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Title: Zone compensated multilayer laue lens and apparatus and method of fabricating the same

Patent ·
OSTI ID:1193313

A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90.degree. as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-98CH10886
Assignee:
Brookhaven Science Associates, LLC (Upton, NY)
Patent Number(s):
9,082,522
Application Number:
13/515,780
OSTI ID:
1193313
Resource Relation:
Patent File Date: 2010 Dec 13
Country of Publication:
United States
Language:
English

References (5)

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses patent October 2009
Sectioning of multilayers to make a multilayer Laue lens journal January 2007
11 nm hard X-ray focus from a large-aperture multilayer Laue lens journal December 2013
Wedged multilayer Laue lens journal May 2008
The NSLS-II multilayer Laue lens deposition system conference August 2009