The SEMATECH Berkeley MET: demonstration of 15-nm half-pitch in chemically amplified EUV resist and sensitivity of EUV resists at 6.x-nm
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1183189
- Report Number(s):
- LBNL-5491E
- Journal Information:
- Proceedings of SPIE, Vol. 8322; Related Information: Journal Publication Date: March 2012
- Country of Publication:
- United States
- Language:
- English
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