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Title: All-dielectric metasurface analogue of electromagnetically induced transparency [High Quality Factor Fano-Resonant All-Dielectric Metamaterials]

Journal Article · · Nature Communications
DOI:https://doi.org/10.1038/ncomms6753· OSTI ID:1185509
 [1];  [2];  [2];  [3]
  1. Vanderbilt Univ., Nashville, TN (United States). Interdisciplinary Materials Science Program
  2. Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
  3. Vanderbilt Univ., Nashville, TN (United States). Dept. of Mechanical Engineering

Fano-resonant plasmonic metamaterials and nanostructures have become a major focus of the nanophotonics fields over the past several years due their ability to produce high quality factor (Q-factor) resonances. The origin of such resonances is the interference between a broad and narrow resonance, ultimately allowing suppression of radiative damping. However, Fano-resonant plasmonic structures still suffer non-radiative damping due to Ohmic loss, ultimately limiting the achievable Q-factors to values less than ~10. Here, we report experimental demonstration of Fano-resonant silicon-based metamaterials that have a response that mimics the electromagnetically induced transparency (EIT) found in atomic systems. Due to extremely low absorption loss, a record-high quality factor (Q-factor) of 306 was experimentally observed. Furthermore, the unit cell of the metamaterial was designed with a feed-gap which results in strong local field enhancement in the surrounding medium resulting in strong light-matter interaction. This allows the metamaterial to serve as a refractive index sensor with a figure-of-merit (FOM) of 101, far exceeding the performance of previously demonstrated localized surface plasmon resonance sensors.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
1185509
Journal Information:
Nature Communications, Vol. 5; ISSN 2041-1723
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 663 works
Citation information provided by
Web of Science

References (44)

Electromagnetically Induced Transparency journal July 1997
Plasmon-Induced Transparency in Metamaterials journal July 2008
Metamaterial Analog of Electromagnetically Induced Transparency journal December 2008
Fano Resonances in Individual Coherent Plasmonic Nanocavities journal April 2009
Coupling between a dark and a bright eigenmode in a terahertz metamaterial journal February 2009
Low-Loss Metamaterials Based on Classical Electromagnetically Induced Transparency journal February 2009
Plasmonic analogue of electromagnetically induced transparency at the Drude damping limit journal July 2009
Three-Dimensional Plasmon Rulers journal June 2011
Electromagnetically induced transparency in terahertz plasmonic metamaterials via dual excitation pathways of the dark mode journal March 2012
Active control of electromagnetically induced transparency analogue in terahertz metamaterials journal January 2012
Experimental Realization of an On-Chip All-Optical Analogue to Electromagnetically Induced Transparency journal March 2006
All-Optical Analog to Electromagnetically Induced Transparency in Multiple Coupled Photonic Crystal Cavities journal April 2009
Planar Metamaterial Analogue of Electromagnetically Induced Transparency for Plasmonic Sensing journal April 2010
Enhanced sensing performance by the plasmonic analog of electromagnetically induced transparency in active metamaterials journal September 2010
Electromagnetic diode based on nonlinear electromagnetically induced transparency in metamaterials journal August 2013
Effects of Configuration Interaction on Intensities and Phase Shifts journal December 1961
The Fano resonance in plasmonic nanostructures and metamaterials journal August 2010
Photonic band-gap effects and magnetic activity in dielectric composites journal April 2002
Experimental Observation of Left-Handed Behavior in an Array of Standard Dielectric Resonators journal April 2007
Realization of an all-dielectric zero-index optical metamaterial journal August 2013
Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation journal February 2014
Fano Resonances in All-Dielectric Oligomers journal February 2012
Optical Fano resonance of an individual semiconductor nanostructure journal April 2014
Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances journal May 2014
Near-infrared trapped mode magnetic resonance in an all-dielectric metamaterial journal January 2013
Spectral Collapse in Ensembles of Metamolecules journal June 2010
Metamaterial Transparency Induced by Cooperative Electromagnetic Interactions journal September 2013
Coherent Control of Nanoscale Light Localization in Metamaterial: Creating and Positioning Isolated Subwavelength Energy Hot Spots journal February 2011
Theoretical formalism for collective electromagnetic response of discrete metamaterial systems journal August 2012
Electron-Beam-Driven Collective-Mode Metamaterial Light Source journal November 2012
Optical binding journal September 1989
Temporal coupled-mode theory for the Fano resonance in optical resonators journal January 2003
Optical microcavities journal August 2003
High-Q photonic nanocavity in a two-dimensional photonic crystal journal October 2003
Analysis of guided resonances in photonic crystal slabs journal June 2002
Biosensing with plasmonic nanosensors journal June 2008
Substrate-Induced Fano Resonances of a Plasmonic Nanocube: A Route to Increased-Sensitivity Localized Surface Plasmon Resonance Sensors Revealed journal April 2011
Electromagnetically Induced Transparency book January 2005
Experimental realization of an on-chip all-optical analogue to electromagnetically induced transparency conference May 2006
Metamaterial Analog of Electromagnetically Induced Transparency conference January 2007
A metamaterial analog of electromagnetically induced transparency text January 2008
Low Loss Metamaterials Based on Classical Electromagnetically Induced Transparency text January 2008
Enhanced sensing performance by the plasmonic analogue of electromagnetically induced transparency in active metamaterials text January 2011
Realization of an all-dielectric zero-index optical metamaterial text January 2013

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  • Chong, Katie E.; Orton, Henry W.; Staude, Isabelle
  • Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 375, Issue 2090 https://doi.org/10.1098/rsta.2016.0070
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