System for monitoring the growth of crystalline films on stationary substrates
A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and converting the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triaxial cable for improving the signal-to-noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement. 16 figs.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-83CH10093
- Assignee:
- Midwest Research Inst., Kansas City, MO (United States)
- Patent Number(s):
- US 5,456,205/A/
- Application Number:
- PAN: 8-069,405
- OSTI ID:
- 119048
- Resource Relation:
- Other Information: PBD: 10 Oct 1995
- Country of Publication:
- United States
- Language:
- English
Similar Records
System for monitoring the growth of crystalline films on stationary substrates
System for monitoring the growth of crystalline films on stationary substrates