors journal November 2004
Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits journal April 2004
High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers journal July 2006
Method of utilizing a contact printing stamp patent May 2008
High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates journal November 2003
Arrays of Ultrathin Silicon Solar Microcells patent-application August 2014
PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors journal October 2005
Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials journal December 2006
Heterogeneous materials integration: compliant substrates to active device and materials packaging journal December 2001
Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design journal February 1998
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals journal March 2004
All-Polymer Field-Effect Transistor Realized by Printing Techniques journal September 1994
Cooling system for a semiconductor device and method of fabricating same patent January 2007
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
All-Inorganic Field Effect Transistors Fabricated by Printing journal October 1999
A buckling-based metrology for measuring the elastic moduli of polymeric thin films journal July 2004
Crystallographic alignment of high-density gallium nitride nanowire arrays journal July 2004
AlGaN/GaN HEMTs-an overview of device operation and applications journal June 2002
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots journal July 2003
Fabrication of solid-state nanopores with single-nanometre precision journal July 2003
An Orientation-Controlled Pentacene Film Aligned by Photoaligned Polyimide for Organic Thin-Film Transistor Applications journal August 2004
Integrated circuit packages assembled utilizing fluidic self-assembly patent July 2002
Strained semiconductor by full wafer bonding patent-application January 2005
Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology journal December 2003
Backplanes for display applications, and components for use therein patent October 2006
Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics journal October 2004
Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates journal September 2005
Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane) journal March 2007
Bipolar transistor with lattice matched base layer patent March 2007
A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques journal October 2006
Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN journal August 2002
Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport journal January 2003
AlGaAs or InGaP low turn-on voltage GaAs-based heterojunction bipolar transistor patent July 2005
Colloidal nanocrystal synthesis and the organic–inorganic interface journal September 2005
Mechanically Strained Strained-Si NMOSFETs journal January 2004
Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane) journal February 2004
One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise journal April 2005
Surface mount and flip chip technology with diamond film passivation for total integated circuit isolation patent June 1998
Flexible electronic assembly patent-application February 2008
Devices and methods for pattern generation by ink lithography patent-application March 2008
Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution journal October 2005
Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors journal October 1997
Electric Field Effect in Atomically Thin Carbon Films journal October 2004
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent April 2009
GaAs Readied for High-Speed Microcircuits journal January 1983
Release strategies for making transferable semiconductor structures, devices and device components patent November 2014
Complementary carbon nanotube-gated carbon nanotube thin-film transistor journal February 2006
Fully elastic interconnects on nanopatterned elastomeric substrates journal August 2006
Apparatuses and methods for flexible displays patent February 2005
Guided molecular self-assembly: a review of recent efforts journal March 2003
Method and apparatus for fabricating self-assembling microstructures patent October 1998
Direct-connect signaling system patent-application December 2003
Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables journal January 1979
Shape-and-solder-directed self-assembly to package semiconductor device segments journal October 2004
Inkjet Printing of Polymers: State of the Art and Future Developments journal February 2004
Stars and stripes. Nanoscale misfit dislocation patterns on surfaces journal January 2002
Nanoscale Science and Technology: Building a Big Future from Small Things journal July 2003
Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays patent October 2014
Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap journal June 2003
Methods and apparatuses for improved flow in performing fluidic self assembly patent March 2003
Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application April 2013
High-Performance Plastic Transistors Fabricated by Printing Techniques journal June 1997
Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy journal August 1991
Large area solar cell extended life interconnect patent November 2000
Methods of forming two-sided HDMI interconnect structures patent November 1997
Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography journal April 2003
A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates journal January 2006
Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires journal February 2002
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Mechanical resistance of a single-crystal silicon wafer patent June 2003
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films journal September 2004
Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment journal April 2006
Solution–Liquid–Solid Growth of Soluble GaAs Nanowires journal March 2003
High pressure–high temperature growth of diamond crystals using split sphere apparatus journal November 2005
A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering journal July 2003
On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors journal October 2004
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions journal December 2003
Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics patent-application December 2012
Structures of indium oxide nanobelts journal October 2003
Screen printed organic thin film transistors (OTFTs) on a flexible substrate conference December 2001
Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors journal November 2005
Morphology of nanostructured materials journal January 2002
Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification journal August 1998
High on-state breakdown heterojunction bipolar transistor patent-application March 2006
Amorphous silicon crystallization and polysilicon thin film transistors on SiO2 passivated steel foil substrates journal May 2001
Tailored Micropatterns through Weak Polyelectrolyte Stamping journal March 2003
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy journal December 2002
Optical Component Array Having Adjustable Curvature patent-application October 2012
Vertical Etching of Silicon at very High Aspect Ratios journal August 1979
Methods for fabricating a multiple modular assembly patent November 2001
Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate journal March 2006
Flexible displays patent October 2003
Stretchable and Foldable Electronic Devices patent-application July 2010
Patterning of diamond microstructures on Si substrate by bulk and surface micromachining journal January 2003
Ink-Jet Printing of Binders for Ceramic Components journal April 2002
Nanotubes of the disulfides of groups 4 and 5 metals journal January 2002
Thin-film GaAs epitaxial lift-off solar cells for space applications
  • Schermer, J. J.; Mulder, P.; Bauhuis, G. J.
  • Progress in Photovoltaics: Research and Applications, Vol. 13, Issue 7, p. 587-596 https://doi.org/10.1002/pip.616
journal April 2005
An Elastically Stretchable TFT Circuit journal December 2004
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates journal February 2005
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices journal April 2005
Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires journal May 2001
Electric-field assisted assembly and alignment of metallic nanowires journal August 2000
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution journal August 2004
Scalable Interconnection and Integration of Nanowire Devices without Registration journal May 2004
Waterproof stretchable optoelectronics patent-application June 2012
Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production journal August 2005
Stretchable Interconnects for Elastic Electronic Surfaces journal August 2005
Mechanism for stamp collapse in soft lithography journal December 2005
Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon journal January 2002
Nanotechnology: High-speed integrated nanowire circuits journal April 2005
Free-standing Single Crystal Silicon Nanoribbons journal November 2001
Toward Paperlike Displays journal February 2001
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination journal July 2002
Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation journal October 2002
Method and apparatus for transferring blocks patent May 2004
III–nitrides: Growth, characterization, and properties journal February 2000
Measurement of nanomechanical resonant structures in single-crystal silicon
  • Carr, D. W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824 https://doi.org/10.1116/1.590416
journal December 1998
Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications journal January 2002
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application July 2014
Sequential shape-and-solder-directed self-assembly of functional microsystems journal August 2004
Flexible a-Si:H Position-Sensitive Detectors journal July 2005
Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns journal November 2004
Attachment method for assembly of high density multiple interconnect structures patent December 1999
Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography journal April 2000
Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
Thermally Managed LED Arrays Assembled by Printing patent-application December 2012
High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates journal July 2005
Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process journal May 2003
Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper journal September 2009
Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates journal November 2006
Vapor-liquid-solid mechanism of single crystal growth journal March 1964
Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications journal November 2003
Inkjet Printing of Functional Materials journal November 2003
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal March 2003
Conformable Actively Multiplexed High-Density Surface Electrode Array for Brain Interfacing patent-application March 2013
High-mobility polymer gate dielectric pentacene thin film transistors journal November 2002
Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires journal January 2005
Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off journal July 2006
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application November 2010
Holographic photonic crystals with diamond symmetry journal November 2003
Diamond film structure with high thermal conductivity patent June 1996
Application of carbon nanotubes to field emission displays journal February 2001
Analog and digital circuits using organic thin-film transistors on polyester substrates journal November 2000
3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration journal May 2001
High-κ dielectrics for advanced carbon-nanotube transistors and logic gates journal November 2002
One-dimensional hole gas in germanium/silicon nanowire heterostructures journal July 2005
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Polysilicon pillar heat sinks for semiconductor on insulator circuits patent June 2000
Extraordinary Mobility in Semiconducting Carbon Nanotubes journal January 2004
Collapse of stamps for soft lithography due to interfacial adhesion journal April 2005
Stretchable interconnects using stress gradient films patent June 2004
Printed plastic electronics and paperlike displays journal August 2002
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth journal December 1995
Method of manufacturing semiconductor device patent-application November 2005
Stretchable and Foldable Silicon Integrated Circuits journal April 2008
Room-Temperature Ultraviolet Nanowire Nanolasers journal June 2001
Thermal interface material with carbon nanotubes patent August 2007
Stretchable interconnects using stress gradient films patent-application July 2002
Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons journal October 2005
Spherical deformation of compliant substrates with semiconductor device islands journal January 2004
Photonic Band Gap Architectures for Holographic Lithography journal January 2004
Nature of electrical contacts in a metal–molecule–semiconductor system
  • Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935 https://doi.org/10.1116/1.1588641
journal March 2003
Stamp for a lithographic process patent October 1998
Electro-optic displays, and methods for driving same patent September 2005
Cooling system for a semiconductor device and method of fabricating same patent April 2006
Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes journal October 2004
Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films journal January 2002
Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp patent-application August 2009
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication journal May 2002
Effects of Mechanical Strain on TFTs on Spherical Domes journal March 2004
High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach journal January 2003
Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays journal September 2001
Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics journal November 2007
Improved field emission properties from metal-coated diamond films journal March 2007
Electrically Induced Optical Emission from a Carbon Nanotube FET journal May 2003
Stability of molded polydimethylsiloxane microstructures journal January 1997
Highly Bendable, Transparent Thin-Film Transistors That Use Carbon-Nanotube-Based Conductors and Semiconductors with Elastomeric Dielectrics journal February 2006
Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains journal October 1995
Conducting elastomer surface texturing: a path to electrode spotting journal September 2004
Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field journal May 1997
Web process interconnect in electronic assemblies patent October 2002
Logic Circuits with Carbon Nanotube Transistors journal October 2001
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Sharp exciton emission from single InAs quantum dots in GaAs nanowires journal September 2003
Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes journal March 1998
A review of 3-D packaging technology
  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14 https://doi.org/10.1109/96.659500
journal February 1998
Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof patent August 2001
The path to ubiquitous and low-cost organic electronic appliances on plastic journal April 2004
Ge/Si nanowire heterostructures as high-performance field-effect transistors journal May 2006
In-line fabrication of curved surface transistors patent-application June 2006
Process for producing a semiconductor device having a single thermal oxidizing step patent June 1999
Fabrication of a Cylindrical Display by Patterned Assembly journal April 2002
Effect of mismatch strain on band gap in III‐V semiconductors journal June 1985
Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles journal November 2002
Control of Si Nanowire Growth by Oxygen journal June 2006
Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems journal September 2003
Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors journal September 2005
Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays journal December 2000
Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate journal April 2004
Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits journal January 2005
Methods for creating elements of predetermined shape and apparatuses using these elements patent July 2002
Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations journal November 2008
Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates journal November 2002
Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices journal April 2006
Full panel electronic packaging structure and method of making same patent August 1988
Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers journal December 2004
Oxide-Assisted Growth of Semiconducting Nanowires journal April 2003
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components patent-application July 2011
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors journal October 2006
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Diamond semiconductor technology for RF device applications journal July 2005
Flexible and Stretchable Electronic Systems for Epidermal Electronics patent-application February 2013
Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature journal February 2005
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application February 2007
Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure journal December 2002
Improved Pattern Transfer in Soft Lithography Using Composite Stamps journal June 2002
III–V micromachined devices for microsystems journal September 1998
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
Compliant thin film patterns of stiff materials as platforms for stretchable electronics journal December 2005
Surface mountable flexible interconnect patent July 1999
Stretchable and elastic interconnects patent-application September 2004
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application March 2010
Surface-induced structure formation of polymer blends on patterned substrates journal February 1998
Weave Patterned Organic Transistors on Fiber for E-Textiles journal February 2005
Apparatus relating to block configurations and fluidic self-assembly processes patent December 2003
Silicon for thin-film transistors journal April 2003
Printable, flexible and stretchable diamond for thermal management patent June 2013
Implantable Biomedical Devices on Bioresorbable Substrates patent-application June 2014
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors journal October 1999
Imprint lithography utilizing room temperature embossing patent November 2004
Applications book January 1991
Stretchable gold conductors on elastomeric substrates journal April 2003
Nanoribbon Waveguides for Subwavelength Photonics Integration journal August 2004
Mountable microstructure and optical transmission apparatus patent May 2004
Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire journal April 2005
The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors journal July 2005
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers journal May 2006
Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon journal May 2007
Nanocomposites patent-application May 2004
Method of fabrication of stacked semiconductor devices patent January 2006
Manufacturing method for electric device patent-application April 2004
Electronic skin: architecture and components journal November 2004
Large area, high resolution, dry printing of conducting polymers for organic electronics journal January 2003
Controlled buckling of semiconductor nanoribbons for stretchable electronics journal December 2006
Medical device applications of nanostructured surfaces patent-application February 2005
Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces† journal October 2005
Templated Self-Assembly: Formation of Folded Structures by Relaxation of Pre-stressed, Planar Tapes journal March 2005
Organic and polymer transistors for electronics journal April 2006
Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives journal May 1991
Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography journal March 2003
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Field emission from carbon nanotubes for displays journal April 2000
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers journal October 1998
Methods and devices for fabricating and assembling printable semiconductor elements patent November 2009
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Nanowire Transistor Performance Limits and Applications journal November 2008
An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors journal July 1992
Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly journal August 2005
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores journal June 2003
Ballistic carbon nanotube field-effect transistors journal August 2003
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
Strained semiconductor by full wafer bonding patent-application November 2006
Stretchable Electronic Systems With Fluid Containment patent-application August 2014
Evaluation of polydimethylsiloxane scaffolds with physiologically-relevant elastic moduli: interplay of substrate mechanics and surface chemistry effects on vascular smooth muscle cell response journal June 2005
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
The Adhesion Between Polymers journal August 1991
Field-Effect Mobility of Organic Polymer Thin-Film Transistors journal October 2004
Micro-lens arrays for display intensity enhancement patent January 2006
Electrospinning of Nanofibers: Reinventing the Wheel? journal July 2004
Ordering of Spontaneously Formed Buckles on Planar Surfaces journal April 2000
Patterning organic–inorganic thin-film transistors using microcontact printed templates journal November 2001
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903 https://doi.org/10.1021/ja047451u
journal August 2004
Trench etch process for a single-wafer RIE dry etch reactor patent August 1989
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Large Area Submicrometer Contact Printing Using a Contact Aligner journal June 2000
The mechanics of electronic materials journal September 1999
Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC journal September 2004
An improved GaAs device model for the simulation of analog integrated circuit journal May 2003
Semiconductor device and method of manufacturing the same patent-application May 2003
Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters journal July 1996
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Large-scale complementary integrated circuits based on organic transistors journal February 2000
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Micromachining on (111)-oriented silicon journal June 1999
Towards woven logic from organic electronic fibres journal April 2007
Cheap and cheerful circuits journal September 2000
InGaN nanorings and nanodots by selective area epitaxy journal October 2005
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
Diamond heat spreading and cooling technique for integrated circuits patent November 2006
Methods and devices for fabricating three-dimensional nanoscale structures patent April 2010
Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films journal February 2006
Nanostructured advanced materials. Perspectives and directions journal January 2002
Plastic Electronics and Their Packaging Technologies journal April 2003
An elastomeric conductor based on polyaniline prepared by mechanical mixing journal September 1999
Macroelectronics: Perspectives on Technology and Applications journal July 2005
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Magnetoplasmadynamic apparatus and process for the separation and deposition of materials patent September 1984
Mold release layer transferring film and laminate film patent August 2007
Printing Patterns of Proteins journal April 1998
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates journal July 2003
High Frequency Properties of Electro-Textiles for Wearable Antenna Applications journal February 2008
Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties journal December 2000
Low-voltage organic transistors with an amorphous molecular gate dielectric journal October 2004
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
Nanostructure and nanocomposite based compositions and photovoltaic devices patent April 2005
Amorphous Si TFTs on plastically deformed spherical domes journal April 2002
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
Screen printing for the fabrication of organic light-emitting devices journal January 2001
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Nanobelts of Semiconducting Oxides journal March 2001
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Optimization, Constraint, and History in the Evolution of Eyes journal September 1990
Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts journal January 2003
Electric microcontact printing method and apparatus patent-application September 2003
Preparation of Macroporous Metal Films from Colloidal Crystals journal September 1999
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997
Preferred methods for producing electrical circuit elements used to control an electronic display patent July 2002
Directed Assembly of One-Dimensional Nanostructures into Functional Networks journal January 2001
Mesoscale organization of metal nanocrystals journal January 2002
Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures journal July 2004
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation journal January 2003
Low-voltage and high-field-effect mobility organic transistors with a polymer insulator journal February 2006
Graded base GaAsSb for high speed GaAs HBT patent August 2004
Non-Contact Transfer Printing patent-application February 2013
Invention of the integrated circuit journal July 1976
Step and flash imprint lithography patent January 2002
Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates journal November 2004
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Deformable organic devices patent-application October 2005
Variation in the effective richardson constant of metal—GaAs and Metal—InP contacts due to the effect of processing parameters journal November 1993
Degradation mechanism of diethylene glycol units in a terephthalate polymer journal April 2006
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
Laser-lithography on non-planar surfaces journal January 2007
Method for plasma deposition on apertured substrates patent April 1993
Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD journal September 2001
High-performance all-polymer integrated circuits journal September 2000
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Direct Observation of Vapor−Liquid−Solid Nanowire Growth journal April 2001
Integrated circuit packages assembled utilizing fluidic self-assembly patent May 2003
Electronic transport in nanometre-scale silicon-on-insulator membranes journal February 2006
Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons journal March 2005
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy journal March 2004
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Methods for creating elements of predetermined shape and apparatus using these elements patent July 2003
Contact Electrification and Adhesion Between Dissimilar Materials journal April 1992
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) journal June 2002
Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown journal April 2001
High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems patent-application August 2011
Finer features for functional microdevices journal August 2001
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling journal March 2008
Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper journal January 2009
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Method for preventing distortions in a flexibly transferred feature pattern patent December 2003
Method of selective removal of SiGe alloys patent May 2005
Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays journal April 1997
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics patent May 2014
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
High-Efficiency Multijunction Solar Cells journal March 2007
Organic species that facilitate charge transfer to or from nanostructures patent September 2005
Electronic materials: Buckling down for flexible electronics journal December 2006
Testing integrated circuit dice patent April 2002
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Displays combining active and non-active inks patent October 2002
Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers journal November 2000
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Methods to fabricate thin film transistors and circuits patent May 2001
Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays patent-application December 2010
The Incredible Shrinking Circuit journal September 2001
Optical systems fabricated by printing-based assembly patent July 2011
Single crystal silicon arrayed devices with optical shield between transistor and substrate patent November 2001
Semiconductor Clusters, Nanocrystals, and Quantum Dots journal February 1996
Heat spreader and semiconductor device and package using the same patent June 2006
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
High-Resolution Contact Printing with Dendrimers journal April 2002
Stress focusing for controlled fracture in microelectromechanical systems journal February 2007
Elastically relaxed free-standing strained-silicon nanomembranes journal April 2006
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application December 2009
The rise of graphene journal March 2007
Process to pattern thick TiW metal layers using uniform and selective etching patent-application September 2004
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Split-fabrication for light emitting display structures patent January 2005
Implantable biomedical devices on bioresorbable substrates patent March 2014
Optical Systems Fabricated by Printing-based Assembly patent-application November 2010
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks journal August 2004
Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications patent-application December 2003
Biological applications of high aspect ratio nanoparticles journal January 2004
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
Apparatuses and methods used in forming assemblies patent August 2001
Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings patent November 2002
InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications journal March 1991
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
Methods for forming assemblies patent August 2001
Methods and devices for fabricating three-dimensional nanoscale structures patent-application December 2006
Transient Electronic Devices Comprising Inorganic Or Hybrid Inorganic And Organic Substrates And Encapsulates patent-application October 2014
Flexible display designed for minimal mechanical strain patent-application June 2006
Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile journal June 2003
Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry journal April 2002
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices journal September 2005
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates journal April 2005
Angular displacement sensors patent February 1992
Methods and apparatus for fluidic self assembly patent September 2003
Molecule-Mimetic Chemistry and Mesoscale Self-Assembly journal December 2000

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