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Title: Methods and devices for fabricating three-dimensional nanoscale structures

Abstract

The present invention provides methods and devices for fabricating 3D structures and patterns of 3D structures on substrate surfaces, including symmetrical and asymmetrical patterns of 3D structures. Methods of the present invention provide a means of fabricating 3D structures having accurately selected physical dimensions, including lateral and vertical dimensions ranging from 10s of nanometers to 1000s of nanometers. In one aspect, methods are provided using a mask element comprising a conformable, elastomeric phase mask capable of establishing conformal contact with a radiation sensitive material undergoing photoprocessing. In another aspect, the temporal and/or spatial coherence of electromagnetic radiation using for photoprocessing is selected to fabricate complex structures having nanoscale features that do not extend entirely through the thickness of the structure fabricated.

Inventors:
; ;
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1176254
Patent Number(s):
7,704,684
Application Number:
11/001,689
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2004 Dec 01
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Rogers, John A., Jeon, Seokwoo, and Park, Jangung. Methods and devices for fabricating three-dimensional nanoscale structures. United States: N. p., 2010. Web.
Rogers, John A., Jeon, Seokwoo, & Park, Jangung. Methods and devices for fabricating three-dimensional nanoscale structures. United States.
Rogers, John A., Jeon, Seokwoo, and Park, Jangung. Tue . "Methods and devices for fabricating three-dimensional nanoscale structures". United States. https://www.osti.gov/servlets/purl/1176254.
@article{osti_1176254,
title = {Methods and devices for fabricating three-dimensional nanoscale structures},
author = {Rogers, John A. and Jeon, Seokwoo and Park, Jangung},
abstractNote = {The present invention provides methods and devices for fabricating 3D structures and patterns of 3D structures on substrate surfaces, including symmetrical and asymmetrical patterns of 3D structures. Methods of the present invention provide a means of fabricating 3D structures having accurately selected physical dimensions, including lateral and vertical dimensions ranging from 10s of nanometers to 1000s of nanometers. In one aspect, methods are provided using a mask element comprising a conformable, elastomeric phase mask capable of establishing conformal contact with a radiation sensitive material undergoing photoprocessing. In another aspect, the temporal and/or spatial coherence of electromagnetic radiation using for photoprocessing is selected to fabricate complex structures having nanoscale features that do not extend entirely through the thickness of the structure fabricated.},
doi = {},
url = {https://www.osti.gov/biblio/1176254}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {4}
}

Patent:

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Works referenced in this record:

Directed Assembly of One-Dimensional Nanostructures into Functional Networks
journal, January 2001


Holographic photonic crystals with diamond symmetry
journal, November 2003


Fabrication of a Cylindrical Display by Patterned Assembly
journal, April 2002


Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995


Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles
journal, November 2002


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
journal, June 2003


Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
journal, December 2003


Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks
journal, August 2004


Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001


Fabrication of photonic crystals for the visible spectrum by holographic lithography
journal, March 2000


Block copolymers as photonic bandgap materials
journal, November 1999


Colloidal Inks for Directed Assembly of 3-D Periodic Structures
journal, July 2002


Porous silica via colloidal crystallization
journal, October 1997


Mesoporous silica with micrometer-scale designs
journal, January 1997


Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates
journal, February 1999


Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998


Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003


On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
journal, June 2002


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994


Semiconductor nanotube formation by a two-step template process
journal, October 1996


Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
journal, October 2004


From Micro- to Nanofabrication with Soft Materials
journal, November 2000


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


Finer features for functional microdevices
journal, August 2001


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


High-performance thin-film transistors using semiconductor nanowires and nanoribbons
journal, September 2003


An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
journal, May 2002


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


Polymer-Polymer Phase Behavior
journal, February 1991


Diamond-structured photonic crystals
journal, September 2004


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Surface-induced structure formation of polymer blends on patterned substrates
journal, February 1998


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998


Nanobelts of Semiconducting Oxides
journal, March 2001


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999


Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
journal, June 1998

  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68
  • https://doi.org/10.1116/1.589836

Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000