Eddy current thickness measurement apparatus

Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

Title: Eddy current thickness measurement apparatus

Patent · Tue Jun 16 00:00:00 EDT 2015

OSTI ID:1184758

Rosen, Gary J.; Sinclair, Frank; Soskov, Alexander; Buff, James S.

A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.

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Research Organization:: Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: EE0000595

Assignee:: Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)

Patent Number(s):: 9,057,146

Application Number:: 12/862,187

OSTI ID:: 1184758

Resource Relation:: Patent File Date: 2010 Aug 24

Country of Publication:: United States

Language:: English

References (15)

Dual purpose electromagnetic thickness gauge Nix, Hans F.; Steingroever, Erich https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3986105 US Patent Document 3,986,105	patent	October 1976
Lateral pulling growth of crystal ribbons and apparatus therefor Shudo, Taro; Kudo, Bosshi; Tamai, Yasuhiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4264407 US Patent Document 4,264,407	patent	April 1981
Method and apparatus for supplying molten metal in the manufacture of amorphous metal ribbons Fukuoka, Hiromi; Asano, Keisuke; Ide, Hideo https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4590988 US Patent Document 4,590,988	patent	May 1986
Guidance system for low angle silicon ribbon growth Jewett, David N.; Bates, Herbert Ellsworth; Milstein, Joseph B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4599132 US Patent Document 4,599,132	patent	July 1986
Coriolis mass flow rate meter Cage, Donald R.; Campbell, Steven Wayne; Hahn, David T. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5448921 US Patent Document 5,448,921	patent	September 1995
Eddy current testing system with scanning probe head having parallel and normal sensing coils Gulliver, James Andrew; Holt, Christopher C.; Boness, Kenneth D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5483160 US Patent Document 5,483,160	patent	January 1996
Instantaneous slag thickness measuring device Muller, Joachim; Haubrich, Hartmut https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5781008 US Patent Document 5,781,008	patent	July 1998
Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors Kesil, Boris; Margulis, David; Gershenzon, Elik https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6593738 US Patent Document 6,593,738	patent	July 2003
Floating Sheet Production Apparatus and Method Kellerman, Peter L.; Sinclair, Frank https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090233396 US Patent Document 12/403206; 20090233396	patent-application	September 2009
Method and Apparatus for Producing a Dislocation-Free Crystalline Sheet Kellerman, Peter L.; Sinclair, Frank; Carlson, Frederick https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090302281 US Patent Document 12/478513; 20090302281	patent-application	December 2009
Eddy current-type coating thickness gauge Bunyaev, V. A.; Boldyrev, V. T.; Dolgikh, V. V. Measurement Techniques, Vol. 34, Issue 11 https://doi.org/10.1007/BF00979689	journal	November 1991
Application of pulsed eddy current and ultrasonic sensors in paint film thickness measuring 2009 Chinese Control and Decision Conference (CCDC) https://doi.org/10.1109/CCDC.2009.5192349	conference	June 2009
Measurement of the spatio-temporal distribution of harmonic and transient eddy currents in a liquid metal Forbriger, J.; Galindo, V.; Gerbeth, G. Measurement Science and Technology, Vol. 19, Issue 4 https://doi.org/10.1088/0957-0233/19/4/045704	journal	February 2008
Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growth Stefani, Jerry A.; Tien, John K.; Choe, Kwang Su Journal of Crystal Growth, Vol. 106, Issue 4, p. 611-621 https://doi.org/10.1016/0022-0248(90)90034-I	journal	December 1990
A Contactless Inductive Velocity Reconstruction Method for Metallic and Semiconducting Melts Stefani, Frank; Gerbeth, Gunter; Gundrum, Thomas Materials and Manufacturing Processes, Vol. 19, Issue 4 https://doi.org/10.1081/AMP-200031872	journal	October 2004

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