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Title: Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices

Authors:
 [1];  [1]
  1. Adroit Materials
Publication Date:
Research Org.:
Adroit Materials, Cary, NC (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Advanced Manufacturing Office (EE-5A)
OSTI Identifier:
1177152
Report Number(s):
DOE-AM-11883
DOE Contract Number:  
SC0011883
Type / Phase:
STTR
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English

Citation Formats

Tweedie, James, and Sitar, Zlatko. Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices. United States: N. p., 2015. Web.
Tweedie, James, & Sitar, Zlatko. Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices. United States.
Tweedie, James, and Sitar, Zlatko. Mon . "Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices". United States.
@article{osti_1177152,
title = {Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices},
author = {Tweedie, James and Sitar, Zlatko},
abstractNote = {},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {3}
}

Technical Report:
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