Method and apparatus for fabricating a thin-film solar cell utilizing a hot wire chemical vapor deposition technique
Patent
·
OSTI ID:1175951
A thin-film solar cell is provided. The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten (10) .ANG./second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a thin film solar cell is also provided. The method comprises depositing a n-i-p layer at a deposition rate of at least ten (10) .ANG./second for the a-SiGe:H intrinsic layer.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-99GO10337
- Assignee:
- Midwest Research Institute (Kansas City, MO)
- Patent Number(s):
- 7,122,736
- Application Number:
- 10/485,715
- OSTI ID:
- 1175951
- Resource Relation:
- Patent File Date: 2001 Aug 16
- Country of Publication:
- United States
- Language:
- English
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