Development of a High Spatial Resolution Detectorfor at-Wavelength Metrology of X-Ray Optics
Conference
·
OSTI ID:1179116
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- DE-AC52-07NA27344
- OSTI ID:
- 1179116
- Report Number(s):
- LLNL-PROC-664677
- Resource Relation:
- Conference: Presented at: IEEE NSS MIC 2014, Seattle, WA, United States, Nov 08 - Nov 15, 2014
- Country of Publication:
- United States
- Language:
- English
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