Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Journal Article · Sat Jan 01 00:00:00 EST 2011 · International Journal of Optics

DOI:https://doi.org/10.1155/2011/902158· OSTI ID:1198047

Qian, Shinan ^[1]

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1. Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USA

Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of $\sim$ 1  $\mu$ rad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.

• Sponsoring Organization: USDOE
• Grant/Contract Number: AC02-98CH10886
• OSTI ID: 1198047
• Journal Information: International Journal of Optics, Journal Name: International Journal of Optics Vol. 2011; ISSN 1687-9384
• Publisher: Hindawi Publishing Corporation
• Country of Publication: Country unknown/Code not available
• Language: English