Condenser optic with sacrificial reflective surface
Patent
·
OSTI ID:1175848
Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.
- Research Organization:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States); EUV LLC, Santa Clara, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- 7,081,992
- Application Number:
- 10/760,118
- OSTI ID:
- 1175848
- Resource Relation:
- Patent File Date: 2004 Jan 16
- Country of Publication:
- United States
- Language:
- English
Publications and patents in nanotechnology
|
journal | January 2003 |
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